Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate

ZHANG Ke-hua; SHI Dong; LIU Run-zhi; XIAO Zhi-lan; CHENG Guang-ming

doi:10.3788/OPE.20162402.0343

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Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate

更新时间：2020-08-13

- Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate
- Optics and Precision Engineering Vol. 24, Issue 2, Pages: 343-349(2016)
- 作者机构：
  
  浙江师范大学精密机械研究所, 浙江金华 321004
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162402.0343
  CLC： TG662;TM914.4+2
- Received：20 August 2015，
  
  Revised：27 September 2015，
  
  Published：25 February 2016
- 稿件说明：
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张克华, 石栋, 刘润之等. 电化学机械复合抛光薄膜太阳能电池柔性不锈钢衬底[J]. 光学精密工程, 2016,24(2): 343-349

ZHANG Ke-hua, SHI Dong, LIU Run-zhi etc. Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate[J]. Editorial Office of Optics and Precision Engineering, 2016,24(2): 343-349
张克华, 石栋, 刘润之等. 电化学机械复合抛光薄膜太阳能电池柔性不锈钢衬底[J]. 光学精密工程, 2016,24(2): 343-349 DOI： 10.3788/OPE.20162402.0343.

ZHANG Ke-hua, SHI Dong, LIU Run-zhi etc. Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate[J]. Editorial Office of Optics and Precision Engineering, 2016,24(2): 343-349 DOI： 10.3788/OPE.20162402.0343.

摘要

设计了针对薄膜太阳能电池柔性不锈钢衬底的电化学机械复合抛光法以满足其对表面粗糙度、光反射率和有害物质扩散的要求。首先

设计并制造了一种用于平面加工的复合阴极刀具

理论分析了它的材料去除机理。然后

结合法拉第原理和黏着摩擦理论分析了电化学腐蚀行为和摩擦力作用行为

解决了电化学腐蚀和机械去除钝化膜的匹配一致性问题。最后

以50 mm50 mm0.3 mm规格的304不锈钢为阳极工件

对提出的方法进行了实验验证。结果显示:对衬底加工20 min后

其表面粗糙度

从124 nm降到10 nm;表面反射率从加工前的56.8%提高到62.4%;表面金属氧化层的形成(氧化铁和氧化铬)

有效阻挡了Fe和Cr离子的扩散。实验显示

提出的方法是处理柔性不锈钢表面的有效方法

成本低、效率高。

Abstract

A novel method integrating electrochemical machining with mechanical action was proposed to polish the flexible metal foil to satisfy the requirements of thin-film solar cell flexible stainless steel substrate for lower surface roughness

higher light reflection rate and lower harmful impurity. Firstly

a compound cathode was designed and manufactured for machining flat surfaces

meanwhile its mechanism on the material removal was analyzed. Then

the electrochemical corrosion behaviors and friction effects were analyzed based on the Faraday law and adhesion friction theory

by which the match action between electrochemical corrosion and mechanical action was resolved. Finally

taking the 304 stainless steel sized 50 mm50 mm0.3 mm as the workpiece

an experiment was conducted to demonstrate above analysis. The results show that the surface roughness has changed from

124 nm to

10 nm and the reflection rate changed from 56.8% to 62.4% after polishing time of 20 min. Moreover

a metal oxide layer(Fe

) is formed

which blocks the diffusion of Fe and Cr. These results indicate that the method proposed has higher efficient and economical to process thin film solar cells with flexible stainless steel foils.

关键词

Keywords

references

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