Micro-measurement of SU-8 photoelastic performance

CHU Jin-kui; LI Shuang-liang; ZHANG Ran

doi:10.3788/OPE.20162403.0547

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Micro-measurement of SU-8 photoelastic performance

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Micro-measurement of SU-8 photoelastic performance
- Optics and Precision Engineering Vol. 24, Issue 3, Pages: 547-552(2016)
- 作者机构：
  
  大连理工大学机械工程学院, 辽宁大连 116023
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162403.0547
  CLC： O348.1;TN305.7
- Received：20 August 2015，
  
  Revised：15 September 2015，
  
  Published：25 March 2016
- 稿件说明：
移动端阅览
褚金奎, 李双亮, 张然. SU-8胶光弹性性能显微测试[J]. 光学精密工程, 2016,24(3): 547-552

CHU Jin-kui, LI Shuang-liang, ZHANG Ran. Micro-measurement of SU-8 photoelastic performance[J]. Editorial Office of Optics and Precision Engineering, 2016,24(3): 547-552
褚金奎, 李双亮, 张然. SU-8胶光弹性性能显微测试[J]. 光学精密工程, 2016,24(3): 547-552 DOI： 10.3788/OPE.20162403.0547.

CHU Jin-kui, LI Shuang-liang, ZHANG Ran. Micro-measurement of SU-8 photoelastic performance[J]. Editorial Office of Optics and Precision Engineering, 2016,24(3): 547-552 DOI： 10.3788/OPE.20162403.0547.

摘要

考虑获知SU-8胶的光弹性性能有利于拓展其在微纳米领域中的应用范围

本文设计了材料应力光学系数显微测量光路

完成了SU-8胶应力光学系数的测量实验。首先

基于光弹性原理设计了测量光路

推导了求解应力光学系数的计算公式;然后

根据所设计的光路搭建了应力光学系数显微测量实验装置

在SU-8胶试样光弹性条纹的单个半级数范围内进行了单向拉伸实验;最后

利用Matlab提取实验照片组中光强值信息

得到了不同拉力下透过SU-8胶试样的单色光光强值

计算求解出了SU-8胶的应力光学系数。实验结果以及测量公式计算显示

SU-8胶的应力光学系数为(3.007±0.149)×10

-11

大于光学玻璃等材料的应力光学系数

也远大于二氧化硅等MEMS领域常用材料的应力光学系数。实验结果可为以SU-8胶为材料

通过光弹性原理进行微力测量的微探针、微夹钳等的设计与制作打下基础。

Abstract

The photoelastic performance of SU-8 photoresist is related to extending its applications to the field of MEMS(Micro-electronic-mechanical System). Therefore

this paper designs a micro-measuring path to obtain the stress-optical coefficient of the SU-8

and implements the measurement experiment of SU-8 photoelastic performance. Firstly

based on the photoelastic mechanism

the micro-measuring optical path was designed and the formulas for the calculation of SU-8 stress-optical coefficient were deduced. Then

the experiment devices for photoelastic microscopic measurement were built according to the designed optical path

and the tensile test of SU-8 specimen was conducted in the scope of the half order of a single photoelastic fringe. Finally

through extracting the values of the light intensity from the experimental photographs by Matlab

the light intensity of monochromatic light penetrated throught the SU-8 specimen under different tensile forces were measured and the value of SU-8 stress-optical coefficient was calculated. The experimental results and the calculation of measurement formulas show that the stress-optical coefficient of SU-8 is(3.007±0.149)×10

-11

greater than that of normal optical glass and other materials commonly used in MEMS fields

such as silica. The experimental results can lay a foundation for the design and manufacturing of micro-grippers and micro-probes made from the SU-8 materials and used for the force measurement through photoelastic mechanisms.

关键词

Keywords

references

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