Grating ruling platform leveling device based on image clarity measurement

DING Jian-sheng; SHI Guo-quan; SHI Guang-feng

doi:10.3788/OPE.20162404.0819

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Grating ruling platform leveling device based on image clarity measurement

更新时间：2020-08-13

- Grating ruling platform leveling device based on image clarity measurement
- Optics and Precision Engineering Vol. 24, Issue 4, Pages: 819-825(2016)
- 作者机构：
  
  长春理工大学机电工程学院,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162404.0819
  CLC： TN305.7
- Received：01 December 2015，
  
  Revised：20 January 2016，
  
  Published：25 April 2016
- 稿件说明：
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丁健生, 史国权, 石广丰. 基于图像清晰度检测的光栅刻划平台调平装置[J]. 光学精密工程, 2016,24(4): 819-825

DING Jian-sheng, SHI Guo-quan, SHI Guang-feng. Grating ruling platform leveling device based on image clarity measurement[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 819-825
丁健生, 史国权, 石广丰. 基于图像清晰度检测的光栅刻划平台调平装置[J]. 光学精密工程, 2016,24(4): 819-825 DOI： 10.3788/OPE.20162404.0819.

DING Jian-sheng, SHI Guo-quan, SHI Guang-feng. Grating ruling platform leveling device based on image clarity measurement[J]. Editorial Office of Optics and Precision Engineering, 2016,24(4): 819-825 DOI： 10.3788/OPE.20162404.0819.

摘要

针对制备衍射光栅时刻划平台倾斜导致的光栅槽型误差

提出了一种基于图像清晰度检测与电动倾斜台调节的光栅刻划平台在线调平装置。建立了图像清晰度与光栅刻划平台倾角间关系的模型

应用该模型

控制光栅刻划平台在一定范围内实现了闭环动态调平。对上述理论研究进行了试验验证。试验结果表明

该调平装置简单可行;对于50 mm×50 mm的光栅毛胚

调平装置可控制刻划平台的水平倾角在4"以内

满足光栅刻划对平台定位精度的要求。该装置既可用于刻划前的调平准备

也可推广应用于光栅刻划过程中的实时检测。

Abstract

To reduce the grating groove errors caused by the inclination of a grating ruling platform in the fabrication of diffractive gratings this paper proposes a real-time leveling device for the grating ruling platform based on image clarity measurement and electrically adjusting a tilting table. A physical model was built based on the inclination relations between the image clarity measuring and the inclination angle of grating ruling platform. Based on the model

the leveling device could control the grating ruling platform to implement the closed loop dynamic leveling within a certain range. The above theory was verified by tests. The results show that the leveling device is simple and feasible. For a grating blank with a size of 50 mm×50 mm

it controls the inclination of the grating ruling platform to be within 4"

meeting the requirements of the grating ruling for platform positioning accuracy. Moreover

the leveling device can be used in leveling before ruling and also in ruling processing in real time.

关键词

Keywords

references

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Related Institution

College of Mechanical and Electric Engineering, Changchun Unviersity of Science and Technology

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