FAN Wei, LIN Yu-yang, LI Zhong-shen. Hysteresis characteristics of piezoelectric ceramic actuators[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1112-1117
FAN Wei, LIN Yu-yang, LI Zhong-shen. Hysteresis characteristics of piezoelectric ceramic actuators[J]. Editorial Office of Optics and Precision Engineering, 2016,24(5): 1112-1117 DOI: 10.3788/OPE.20162405.1112.
Hysteresis characteristics of piezoelectric ceramic actuators
As the inherent hysteresis phenomena of a piezoelectric ceramic actuator affects its positioning accuracy badly
this paper analyzes and verifies the characteristics of the hysteresis phenomena. The causes of hysteresis were analyzed through microscopic polarization mechanism and electromechanical coupling effects.Some experiments were designed to compare the hysteresis characteristics under different travels
different positions of the whole travel and different initial voltages.The experimental results indicate that:for the driving travel of 10 V
the output of average displacement increases at first then decreases and the average hysteresis error decreases from 0.419 3
μ
m to 0.158 9
μ
m as the increases of voltage intervals; for the driving travel of 100 V
the output of average displacement decreases from 42.882 5
μ
m to 25.92
μ
m and the average hysteresis error decreases from 3.999 3
μ
m to 1.692 3
μ
m as the increases of initial voltages. Moreover
when the initial voltage increases by 15 V
the output of displacement decreases by 5.654 2
μ
m on average
and the hysteresis error decreases by 0.769
μ
m on average.These results reflect the influence of domain switching status in the initial phase on electromechanical coupling efficiency in the driving process and also verify the domain switching theory effectively. The experiments suggest that the compensation for hysteresis errors of the piezoelectric ceramic actuator according to the hysteresis characteristics of domain switching in different steps can correct or reduce the effects by hysteresis errors
and can provide scientific reference for improving the control accuracy of positing systems.
关键词
Keywords
references
RANGASAMY M.Nano technology:review[J].Journal of Applied Pharmaceutical Science,2011,1(2):8-16.
李伟,高思田,卢明臻,等. 计量型原子力显微镜的位移测量系统[J]. 光学精密工程,2012,20(4):796-802. LI W,GAO S T,LU M ZH,et al..Position measuring system in metrological atomic force microscope[J].Opt. Precision Eng.,2012,20(4):796-802.(in Chinese)
KOMMEPALLI H K R.Design,Modeling and Optimization of Piezoelectric Actuators[D].Commonwealth of Pennsylvania:The Pennsylvania State University,2010.
BAHRAMI A,TAFAOLI-MASOULE M,BAHRAMI M N.Active vibration control of piezoelectric stewart platform based on Fuzzy Control[J].International Journal of Material and Mechanical Engineering,2013,2(1):17-22.
QIN Y,TIAN Y,ZHANG D,et al..A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications[J].IEEE/ASME Transactions on Mechatronics,2013,18(3):981-989.
RAKOTONDRABE M.Bouc-Wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators[J].IEEE Transactions on automation Science and Engineering,2011,8(2):428-431.
JUHASZ L,MAAS J,BOROVAC B.Parameter identification and hysteresis compensation of Embedded Piezoelectric stack actuators[J].Mechatronics,2011,21(1):329-338.
WANG X,REYSETT A,POMMIER-BUDINGER V,et al..A modified Preisach model and its inversion for hysteresis compensation in piezoelectric actuators[J].Multidiscipline Modeling in Materials & Structures(Emerald Group Publishing Limited),2014:122-142.
ZHOU M L,HE SH B,HU B,et al..Modified KP model for hysteresis of magnetic shape memory alloy actuator[J].IETE Technical Review,2015,32(1):29-36.
WANG D,YU P,WANG F F,et al..Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model[J].Sensors,2015,15(2):3409-3425.
曹荣,秦岚,夏含信,等. PID控制技术在压电陶瓷精密定位过程的应用[J]. 仪器仪表学报,2010,33(2):18-21. CAO R,QIN L,XIA H X,et al..The application of PID controlling technique in PZT precision positioning[J].Chinese Journal of Scientific Instrument,2010,33(2):18-21.(in Chinese)
陈辉,谭永红,周杏鹏,等. 压电陶瓷执行器的动态模型辨识与控制[J]. 光学精密工程,2012,20(1):88-95. CHEN H,TAN Y H,ZHOU X P,et al..Identification and control of dynamic modeling for piezoceramic actuator[J].Opt.Precision Eng.,2012,20(1):88-95.(in Chinese)
CHENG L,LIU W CH,HOU Z G,et al..Neural network-based nonlinear model predictive control for piezoelectric actuators[J].IEEE Transactions on Industrial Electronics,2015,62(12):7717-7727.
WONG P,XU Q S,VONG C,et al..Rate-dependent hysteresis modeling and control of a piezostage using online support vector machine and relevance vector machine[J].IEEE Transactions on Industrial Electronics,2012,59(4):1988-2001.
刘红军,刘洁,叶芳. 用于超磁致伸缩作动器的一种改进的控制方法[J]. 哈尔滨工业大学学报,2012,44(9):91-95. LIU H J,LIU J,YE F.An improved control method for the giant magnetostrictive actuator[J].Journal of Harbin Institute of Technology,2012,44(9):91-95.(in Chinese)
YANG L,LI J.Robust output feedback control with disturbance estimation for piezoelectric actuators[J].Neurocomputing,2016,173:2129-2135.
赖志林,刘向东,耿洁,等. 压电陶瓷执行器迟滞的滑模逆补偿控制[J]. 光学精密工程,2011,219(6):1281-1290. LAI ZH L,LIU X D,GENG J,et al..Sliding mode control of hysteresis of piezoceramic actuator based on inverse Preisach compensation[J].Opt.Precision Eng.,2011,219(6):1281-1290.(in Chinese)
ESCARENO J A,RAKOTONDRABE M,HABINEZA D.Backstepping-based robust-adaptive control of a nonlinear 2-DOF piezoactuator[J].Control Engineering Practice,2015,41:57-71.
MILLER S L,NASBY R D,et al..Device modeling of ferroelectric capacitors[J].Journal of Applied Physics,1990,68:6463.
张福学,王丽坤. 现代压电学[M]. 北京:科学出版社,2002:93-97. ZHANG F X,WANG L K.Modern Piezoelectric[M].Beijing:Science Press,2002:93-97.(in Chinese)
范伟. 六自由度纳米工作台驱动控制方法及系统研究[D]. 安徽:合肥工业大学,2009. FAN W.Research on the Drive System and Control Method for Nano-table With Six Degrees of Freedom[D].Anhui:Hefei University of Technology,2009.(in Chinese)