Large-diameter membrane Fresnel diffraction elements for space telescope

ZHANG Jian; LI Meng-juan; YIN Gang-hua; JIAO Jian-chao; LIU Zheng-kun; XU Xiang-dong; FU S

doi:10.3788/OPE.20162406.1289

您当前的位置：

首页 >

文章列表页 >

Large-diameter membrane Fresnel diffraction elements for space telescope

Modern Applied Optics | 更新时间：2020-08-13

- Large-diameter membrane Fresnel diffraction elements for space telescope
- Optics and Precision Engineering Vol. 24, Issue 6, Pages: 1289-1296(2016)
- 作者机构：
  
  1. 北京空间机电研究所北京,100076
  2. 中国科学技术大学国家同步辐射实验室,安徽合肥,230029
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162406.1289
  CLC： O436.1
- Received：01 March 2016，
  
  Revised：29 April 2016，
  
  Published：25 June 2016
- 稿件说明：
移动端阅览
张健, 栗孟娟, 阴刚华等. 用于太空望远镜的大口径薄膜菲涅尔衍射元件[J]. 光学精密工程, 2016,24(6): 1289-1296

ZHANG Jian, LI Meng-juan, YIN Gang-hua etc. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Editorial Office of Optics and Precision Engineering, 2016,24(6): 1289-1296
张健, 栗孟娟, 阴刚华等. 用于太空望远镜的大口径薄膜菲涅尔衍射元件[J]. 光学精密工程, 2016,24(6): 1289-1296 DOI： 10.3788/OPE.20162406.1289.

ZHANG Jian, LI Meng-juan, YIN Gang-hua etc. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Editorial Office of Optics and Precision Engineering, 2016,24(6): 1289-1296 DOI： 10.3788/OPE.20162406.1289.

摘要

为了满足空间衍射成像系统对大口径、轻量化衍射元件的需求，设计制作了直径为400 mm 的聚酰亚胺（PI）薄膜菲涅尔衍射元件。通过紫外光刻、离子束刻蚀等微细加工方法在石英基底上制作衍射图形，然后将衍射图形复制到 PI 薄膜上得到菲涅尔衍射型薄膜元件。结合有限元法探究了薄膜复制过程中热应力的变化规律及降低热应力的方法，分析了影响薄膜衍射效率的因素及薄膜制作误差、温度变化对薄膜成像的影响，最终实现了大面积薄膜与基底的分离，并通过局部氧气等离子体轰击提高了薄膜衍射效率的均匀性。经测试，薄膜菲涅尔衍射元件的厚度约为20 μm，在波长633 nm处的实际衍射效率平均值为33.14%，达到了理论效率的81.83%，衍射效率的均方根值RMS=0.01。实验结果表明，通过紫外光刻、离子束刻蚀和薄膜复制的方法可以得到大口径、高衍射效率的薄膜菲涅尔衍射元件。

Abstract

In order to meet requirements of large diameter and light-weighting diffraction elements for space diffraction imaging system

the polyimide (PI) membrane Fresnel diffraction elements with the diameter of 400 mm were designed and manufactured. With ultraviolet lithography

ion beam etching and other microfabrication methods

diffraction patterns on quartz substrate were made and then reproduced onto PI membrane

thereby obtaining the Fresnel diffraction type membrane elements. The change rule of thermal stress during the membrane reproduction process and the methods for reducing thermal stress were researched by Finite Element Method (FEM). The influence factors of the membrane diffraction efficiency

and impact of membrane production error and temperature change on membrane imaging were analysed. Finally

the separation of large-diameter membrane and substrate was realized

and the uniformity of membrane diffraction efficiency was improved by local oxygen plasma bombardment. By testing

the thickness of membrane Fresnel diffraction element is 20 μm

and the average value of actual diffraction efficiency is 33.14% when wavelength is 633 nm

reaching 81.83% of the theoretical efficiency

and Root Mean Square (RMS) of diffraction efficiency is 0.01. The experimental results show that large diameter and high diffraction efficiency membrane Fresnel diffraction elements can be manufactured by ultraviolet lithography

ion beam etching and membrane reproduction.

关键词

Keywords

references

HYDE R A. Eyeglass. 1. very large aperture diffractive telescopes [J]. Appl. Opt., 1999, 38(19): 4198-4212.

HYDE R A, DIXIT S, WEISBERG A, et al.. Eyelass: A very large aperture diffractive telescopes [J]. SPIE, 2002, 4894: 28-39.

BARTON I M,BRITTEN J A, DIXIT S N,et al.. Fabrication of large-aperture lightweight diffractive lenses for use in space [J]. Appl. Opt., 2001, 40(4): 447-451.

MEINELl A, MEINEL M. Large membrane space optics: imagery and aberrations of diffractive order and holographic achromatized optical elements of high diffraction order [J]. Opt. Eng., 2002, 41(8):1995-2007.

ATCHESON P, STEWART C, DOMBER J, et al.. MOIRE: initial demonstration of a transmissive diffractive membrane optic for large lightweight optical telescopes [J] .SPIE, 2012, 8442:844221.

EARLY J,HYDE R, BARON R. Twenty meter space telescopes based on diffractive Fresnel lens [J]. SPIE, 2004, 5166: 148-156.

DOMBER J L, ATCHESON P, KOMMERS J. MOIRE: ground test bed results for a large membrane telescope[C]. AIAA, 2014, 1510:1-17.

PAUL A, JEANETTE D, KEVIN W. MOIRE-ground demonstration of a large aperture diffractive transmissive telescope [J]. SPIE, 2014, 9143: 91431w.

BRITTEN J, DIXIT S, DEBRUYCKERE M, et al.. Large-aperture fast multilevel Fresnel zone lenses in glass and ultrathin polymer films for visible and near-infrared imaging applications [J]. Appl. Opt.,2014, 53(11):2312-2316.

刘韬. 天基衍射成像系统及相关技术发展研究[J]. 国际太空,2014(8):46-52. LIU T. Research of space-based diffraction imaging system and related technology [J]. Space International, 2014(8):46-52.

刘民哲,刘华,许文斌,等. 用于空间望远镜的膜光子筛[J]. 光学精密工程,2014, 22(8):2127-2134. LIU M ZH, LIU H, XU W B, et al.. Membrane photo sieve for space telescope [J].Opt. Precision Eng., 2014, 22(8):2127-2134. (in Chinese)

刘华. 利用汉克尔变换设计高斯光束整形衍射元件的应用研究[J]. 中国光学,2016, 9(2): 277-283. LIU H. Gaussian beam shaping diffractive optical element designed by Hankel transformation [J]. Chinese Optics, 2016, 9(2): 277-283. (in Chinese)

CHEN X L, SU Y, JIAO J C. Technologies of diffractive imaging system for high-resolution earth observation from geostationary orbit [J]. SPIE, 2013, 8908: 890823.

CHUNG H, JOY Y, HAN H. Effect of poly (amic diethyl ester) prescursor on residual stress behavior of aromatic polymides [J].Polymer Journal, 1999,31(9):700-706.

NUMATA S, FUJISAKI K, KINJO N. Re-examination of the relationship between packing coefficient and thermal expansion coefficient for aromatic polyimides [J]. Polymer, 1987, 28:2282-2288.

刘华,卢振武,阎勇. 大口径衍射望远系统公差分析及测量[J]. 光子学报,2013,42(10):1023-1027. LIU H, LU ZH W, YAN Y. Large aperture diffractive telescope tolerance analysis and measurement [J].Acta Photonica Sinica, 2013, 42(10): 1023-1027.(in Chinese)

张智斌. 波带片的设计及其衍射特性研究[D]. 浙江:浙江大学,2010. ZHANG ZH B. Design of Zone Plates and Their Diffraction Characteristics [D]. Zhejiang: Zhejiang University, 2010. (in Chinese)

Views

591

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Membrane photon sieve for space telescope

Shafting design for precise two-dimensional turntable applied to Φ 300 mm plane mirror

Phase mask for fabrication of fiber Bragg gratings by femtosecond laser

Design of high spatiotemporal resolution dynamic star simulator

Related Author

LIU Min-zhe

LIU Hua

XU Wen-bin

WANG Tai-sheng

LU Zhen-wu

YU Wei-xing

Fu-nan YU

Shu-yan XU

Related Institution

University of Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University

Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University

Univercity of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰