Analysis on wave mode of flexible surface acoustic wave devices

ZHOU Jian; WU Xue-zhong; XIAO Ding-bang; HE Xing-li; JIN Hao; DONG Shu-rong; ZHANG Wei-ce

doi:10.3788/OPE.20162406.1328

您当前的位置：

首页 >

文章列表页 >

Analysis on wave mode of flexible surface acoustic wave devices

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Analysis on wave mode of flexible surface acoustic wave devices
- Optics and Precision Engineering Vol. 24, Issue 6, Pages: 1328-1334(2016)
- 作者机构：
  
  1. 国防科学技术大学机电工程与自动化学院,湖南长沙,410073
  2. 浙江大学信息与电子工程学院,浙江杭州,310027
  3. 福建工程学院信息科学与工程学院,福建福州,350108
  4. 南昌陆军学院,江西南昌,330100
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162406.1328
  CLC： TN65
- Received：09 November 2015，
  
  Revised：11 January 2016，
  
  Published：25 June 2016
- 稿件说明：
移动端阅览
周剑, 吴学忠, 肖定邦等. 柔性声表面波器件的波模式分析[J]. 光学精密工程, 2016,24(6): 1328-1334

ZHOU Jian, WU Xue-zhong, XIAO Ding-bang etc. Analysis on wave mode of flexible surface acoustic wave devices[J]. Editorial Office of Optics and Precision Engineering, 2016,24(6): 1328-1334
周剑, 吴学忠, 肖定邦等. 柔性声表面波器件的波模式分析[J]. 光学精密工程, 2016,24(6): 1328-1334 DOI： 10.3788/OPE.20162406.1328.

ZHOU Jian, WU Xue-zhong, XIAO Ding-bang etc. Analysis on wave mode of flexible surface acoustic wave devices[J]. Editorial Office of Optics and Precision Engineering, 2016,24(6): 1328-1334 DOI： 10.3788/OPE.20162406.1328.

摘要

用反应磁控溅射法在柔性聚酰亚胺衬底上沉积了ZnO压电薄膜，并制备了基于ZnO压电薄膜的柔性声表面波（SAW）器件。制备的柔性SAW器件显示了良好的谐振性能，而且展现出两个波模式：模式0和模式1。当波长为32 μm，ZnO厚度为4 μm时，SAW器件的模式0和模式1的谐振频率分别为34.4 MHz 和158.5 MHz，对应声速为1 100.8 m／s 和5 072 m／s。模式0为已知的瑞利波，模式1为新的高频模式。沉积了不同厚度的ZnO薄膜制备柔性SAW器件，进一步分析了薄膜厚度对SAW器件和模式1的影响。分析认为该高频模式不是传统硬质衬底上SAW器件产生的Sezawa波，而是S

兰姆波，并且是有衬底情况下的S

兰姆波。文中还采用Comsol仿真分析了新的高频模式1的粒子振动位移，结果和S

兰姆波粒子振动位移一致，从而验证了其为广义兰姆波的正确性。

Abstract

ZnO piezoelectric films were deposited on polyimide substrates by reactive magnetron sputtering method

and flexible Surface Acoustic Wave( SAW) devices were prepared based on the ZnO piezoelectric films. The flexible SAW devices show excellent resonant characteristics and two wave modes

mode 0 and mode 1. The resonant frequencies of the SAW devices with a ZnO layer by thickness of 4 m are 34.4 MHz and 158.5 MHz for the mode 0 and mode 1

and corresponding acoustic phase velocities are 1 100.8 m/s and 5 072 m/s

respectively. The Mode 0 is Rayleigh wave

while the Mode 1 is a new high frequency mode. The ZnO piezoelectric films with different thicknesses were deposited for preparing the SAW devices

and the effects of ZnO film thicknesses on the SAW devices and the new mode were analyzed by Finite Element Method. The results show that the new high frequency mode is not the Sezawa wave produced on the traditional hard substrate but is a S

Lamb wave with a substrate. Moreover

the Comsol was used to simulate and analyze the vibration and surface displacement of the Mode 1 with PI or without PI substrates and the results indicate that the vibration and surface displacement of the Mode 1 is in agreement with that of S

Lamb wave

which validates that the new mode is S

Lamb wave.

关键词

Keywords

references

SENVELI S U, AO Z,RAWAL S, et al..A surface acoustic wave biosensor for interrogation of single tumour cells in microcavities[J]. Lab Chip, 2016,16:163-171.

WANG J,HU H,YE A,et al.. Experimental investigation of surface acoustic wave atomization[J]. Sens. Actuators A, 2016,238:1-7.

刘凤娟, 胡佐富, 李振军, 等. 分子束外延生长的ZnO压电薄膜及其声表面波器件特性[J]. 发光学报, 2012,33: 328-333. LIU F J, HU Z F, LI ZH J, et al.. Surface acoustic wave based on ZnO thin films grown by RF-MBE[J]. Chinese Journal of Luminescence, 2012,33(3): 328-333. (in Chinese)

周剑,何兴理,金浩,等. 基于ZnO压电薄膜的柔性声表面波器件[J]. 光学精密工程, 2014,22:346-350. ZHOU J, HE X l, JIN H, et al.. Flexible ZnO thin film SAW device on polyimide substrate[J]. Opt. and Precision Eng., 2014,22(2): 346-350. (in Chinese)

高阳,李以贵,张俊峰. 利用声表面波实现液体的二维驱动[J]. 光学精密工程,2009,17:1548-1552. GAO Y, LI Y G, ZHANG J F. Two-dimensional actuation of liquid using surface acoustic wave[J]. Opt. and Precision Eng., 2009,17(7): 1548-1552. (in Chinese)

LUO J K,FU Y,ASHLEY G,et al.. Integrated ZnO film based acoustic wave microfluidics and biosensors[J]. Adv. Sci. Tech., 2011,67:49-58.

FU Y,LUO J,DU X, et al.. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review[J]. Sens. Actuat. B, 2010,143:606-619.

SHU L,PENG B,YANG Z B, et al.. High-temperature SAW wireless strain sensor with langasite[J]. Sensors, 2015,15: 28531-28542.

SHILTON R J,MATTOLI V, TRAVAGLIATI,et al.. Rapid and controllable digital microfluidic heating by surface acoustic waves[J]. Adv. Funct. Mater., 2015,25:5895-5901.

LAN X D,ZHANG S Y,WANG Y,et al.. Humidity responses of Love wave sensors based on view the MathML source ZnO/R-sapphire bilayer structures[J]. Sens. Actuat. A, 2015,230:136-141.

CHEN J K,GUO H W,HE X L,et al.. Development of flexible ZnO thin film surface acoustic wave strain sensors on ultrathin glass substrates[J]. J. Micromech. Microeng., 2015,25:1150051-7.

张冬至, 童俊, 刘哲,等. 基于电活性聚合物薄膜柔性器件的触觉传感特性[J]. 光学精密工程,2014,22:2151-2158. ZHANG D ZH, TONG J, LIU ZH, et al.. Tactile sensing characteristics of electroactive polymer film based flexible devices[J]. Opt. Precision Eng., 2014,22(8): 2151-2158. (in Chinese)

KIM D H,LU N, MA R,et al.. Epidermal electronics[J]. Science, 2011,333:838-843.

陈龙龙, 张建华, 李喜峰, 等. 基于柔性PI基底的氧化物IGZO TFT器件工艺及特性研究[J]. 液晶与显示, 2015,30:796-800. CHEN L L, ZHANG J H, LI X F, et al.. Process and properties of oxide IGZO TFT device based on flexible PI substrate[J]. Chinese Journal of Liquid Crystals and Displays, 2015,30(5): 796-800. (in Chinese)

AULD B A. Acoustic Fields and Waves in Solids[M]. 1973.

ZHOU J, HE X L,JIN H,et al.. Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices[J]. J.Appl. Phys., 2013,114:044502-044508.

DU X Y,FU Y Q,TAN S C, et al.. ZnO film thickness effect on surface acoustic wave modes and acoustic streaming[J]. Appl. Phys. Lett., 2008,93:0941051-0941053.

JIN H,ZHOU J,HE X, et al.. Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications[J]. Sci. Rep., 2013,3:2140-2148.

ZHOU J,HE X L,WANG W B,et al.. Transparent surface acoustic wave devices on ZnO/glass using Al-doped ZnO as the electrode[J]. IEEE Electron Device Lett. , 2013,34:1319-1321.

SHIH W C,WANG M J,LIN I N. Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates[J]. Diamond Relat. Mater. , 2008,17: 390-395.

LAURENT T,BASTIEN F O,POMMIER J C,et al.. Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane:Application to sensors able to operate in contact with liquid[J]. Sens. Actuat. A, 2000,87:26-37.

LIU Y,LI Y F, EL-HADY A M,et al.. Flexible and bendable acoustofluidics based on ZnO film coated aluminium foil[J]. Sens. Actuat. B, 2015,221:230-235.

Views

329

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Flexible ZnO thin film SAW device on polyimide substrate

Electrochemical mechanical polishing of thin film solar cell flexible stainless steel substrate

Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever

A temperature sensor array based on flexible MEMS skin technology

Related Author

LUO Ji-kui

WANG De-miao

JIN Hao

HE Xing-li

ZHOU Jian

SHI Dong

CHENG Guang-ming

XIAO Zhi-lan

Related Institution

浙江大学信息与电子工程学系

英国博尔顿大学可再生能源和环境技术研究所,博尔顿 BL35AB

Institute of precision machinery, Zhejiang Normal University, Jinhua 321004, China

School of Automotive Engineering, Dalian University of Technology

School of Electronic Engineering, Dalian University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰