Linear piezoelectric motor with triangular displacement transformer

Yin WANG; Song PAN; Wei-qing HUANG; Qing YU

doi:10.3788/OPE.20162408.1973

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Linear piezoelectric motor with triangular displacement transformer

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Linear piezoelectric motor with triangular displacement transformer
- Optics and Precision Engineering Vol. 24, Issue 8, Pages: 1973-1979(2016)
- 作者机构：
  
  1.华侨大学机电及自动化学院, 福建厦门 361021
  2.南京航空航天大学机械结构力学与控制国家重点实验室, 江苏南京 210016
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162408.1973
  CLC： TM359.4
- Received：15 February 2016，
  
  Accepted：20 March 2016，
  
  Published：25 August 2016
- 稿件说明：
移动端阅览
Yin WANG, Song PAN, Wei-qing HUANG, et al. Linear piezoelectric motor with triangular displacement transformer[J]. Optics and precision engineering, 2016, 24(8): 1973-1979.
DOI：

Yin WANG, Song PAN, Wei-qing HUANG, et al. Linear piezoelectric motor with triangular displacement transformer[J]. Optics and precision engineering, 2016, 24(8): 1973-1979. DOI： 10.3788/OPE.20162408.1973.

摘要

为了在保持电机精度的同时获得较大作动行程，提出了一种以叠层压电陶瓷作为激励振动源的压电直线电机。分析了电机的工作原理，推导了电机驱动足在工作时的运动轨迹。设计安装了电机样机，并对其定子进行了测试。最后，在两种激发条件下实验研究了电机的整机性能。结果表明：单组叠层压电陶瓷激励时，该样机定子驱动头在接触面法向和切向同时具有振动分量，并能够在阶跃和连续两种不同激励方式下实现单向大行程直线运动。以锯齿波激励时可实现步进运动，激励频率为20 Hz时步距为0.1

m；以两路相位差π/2的正弦波激励时，可在1.5 kHz到5.8 kHz的激励频率区间输出稳定连续的直线运动，其运动速度随激励频率的升高而增大，在峰-峰值110 V(50 V偏置)的正弦电压激励下其推力可达4.8 N。该电机具有高位置分辨率和宽频率响应，可以在两种工作模式下分别稳定地实现直线步进和大行程连续运行。

Abstract

A linear piezoelectric motor was proposed by using the stacked piezoelectric ceramics as a excited vibration source to enlarge its stroke and to maintain a higher precision. The working principle of the linear motor was analyzed

and the moving trajectory equation of the driving tip in the linear motor was deduced at a working state. The construction of the linear motor was designed

and a prototype of the motor was fabricated

assembled and tested. Finally

the motion performance of the motor was measured under two different exciting conditions. Experimental results indicate that the driving tip of the stator in the motor vibrates both normally and tangentially and the motor is capable of two operation modes

including the stepping mode excited by single channel saw-tooth wave voltage signal and the continuous mode excited by dual channel sinusoidal voltage signals with a phase difference of π/2. In the former mode

the resolution of step reaches 0.1

m under driving frequency 20 Hz; while in the later mode

the motor moves stably during frequency band from 1.5 kHz to 5.8 kHz and its speed increases with the frequency. When the two sinusoidal exciting voltages are to be peak to peak of 100V

the offset of 50 V and a frequency of 5.8 kHz

the thrust of the prototype reaches 4.8 N. In conclusion

the proposed piezoelectric motor is capable of realizing both high resolution and long travel at dual operation modes.

关键词

Keywords

references

UCHINO K. Piezoelectric ultrasonic motors: overview [J]. 1998, 7(3): 273-285.

赵淳生. 超声电机技术与应用[M]. 北京: 科学出版社, 2007.

ZHAO CH SH. Ultrasonic Motors: Technologies and Applications[M]. Beijing: Science Press, 2007. (in Chinese)

潘松, 张建辉, 黄卫清, 等. 蝶形直线电机的模糊Takagi-Sugeno鲁棒控制[J]. 光学精密工程. 2014, 22(10): 2667-2673.

PAN S, ZHANG J H, HUANG W Q, et al.. Robust control of butterfly-shaped linear ultrasonic motor based on Takagi-Sugeno fuzzy systems[J]. Opt. Precision Eng., 2014, 22(10): 2667-2673. (in Chinese)

李晓牛, 周盛强. 光阑用螺纹式超声电机[J]. 光学精密工程. 2014, 22(08): 2081-2087.

LI X N, ZHOU SH Q. Ultrasonic motor connected by screw for aperture[J]. Opt. Precision Eng., 2014, 22(08): 2081-2087. (in Chinese)

LIU Y, CHEN W, XU D, et al.. Improvement of a rectangle-shape linear piezoelectric motor with four driving feet [J]. Ceramics International. 2015, 41: S594-S601.

ASUMI K, FUKUNAGA R, FUJIMURA T, et al.. Miniaturization of a V-Shape Transducer Ultrasonic Motor[J]. Japanese Journal of Applied Physics, 2009, 48(7): 1-5.

TAKAHASHI S. Multilayer piezoelectric ceramic actuators and their applications [J]. Japanese Journal of Applied Physics. 1985, 24: 41-45.

黄卫清, 史小庆, 王寅. 菱形压电微位移放大机构的设计[J]. 光学精密工程. 2015, 23(3).

HUANG W Q, SHI X Q, WANG Y. Design of diamond piezoelectric micro displacement amplification mechanism[J]. Opt. Precision Eng., 2015, 23(03). (in Chinese)

马立, 肖金涛, 周莎莎, 等. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015, 23(01): 184-190.

MA L, XIAO J T, ZHOU SH SH, et al.. linear lever-type piezoelectric inchworm actuator [J]. Opt. Precision Eng., 2015, 23(01): 184-190. (in Chinese)

KIM J, LEE J. Self-moving cell linear motor using piezoelectric stack actuators[J]. Smart Materials and Structures, 2005(14): 934-940.

WANG S, ZHANG Z, REN L, et al.. Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks[J]. Microsystem Technologies. 2014, 21(8): 1757-1765.

HUNSTIG M, HEMSEL T, SEXTRO W. Stick-slip and slip-slip operation of piezoelectric inertia drives—Part II: Frequency-limited excitation[J]. Sensors and Actuators A: Physical, 2013, 200: 79-89.

HUNSTIG M, HEMSEL T, SEXTRO W. Stick-slip and slip-slip operation of piezoelectric inertia drives. Part I: Ideal excitation[J]. Sensors and Actuators A: Physical. 2013, 200: 90-100.

赵磊, 巩岩, 赵阳. 光刻投影物镜中的透镜X-Y柔性微动调整机构[J]. 光学精密工程. 2013(06): 1425-1433.

ZHAO L, GONG Y, ZHAO Y. Flexure-based X-Y micro-motion mechanism used in lithographic lens [J]. Opt. Precision Eng., 2013(06): 1425-1433. (in Chinese)

邓小雯, 但斌斌, 陈育荣, 等. 大行程纳米级两级驱动三维精密位移系统的设计[J]. 仪表技术与传感器, 2014(07): 1-4.

DENG X, DAN B, CHEN Y, et al.. Design of Big trip nanoscale two-stage drive 3D precision displacement system[J]. Instrument Technique and Sensor, 2014(07): 1-4. (in Chinese)

PENG Y, PENG Y, GU X, et al.. A review of long range piezoelectric motors using frequency leveraged method[J]. Sensors and Actuators A: Physical, 2015, 235: 240-255.

于会民, 王寅, 陈乾伟, 等. 三滚子结构夹持的直线型超声电机[J]. 机械科学与技术, 2012, 31(02): 250-254.

YU H, WANG Y, CHEN Q, et al.. A Linear Ultrasonic Motor Clamped with Three-roller Clamping scheme [J]. Mechanical Science and Technology for Aerospace Engineering, 2012, 31(2): 250-254. (in Chinese)

潘松, 黄卫清, 王寅, 等. 基于压电作动器的直线电机及其高效驱动[J]. 光学精密工程., 2011, 19(10): 2464-2471.

PAN S, HUANG W Q, WANG Y, et al.. High efficiency driving of linear motor based on piezoelectric actuator[J]. Opt. Precision Eng., 2011, 19(10): 2464-2471. (in Chinese)

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