Precision deposition of micro/nano pattern printed by electrohydrodynamic direct-write

Yang ZHAO; Jia-xin JIANG; Kai ZHANG; Jian-yi ZHENG; Juan LIU; Gao-feng ZHENG

doi:10.3788/OPE.20162409.2224

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Precision deposition of micro/nano pattern printed by electrohydrodynamic direct-write

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Precision deposition of micro/nano pattern printed by electrohydrodynamic direct-write
- Optics and Precision Engineering Vol. 24, Issue 9, Pages: 2224-2231(2016)
- 作者机构：
  
  1.厦门大学航空航天学院, 福建厦门 361005
  2.华南理工大学发光材料与器件国家重点实验室, 广东广州 510000
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162409.2224
  CLC： TS102.5;TQ340.6
- Received：03 February 2016，
  
  Accepted：15 March 2016，
  
  Published：2016-09
- 稿件说明：
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Yang ZHAO, Jia-xin JIANG, Kai ZHANG, et al. Precision deposition of micro/nano pattern printed by electrohydrodynamic direct-write[J]. Optics and precision engineering, 2016, 24(9): 2224-2231.
DOI：

Yang ZHAO, Jia-xin JIANG, Kai ZHANG, et al. Precision deposition of micro/nano pattern printed by electrohydrodynamic direct-write[J]. Optics and precision engineering, 2016, 24(9): 2224-2231. DOI： 10.3788/OPE.20162409.2224.

摘要

研究了利用电纺直写技术进行图案化微纳结构可控喷印沉积的方法，该方法利用喷头与收集板之间的稳定直线射流来实现有序纳米纤维的直写制造。分析了电纺直写射流在静止收集板和移动收集板上的沉积行为；探究了工艺参数对电纺直写微纳结构定位误差的影响规律。实验显示：在内部应力和电荷排斥力的作用下，射流会产生弯曲螺旋从而引导纳米纤维在静止收集板上逐层叠加形成三维微结构；提高收集板运动速度可克服射流螺旋鞭动，获得无螺旋结构的直线纳米纤维。根据设计图形分别电纺直写了方波、多圈矩形纳米纤维图案，分析了直写图案尺寸与设计图案尺寸间的误差。结果显示：电纺直写纤维图案定位误差随着收集板运动速度、喷头至收集板距离、施加电压、收集板运动距离的升高而增加；优化实验条件和试验参数，电纺直写微纳结构定位误差可优于10

m。实验验证了微纳结构图案的精确喷印沉积有助于提高电纺直写技术的控制水平。

Abstract

The precision deposition of micro/nano patterns printed by Electrohydrodynamic Direct Writing (EDW) technology was explored and the EDW for orderly nanofibers was implemented by the straight stable jet between a spinneret and a collector. The deposition behaviors of EDW jet on stationary and moving substrates were investigated. The effects of process parameters on the position errors of EDW patters were also studied. The experiments show that the jet is bended into a spiral structure by the inner stress and charge repulse force

and then the nanofiber is guided to form a three-dimensional fibrous microstructure on the stationary substrate. By increasing the velocity of collector

the bending process of charged jet can be overcome and the straight line nanofiber without spiral coil is direct-written on the substrate. The multi rectangle wave and square wave nanofibrous patterns are direct-written according to the designed pattern

respectively

and the dimension error between the direct-written nanofibrous pattern and designed pattern is also analyzed. The results indicates that the position error of direct-written nanofibrous pattern increases with increasing the velocity of collector

the distance between spinneret and collector

applied voltage

and the motion distance of collector. Moreover

by optimizing the experimental conditions and design parameters

the position error of direct-written fibrous pattern can be less than 10

m. It concludes that the precision deposition of micro/nano pattern is benefit to promoting the control level of EDW technology.

关键词

Keywords

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