Variable coupling time grating sensor and effects of sensor-head attitudes on measuring errors

Jin LU; Xi-hou CHEN; Qi-fu TANG; Liang WU

doi:10.3788/OPE.20162409.2271

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Variable coupling time grating sensor and effects of sensor-head attitudes on measuring errors

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Variable coupling time grating sensor and effects of sensor-head attitudes on measuring errors
- Optics and Precision Engineering Vol. 24, Issue 9, Pages: 2271-2282(2016)
- 作者机构：
  
  1.重庆理工大学电子信息与自动化学院, 重庆 400054
  2.重庆理工大学时栅传感及先进检测技术重庆市重点实验室, 重庆 400054
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162409.2271
  CLC： TP212.12
- Received：04 March 2016，
  
  Accepted：21 June 2016，
  
  Published：2016-09
- 稿件说明：
移动端阅览
Jin LU, Xi-hou CHEN, Qi-fu TANG, et al. Variable coupling time grating sensor and effects of sensor-head attitudes on measuring errors[J]. Optics and precision engineering, 2016, 24(9): 2271-2282.
DOI：

Jin LU, Xi-hou CHEN, Qi-fu TANG, et al. Variable coupling time grating sensor and effects of sensor-head attitudes on measuring errors[J]. Optics and precision engineering, 2016, 24(9): 2271-2282. DOI： 10.3788/OPE.20162409.2271.

摘要

根据时栅传感器的测量原理，提出一种采用高频时钟脉冲作为测量基准的变耦型时栅位移传感器以提高位移测量的精度。该传感器通过改变激励线圈和感应线圈的耦合状态输出感应位移变化的行波信号来实现精密位移测量。进行了建模和仿真，研究了不同测头姿态下传感器的位移误差特性，并对其进行了谐波分析，得到了不同测头姿态对位移测量误差各次谐波的影响规律。根据传感器模型制作了传感器并开展了验证实验。仿真和实验结果均表明：不同测头姿态对位移测量误差的影响主要体现在对测量误差的1次、2次和4次谐波上，且俯仰姿态引入的附加误差最大，其余测头姿态下引入的位移测量附加误差均较小。若保证较佳的测头姿态，传感器在定尺和动测头间气隙厚度为0.3 mm时的原始误差约为±18

m。实验分析结果与仿真结果基本一致。

Abstract

On the basis of the measuring principle of time grating sensors

a new variable coupling time grating displacement sensor was proposed by employing a high-frequency pulse as measurement basis to improve the precision of displacement measurement. The precision displacement measurement of the sensor was implemented by changing the coupling state of excitation and induction coils to output a traveling wave signal for inducing the displacement change. By modeling and simulations

the displacement error characteristics of the sensor when sensor-head was in different attitudes were obtained. The harmonics analysis was performed

and the influence of different sensor-head attitudes on different resonances of the displacement measurement errors was obtained. A sensor prototype was designed based on the model and then experiments were carried out. Simulations and actual experiments indicate that different sensor-head attitudes mainly influence 1st

2nd and 4th harmonics

and other harmonics are more sensitive to pitch attitudes than other attitudes of the sensor-head. When the sensor-head is in a good attitude and the gap between ruler and sensor-head is 0.3 mm

both experimental analysis and simulation result show that the measurement error is about ±18

m. Simulations and actual verification experiments are in agreement well.

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references

彭东林, 刘小康, 张兴红.高精度时栅位移传感器研究[J].机械工程学报, 2005, 41(12):126-129.

PENG D L, LIU X K, ZHANG X H. Research on high-precision time-grating displacement sensor[J].Chinese Journal of Mechanical Engineering, 2005, 41(12):126-129.(in Chinese)

TANG Q F, PENG D L, WU L, et al..An inductive angular displacement sensor based on planar coil and contrate rotor[J].IEEE Sensors Journal, 2015, 15(7):3947-3954.

彭东林, 李彦, 付敏, 等.用于极端和特殊条件下机械传动误差检测的寄生式时栅研究[J].仪器仪表学报, 2013, 34(2):359-365.

PENG D L, LI Y, FU M, et al..Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment[J].Chinese Journal of Scientific Instrument, 2013, 34(2):359-365.(in Chinese)

孙世政, 彭东林, 武亮, 等.时栅动态测量误差建模与补偿技术研究[J].机械工程学报, 2014, 50(22):10-15.

SUN SH ZH, PENG D L, WU L, et al..Research on modeling and compensation technology for time-grating sensor's dynamic measurement errors[J].Chinese Journal of Mechanical Engineering, 2014, 50(22):10-15.(in Chinese)

高忠华, 彭东林.直线时栅测量系统的误差研究[J].电子测量与仪器学报, 2013, 27(1):15-20.

GAO ZH H, PENG D L.Study on error of linear time grating measurement system[J].Journal of Electronic Measurement and Instrument, 2013, 27(1):15-20.(in Chinese)

杨继森, 李小雨, 张静, 等.时栅位移传感器动态误差模型及修正算法研究[J].仪器仪表学报, 2015, 36(11):2548-2555.

YANG J S, LI X Y, ZHANG J, et al..Study on the dynamic error model and correction algorithm of time grating displacement sensor[J].Chinese Journal of Scientific Instrument, 2015, 36(11):2548-2555.(in Chinese)

鲁进, 陈锡侯, 彭东林, 等.基于双测头的时栅位移传感器自标定方法[J].仪表技术与传感器, 2013, 34(2):78-81.

LU J, CHEN X H, PENG D L, et al..Research of self-calibration method for time grating displacement sensor based on two read heads[J].Instrument Technique and Sensor, 2013, 34(2):78-81.(in Chinese)

刘小康, 彭凯, 王先全, 等.纳米时栅位移传感器的理论模型与误差分析[J].仪器仪表学报, 2014, 35(5):1136-1142.

LIU X K, PENG K, WANG X Q, et al..Theoretical model and error analysis of nanometer time grating displacement sensor[J].Chinese Journal of Scientific Instrument, 2014, 35(5):1136-1142.(in Chinese)

汤其富, 彭东林, 武亮, 等.时栅角位移传感器中的多普勒效应影响及其抑制方法研究[J].仪器仪表学报, 2014, 35(3):620-626.

TANG Q F, PENG D L, WU L, et al..Study on the influence of Doppler effect and its suppressing method in time grating angular displacement sensor[J].Chinese Journal of Scientific Instrument, 2014, 35(3):620-626.(in Chinese)

刘小康, 蒲红吉, 郑方燕, 等.纳米时栅位移传感器电场分布与误差特性研究[J].仪器仪表学报, 2013, 34(10):2257-2264.

LIU X K, PU H J, ZHENG F Y, et al..Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor[J].Chinese Journal of Scientific Instrument, 2013, 34(10):2257-2264.(in Chinese)

孙世政, 陈锡侯, 彭东林, 等.嵌入式时栅传感器的动态自标定[J].光学精密工程, 2014, 22(10):2757-2764.

SUN SH ZH, CHEN X H, PENG D L, et al..Dynamic self-calibration for embedded time grating sensors[J].Opt. Precision Eng., 2014, 22(10):2757-2764.(in Chinese)

陈锡侯, 苟李, 官云丽, 等.基于单个读数头的角位移传感器自标定方法[J].传感技术学报, 2014, 27(8):1049-1053.

CHEN X H, GOU L, GUAN Y L, et al..A self-calibration method of angular displacement sensor based on single reading head[J].Chinese Journal of Sensors And Actuators, 2014, 27(8):1049-1053.(in Chinese)

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