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Design of supper low disturbance torque air bearing table with active compensation
Micro/Nano Technology and Fine Mechanics | 更新时间:2020-07-07
    • Design of supper low disturbance torque air bearing table with active compensation

    • Optics and Precision Engineering   Vol. 24, Issue 10, Pages: 2432-2441(2016)
    • DOI:10.3788/OPE.20162410.2432    

      CLC: V448.22;V474
    • Received:25 March 2016

      Accepted:07 May 2016

      Published:2016-10

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  • Yan-fang LIU, Xing-fu LIU, Nai-ming QI, et al. Design of supper low disturbance torque air bearing table with active compensation[J]. Optics and precision engineering, 2016, 24(10): 2432-2441. DOI: 10.3788/OPE.20162410.2432.

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