Progress on large aperture transport mirrors

Kui YI; Ping MA; Hong QIU; Li-jun WANG; Chao-yang WEI; Yuan-an ZHAO; Mei-ping ZHU

doi:10.3788/OPE.20162412.2902

您当前的位置：

首页 >

文章列表页 >

Progress on large aperture transport mirrors

High Power Laser Optical Componets | 更新时间：2020-08-13

- Progress on large aperture transport mirrors
- Optics and Precision Engineering Vol. 24, Issue 12, Pages: 2902-2907(2016)
- 作者机构：
  
  1.中国科学院上海光学精密机械研究所, 上海 201800
  2.成都精密光学工程研究中心, 四川成都 610041
  3.成都光明光电有限公司, 四川成都 610100
  4.北京有色金属研究总院稀有金属冶金材料研究所, 北京 100088
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162412.2902
  CLC： TN305.2;TH703
- Received：26 October 2016，
  
  Accepted：08 November 2016，
  
  Published：25 December 2016
- 稿件说明：
移动端阅览
Kui YI, Ping MA, Hong QIU, et al. Progress on large aperture transport mirrors[J]. Optics and precision engineering, 2016, 24(12): 2902-2907.
DOI：

Kui YI, Ping MA, Hong QIU, et al. Progress on large aperture transport mirrors[J]. Optics and precision engineering, 2016, 24(12): 2902-2907. DOI： 10.3788/OPE.20162412.2902.

摘要

针对我国惯性约束聚变装置（ICF）对高性能传输反射镜元件的性能要求，探索了大口径传输反射镜制备涉及的关键技术与工艺。深入开展了K9玻璃坯片研制、光学冷加工、传输反射镜镀膜和激光预处理等方面的研究工作。提出了400 mm口径K9反射类坯片精密退火工艺，形成了高精度平面加工技术路线；制备了低缺陷薄膜，并且建立了大口径光学元件预处理装置。最后，综述了大口径高性能传输反射镜研制方面的主要成果。研制的400 mm口径传输反射镜在1 053 nm处以45°入射时，其表面粗糙度优于99.8%，面形PV值小于λ/3（λ=1 053 nm），损伤阈值大于30 J/cm

（5 ns）。基于提出的技术研制的大口径传输反射镜已成功应用于我国神光系列高功率激光装置，有力支撑了我国大型激光装置的稳定运行。

Abstract

For the requirements of Inertial Confinement Fusion (ICF) facility for large aperture transport mirrors with higher performance

key technologies and special processing involved in mirror machining are explored. Some kinds of machining technologies

including the manufacturing of K9 glass blanks

optics cold processing

coating for transport mirrors and laser conditioning are investigated. The precision annealing process of 400 mm aperture K9 glass blank is proposed to implement the high precision optical finishing. Moreover

Low-defect coating is achieved. A preprocessing device for the larger aperture optical element is established and a laser conditioning platform for large aperture transport mirror is also realized. Finally

the paper reviews main achievements of development of large aperture transport mirrors. A 400 mm aperture transport mirror with an incidence angle of 45° shows its surface roughness to be higher than 99.8%

surface figure (PV value) lower than λ/3

and the laser-induced damage threshold higher than 30 J/cm

(5 ns) at 1 053 nm. The large aperture transport mirrors have been successfully used in the higher power laser equipment of SG ICF facility

which supports the stable operation of the facility.

关键词

Keywords

references

CAMPBELL J H, HAWLEY-FEDDER R A, STOLZ C J, et al .. NIF optical materials and fabrication technologies:an overview[C]. Lasers and Applications in Science and Engineering . International Society for Optics and Photonics , 2004:84-101. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1322059

MENAPACE J A, DAVIS P J, STEELE W A, et al .. MRF applications:on the road to making large-aperture ultraviolet laser resistant continuous phase plates for high-power lasers[C]. Boulder Damage Symposium ⅩⅩⅩⅧ : Annual Symposium on Optical Materials for High Power Lasers . International Society for Optics and Photonics , 2006:64030N-64030N-12. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1295020

OHMORI H. Electrolytic in-process dressing (ELID) grinding technique for ultra precision mirror surface machining[J]. International Journal of the Japan Society for Precision Engineering, 1993, 59(9):1451-1457.

WONG L, SURATWALA T, FEIT M D, et al.. The effect of HF/NH 4 F etching on the morphology of surface fractures on fused silica[J]. Journal of Non-Crystalline Solids, 2009, 355(13):797-810.

DEFORD J F, KOZLOWSKI M R. Modeling of electric-field enhancement at nodular defects in dielectric mirror coatings[C]. Optical Materials for High Power Lasers , International Society for Optics and Photonics , 1993:455-472. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1005390

GENIN F Y, STOLZ C J, REITTER T A, et al .. Effect of electric field distribution on the morphologies of laser-induced damage in hafnia-silica multilayer polarizers[C]. Laser-Induced Damage in Optical Materials , International Society for Optics and Photonics , 1997:342-352. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1026976

BEVIS R P, SHEEHAN L M, SMITH D J, et al.. The advantages of evaporation of Hafnium in a reactive environment to manufacture high damage threshold multilayer coatings by electron-beam deposition[J]. SPIE, 1999, 3738:318-324.

STOLZ C J, WEINZAPFEL C L, RIGATTI A L, et al.. Fabrication of meter-scale laser resistant mirrors for the National Ignition Facility:a fusion laser[J]. SPIE, 2003, 5193:50-58.

STOLZ C J, GÉNIN F Y. Laser Resistant Coatings, Optical Interference Coatings[M]. Springer Berlin Heidelberg, 2003:309-333.

BERCEGOL H. What is laser conditioning? A review focused on dielectric multilayers[J]. SPIE. 1999, 3578:421-426.

WOLFE C R, KOZLOWSKI M R, CAMPBELL J H, et al.. Laser conditioning of optical thin films[J]. SPIE, 1989:1438:360-375.

FAN Z, ZHAO Q, WU Z. Temperature field design of optical thin film coatings[C]. Laser-Induced Damage in Optical Materials , International Society for Optics and Photonics , 1997:362-370. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1026979

Views

416

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research on packaging technology of high power blue semiconductor laser bar

Improvement of laser damage resistance at surface of DKDP crystal by laser conditioning process

Effects of posttreatments on optical properties and laser induced damage thresholds of HfO₂ thin films

Laser conditioning technology and its applications

Measurement of sub-surface damage of K9 glass by step-by-step etching method

Related Author

HAO Mingming

TAO Chunyan

GAO Junjian

GAO Xiang

WANG Qi

ZHOU Yong

Guo-hang HU

Yang LUO

Related Institution

School of Materials and Energy， Guangdong University of Technology

Dongguan Institute of Opto-electrical Peking University

School of Information and Engineering， Guangdong University of Technology

Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰