Xiao-hong WEI, Yu-hang HE, Bo GAO, et al. Measurement of transmissive wavefront of long-focal length lens by computer-generated holography[J]. Optics and precision engineering, 2016, 24(12): 3005-3011.
DOI:
Xiao-hong WEI, Yu-hang HE, Bo GAO, et al. Measurement of transmissive wavefront of long-focal length lens by computer-generated holography[J]. Optics and precision engineering, 2016, 24(12): 3005-3011. DOI: 10.3788/OPE.20162412.3005.
Measurement of transmissive wavefront of long-focal length lens by computer-generated holography
To measure the transmissive wavefront of a long-focal length lens precisely
a novel Computer Generated Holography (CGH) was proposed by adding a binary diffractive optical element into the Zygo interferometer to provide a reference wavefront. The theory of transmissive wavefront measurement of large convex lens by using the CGH was introduced. A high precision computed holographic plane was designed and developed to apply in the measurement of the transmissive wavefront of the long-focal length lens. The theory analysis and practical test show that the proposed method has a lower systematic error
and the measuring repeatability of the CGH is better than 0.004λ (2σ RMS).The result is in agreement with that of common Fizeau interferometry
and verifies the feasibility of the proposed CGH. Finally
the measurement uncertainty due to the substrate error and hologram fabrication processes was analyzed
and the wavefront peak-valley error is less than λ/10. It concludes that the CGH method greatly shortens the airspace
improves measurement precision
and is of great importance for the wavefront measurement of long focal length lenses.
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references
MALACARA D. Optical Shop Testing[J].John Wiley & Sons, Inc., 2007.
ROCKTÄSCHEL M, TIZIANI H J.Limitations of the Shack-Hartmann sensor for testing optical aspherics[J].Optics & Laser Technology, 2002, 34:631-637.
GREIVENKAMP J E, GAPPINGER R O.Design of a nonnull interferometer for aspheric wave fronts[J].Applied Optics, 2004, 43(27):5143-5152.
HOUSTON J B, BUCCINI C J, O'NEILL P K.A Laser Unequal Path Interferometer for the Optical Shop[J].Appl. Opt., 1967, 6(7):1237-1242.
BRUNING J H, HERRIOTT D R, GALLAGHER J E, et al..Digital wavefront measuring interferometer for testing optical surfaces and lens[J]. Appl. Opt., 1974, 3(11):2693-2703.
SCHULZ G, SCHWIDER J.Interferometric testing of Smooth Surfaces[J].Progress in Optics XIII (E. Wolf ed.), 1976, 93-167.
SCHWIDER J, BUROW R, ELSSNER K E, et al..Digital wave-front measuring interferometry:some systematic error sources[J]. Appl. Opt., 1983, 22(21):3421-3433.
HOU C L, BAI J. Wavefront measurement for long focal large aperture lens based on Talbot effect of Ronchi grating[J].J. of Phy:Conf. Ser., 2006, 48:1037-1041.
YOON G Y, JITSUNO T, NAKATSUKA M, et al..Wavefront measurement with a large F-number plastic microleln array[J].Appl. Opt., 1996, 35:188-192.
CAI L Z, LIU Q, YANG X L, et al..Sensitivity adjustable contouring by digital holography and virtual reference wavefront[J].Opt. Commun., 2003, 221:49-54.
MACGOVEM A J, MYANT J C.Computer generated holograms for testing optical elements[J].Applied Optics, 1971, 10(3):619-624.
REICHELT S, PRU C, TIZIANI H J.New design techniques and calibration methods for CGH-null testing of aspheric surfaces[J].Proc. SPIE, 2002, 4778:158-168.
HERRMANN T.Testing aspheric surfaces with CGH of different accuracy in industrial manufacturing environ[J].Proc. SPIE, 2001, 4440:120-126.
SCHREINER R, HERRMANN T.Computer generated holograms for optical shop testing of aspheres[J].Proc. SPIE, 2005, 5856, 503-508.
HU J, DONG X X, PU D L, et al.. High resolution pattern-integrated interference lithography based on blazed grating[J]. Opt. Precision Eng., 2015, 23(12):3335-3342. (in Chinese)
ZHANG J, LI M J, YIN G H, et al.. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Opt. Precision Eng., 2016, 24(6):1289-1296. (in Chinese)
CHANG Y C, BURE J H.Errors analysis for CGH optical testing[J]. Proc. SPIE, 1999, 3782:358-366.
CHANG Y C, ZHOU P, BURGE J H.Analysis of phase sensitivity for binary computer generated holograms[J].Applied Optics, 2006, 45(18):4223-4234.