Design of high resolution and output stability autocollimation system

ZHU Fan; TAN Xin-ran; TAN Jiu-bin; FAN Zhi-gang

doi:10.3788/OPE.20162413.0109

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Design of high resolution and output stability autocollimation system

更新时间：2020-08-13

- Design of high resolution and output stability autocollimation system
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 109-116(2016)
- 作者机构：
  
  1. 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨,中国,150080
  2. 哈尔滨工业大学光学工程博士后流动站,黑龙江哈尔滨,150080
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0109
  CLC： TH741.14;TP391
- Received：31 May 2016，
  
  Revised：12 June 2016，
  
  Published：14 November 2016
- 稿件说明：
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朱凡, 谭欣然, 谭久彬等. 高分辨力与高输出稳定性自准直系统设计[J]. 光学精密工程, 2016,24(10s): 109-116

ZHU Fan, TAN Xin-ran, TAN Jiu-bin etc. Design of high resolution and output stability autocollimation system[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 109-116
朱凡, 谭欣然, 谭久彬等. 高分辨力与高输出稳定性自准直系统设计[J]. 光学精密工程, 2016,24(10s): 109-116 DOI： 10.3788/OPE.20162413.0109.

ZHU Fan, TAN Xin-ran, TAN Jiu-bin etc. Design of high resolution and output stability autocollimation system[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 109-116 DOI： 10.3788/OPE.20162413.0109.

摘要

为了实现高分辨力与高输出稳定性的微小角度测量，建立了一个光电自准直系统。该系统主要包括摄远物镜、光学放大以及漂移补偿单元。首先，对摄远物镜的短结构、长焦距特性进行研究，对该特性中的制约因素以及对结构参数变化的敏感程度进行分析，并应用光学放大提高自准直中图像位移检测的分辨力。然后，在高分辨力的基础上引入漂移补偿，利用合作靶标分离出漂移量参考光束，结合光束偏转单元对自准直过程中的漂移量进行闭环控制。最后，对该自准直系统的分辨力和稳定性进行了测试。实验结果表明：在±30"的测量范围内，自准直系统的有效分辨力优于0.000 5"，两小时输出稳定性达到0.006"，可以满足微小角度测量领域中的高分辨力与高输出稳定性的要求。

Abstract

To achieve precise and stable measurement of micro angles

a photoelectric auto-collimation system comprising telephoto objective lens

optical amplifier and shift compensator was established. Firstly

the short structure and long-focus features of the telephoto objective were researched

involving the restrictions and the sensitivity to the variation of structure parameters. The optical amplifier can improved the resolution of image displacement in the auto-collimation system. Then

the drift compensation was introduced based on high resolution. The drift reference beam extracted by the cooperative target

combined with beam steering mechanism was used in the closed-loop control of the drift. Finally

the resolution and stability of the auto-collimation system were tested. The results show that the valid resolution is higher than 0.000 5" and the output stability in two hours reaches 0.006" within the ±30" measurement range

which can meet the requirements of high resolution and high output stability in the field of micro angle measurement.

关键词

Keywords

references

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ZHU F, TAN J, CUI J.Beam splitting target reflector based compensation for angular drift of laser beam in laser autocollimation of measuring small angle deviations[J]. Rev. Sci. Instrum., 2013, 84(6), 065116-065116-8.

SUZUKI T, SASAKI O, GREIVENKAMP J E, et al.. Two-dimensional small-rotation-angle measurement using an imaging method[J]. Optical Engineering, 2006, 45(4):043604-1-7.

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ZHU F, TAN J, CUI J.Common-path design criteria for laser datum based measurement of small angle deviations and laser autocollimation method in compliance with the criteria with high accuracy and stability[J]. Optics Express, 2013, 21(9):11391-11403.

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