Optimization of processing micro-channels with CO2-laser on polyethylene terephthalate(PET) sheet

CHEN Xue-ye; SHEN Jie-nan; HU Zeng-liang; CHEN Jing

doi:10.3788/OPE.20162413.0224

您当前的位置：

首页 >

文章列表页 >

Optimization of processing micro-channels with CO₂-laser on polyethylene terephthalate(PET) sheet

更新时间：2020-08-13

- Optimization of processing micro-channels with CO₂-laser on polyethylene terephthalate(PET) sheet
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 224-228(2016)
- 作者机构：
  
  辽宁工业大学机械工程与自动化学院,辽宁锦州,121001
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0224
  CLC： O345
- Received：27 May 2016，
  
  Revised：19 June 2016，
  
  Published：14 November 2016
- 稿件说明：
移动端阅览
陈雪叶, 沈杰男, 胡增亮等. CO2激光在PET基板加工微通道的工艺优化[J]. 光学精密工程, 2016,24(10s): 224-228

CHEN Xue-ye, SHEN Jie-nan, HU Zeng-liang etc. Optimization of processing micro-channels with CO2-laser on polyethylene terephthalate(PET) sheet[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 224-228
陈雪叶, 沈杰男, 胡增亮等. CO2激光在PET基板加工微通道的工艺优化[J]. 光学精密工程, 2016,24(10s): 224-228 DOI： 10.3788/OPE.20162413.0224.

CHEN Xue-ye, SHEN Jie-nan, HU Zeng-liang etc. Optimization of processing micro-channels with CO2-laser on polyethylene terephthalate(PET) sheet[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 224-228 DOI： 10.3788/OPE.20162413.0224.

摘要

为了提高微通道表面的加工质量，研究了CO

激光在聚乙烯对苯二甲酸酯（PET）基板上加工微通道的工艺。通过正交试验法研究了激光功率、加工速度、通道长度和加工次数对微通道宽度的影响，并且进行了工艺参数优化。然后，通过金相显微镜和粗糙度测量仪对加工结果进行了实验分析。结果表明，正文试验获得的最佳加工参数如下：激光功率为10 W，扫描速度为6 mm/s，通道长度为80 mm，加工次数为3次。在此加工参数下对通道表面的粗糙度（Ra）的算数平均值可以达到170 nm。由此证明使用CO

激光在PET基板上加工微米级通道的方法是完全可行的。

Abstract

In order to improve the processing quality of micro-channels

the fabrication technology of micro-channels on polyethylene terephthalate(PET) substrate using CO

laser was researched. The effects of the processing parameters

including laser power

processing speed

channel length and processing times

on the width of micro-channel were analyzed and optimized through orthogonal tests. Furthermore

the processing results under the optimal parameters were tested by using metallographic microscope and roughness tester. The results show that the arithmetic average value of roughness (

) on the surface of channel can reach 170 nm

when the laser power is 10 W

scanning speed is 6 mm/s; channel length is 80 mm and processing times is 3. Therefore

the method of processing micron-size channel on PET substrate by using CO

laser is completely feasible.

关键词

Keywords

references

BECKER H, LOCASCIO L E. Polymer microfluidic devices[J]. Talanta, 2002, 56(2):267-287.

BECKER H, GÄRTNER C. Polymer microfabrication methods for microfluidic analytical applications[J]. Electrophoresis, 2000, 21(1):12-26.

SOPER S A, FORD S M, QI S, et al.. Peer reviewed:polymeric microelectromechanical systems[J]. Analytical Chemistry, 2000, 72(19):642 A-651.

HOFFMANN M A, KOPKA P, VOGES E. Bistable micromechanical fiber-optic switches on silicon with thermal actuators[J]. Sensors and Actuators A:Physical, 1999, 78(1):28-35.

ROBERTS M A, ROSSIER J S, BERCIER P, et al.. UV laser machined polymer substrates for the development of microdiagnostic systems[J]. Analytical Chemistry, 1997, 69(11):2035-2042.

LIU A L, HE F Y, HU Y L, et al.. Plastified poly (ethylene terephthalate)(PET)-toner microfluidic chip by direct-printing integrated with electrochemical detection for pharmaceutical analysis[J]. Talanta, 2006, 68(4):1303-1308.

DADSETAN M, MIRZADEH H, SHARIFI-SANJANI N. Surface modification of polyethylene terephthalate film by CO2 laser-induced graft copolymerization of acrylamide[J]. Journal of Applied Polymer Science, 2000, 76(3):401-407.

TENNICO Y H, KOESDJOJO M T, KONDO S, et al.. Surface modification-assisted bonding of polymer-based microfluidic devices[J]. Sensors and Actuators B:Chemical, 2010, 143(2):799-804.

HILLMAN J, SUKHMAN Y, MILLER D, et al.. Multi wave hybrid laser processing of micrometer scale features for flexible electronics applications[J].SPIE, 2016, 9736:97360E.

TAGUCHI G, YOKOYAMA Y. Taguchi Methods:Design of Experiments[M]. Amer Supplier Inst, 1993.

Views

199

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Low stress laser welding technology for corrugated diaphragm of pressure sensor

Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure

Related Author

DU Xiaohui

CHEN Fanhong

LIU Shuai

ZHU Minjie

XU Jiahao

Xiang-qiang ZHONG

Wei-qing HUANG

Xuan ZHANG

Related Institution

Instrumentation Technology and Economy Institute

Nanchang University of Aeronautics

State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics

School of Mechanical & Automotive Engineering, Anhui Polytechnic University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰