Structrual design of detector for optical elements with large aperture

HUANG Bin; LI Xian-ling; YANG Hui-qi

doi:10.3788/OPE.20162413.0259

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Structrual design of detector for optical elements with large aperture

更新时间：2020-08-13

- Structrual design of detector for optical elements with large aperture
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 259-266(2016)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所超精密光学工程研究中心,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0259
  CLC： TH74
- Received：28 May 2016，
  
  Revised：10 June 2016，
  
  Published：14 November 2016
- 稿件说明：
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黄斌, 李显凌, 杨荟琦. 大口径光学元件疵病检测仪的结构设计[J]. 光学精密工程, 2016,24(10s): 259-266

HUANG Bin, LI Xian-ling, YANG Hui-qi. Structrual design of detector for optical elements with large aperture[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 259-266
黄斌, 李显凌, 杨荟琦. 大口径光学元件疵病检测仪的结构设计[J]. 光学精密工程, 2016,24(10s): 259-266 DOI： 10.3788/OPE.20162413.0259.

HUANG Bin, LI Xian-ling, YANG Hui-qi. Structrual design of detector for optical elements with large aperture[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 259-266 DOI： 10.3788/OPE.20162413.0259.

摘要

为了满足大口径光学元件表面疵病的光学检测需求，设计了一款具有四自由度的疵病检测仪。该检测仪采用4个独立驱动装置进行控制，基于坐标系矩阵变换的理论对该疵病检测仪的运动学进行了分析与解算，得到了末端检测物镜的轨迹坐标与各驱动位移的关系，同时得到了各随动运动与主动运动之间的关系曲线。采用虚拟样机仿真软件ADAMS对运动学解算结果进行仿真验证，得到了各驱动装置的位移-时间曲线。最后，通过ANSYS Workbench对检测物镜末端的静态位置偏差和镜筒支撑结构的模态进行了有限元分析。结果表明，镜筒末端最大的静态位置偏差为19.82

m，通过精密角度调节台1/36圈的精密螺距调节可将偏差控制在1

m以内，满足设计指标10

m的精度要求；镜筒支撑结构的一阶固有频率为882.58 Hz，确保工作频率远小于结构的一阶固有频率，避免共振对整体结构的破坏，保证了设备的可靠性与安全性。

Abstract

In order to meet the requirements for surface defect detection of optical elements with large caliber in optical detection systems

a defect detector with four degrees of freedom was designed. The detector was controlled by four independent drive devices. The matrix transformation of coordinate system was employed to calculate the kinematics of the defect detector

involving the relationship between the trajectory coordinates of objective lens and displacement of actuators and the relationship between each follow-up servos and the active servo. The kinematics results were verified by ADAMS

a virtual prototype simulation software

obtaining the displacement-time curves. Furthermore

the static position deviation of objective lens and cantilever structure of the lens cone were analyzed by ANSYS Workbench. The results indicate that the maximum of static position deviation of lens is 19.82

m. The deviation can be decreased to less than 1

m by adjusting 1/36 round of precise pitch of precise angle adjustment

which can satisfy the design indices of 10

m. Moreover

the working frequency is far less than the first-order natural frequency of 882.58 Hz

which can avoid the destruction to the whole structure caused by syntony

thus verifying the reliability and safety of the equipment.

关键词

Keywords

references

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