MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator

LU An-jiang; ZHANG Zheng-ping; HUANG Zi-ji; REN Zhe-yi; CHEN Qiao; QING Shui-jie

doi:10.3788/OPE.20162413.0400

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MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator

更新时间：2020-08-13

- MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 400-406(2016)
- 作者机构：
  
  1. 贵州省光电子技术及应用重点实验室,贵州贵阳,550025
  2. 无锡微奥科技有限公司无锡,214135
  3. 贵州大学大数据与信息工程学院, 贵州贵阳 550025
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0400
  CLC： TP394.1;TH691.9
- Received：10 June 2016，
  
  Revised：30 June 2016，
  
  Published：14 November 2016
- 稿件说明：
移动端阅览
陆安江, 张正平, 黄子吉等. 折叠双S型Bimorph热式MEMS微镜[J]. 光学精密工程, 2016,24(10s): 400-406

LU An-jiang, ZHANG Zheng-ping, HUANG Zi-ji etc. MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 400-406
陆安江, 张正平, 黄子吉等. 折叠双S型Bimorph热式MEMS微镜[J]. 光学精密工程, 2016,24(10s): 400-406 DOI： 10.3788/OPE.20162413.0400.

LU An-jiang, ZHANG Zheng-ping, HUANG Zi-ji etc. MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 400-406 DOI： 10.3788/OPE.20162413.0400.

摘要

为了设计具有大角度、大位移、低电压的MEMS微镜。采用折叠双S型双层梁驱动结构设计了一种能够克服静电驱动缺陷的新型MEMS微镜，利用表硅与SOI相结合的MEMS微加工工艺来实现双材料电热的差分驱动。不但解决了因环境温度所引起的不稳定性问题，而且还实现了创记录的大角度、大位移扫描。通过该方法设计的微镜尺寸小于2.5 mm×2.5 mm，机械转角大于5度，垂直线性位移可达425

m，系统响应时间小于10 ms。最后对微镜的电热与机电特性、频率响应、谐振频率等进行了测试与分析，结果显示MEMS微镜性能稳定可靠，有望得到更多领域的推广应用。

Abstract

Purpose:to design a MEMS micromirror with wide angle

large displacement and low voltage. Method:design a new-type MEMS micromirror capable of overcoming electrostatic drive by adopting the folded dual-S double-layer beam driving structure

and achieve the electrothermal differential drive of bi-materials by adopting the MEMS micromachining process combining surface silicon with SOI

which not only solved the problem of instability caused by ambient temperature

but also achieved the record-breaking wide-angle and large-displacement scanning; micromirror designed by adopting this method is smaller than 2.5 mm×2.5 mm

the mechanical angle is greater than 5°

the vertical linear displacement can reach 425

and the system response time is shorter than 10 ms; finally

test and analyze the electrothermal and electromechanical performance

frequency response and resonant frequency of the micromirror. It indicates that the MEMS micromirror

with stable and reliable performance

has a broad prospect in wider promotion and application.

关键词

Keywords

references

JIANG T Y, NG T Y, LAM K Y. Optimization of a Piezoelectric ceramic actuator[J]. Sensors and Actuators A, 2000, 84:81-94.

GARNIER A, BOUROUINA T, ORSIER E. A fast, Sample, and robust 2-D Micro-optical Scanner Based on Contactless magnetostrictive Actuatuon[J]. Microelectromechanical Systems, 2000:715-720.

TANG W C, NGUYRN T C, JUDY M W. Electrostatic-comb Drive of Lateral Polysilicon resonators[J]. Sensors and Actuators A, 1990, 21(23):328-331.

QUE L, PARK J, GIANCHANDANI Y. Bent-beam electrothermal actuator-part 1:Signal beam and cascaded devices[J]. Microelectromechanical Systems, 2001, 10(2):247-254.

FREUND L B, SURESH S. Thin film materials:stress, defect formation, and surface evolution[J]. Aiaa Journal, 2003, 43.

TODD S T. Electro-thermomechanical modeling of a 1-D electrothermal MEMS Micromirror[D]. Master Thesis, 2005.

PAL S, XIE H. Analysis and Fabrication of Curved Multimorph Transducers that Undergo Bending and Twisting[J]. IEEE/ASME Journal of Microelectromechanical Systems, 2012, 21(5):1241-1251.

GOVINDARAJU A, CHAKRABORTY A, LUO C. Reinforcement of PDMS masters using SU-8 truss structures[J]. Journal of Micromechanics & Microengineering, 2005, 15(6):1303-1309.

SHARPE W N, YUAN B, VAIDYANATHAN R, et al.. Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon[C]. IEEE, 1997:424-429.

GEISBERGER A A, SARKAR N, ELLIS M, et al.. Electrothermal Properties and Modeling of Polysilicon Microthermal Actuators[J]. Journal of Microelectromechanical Systems, 2003, 12:513-523.

PAL S, XIE H. Analysis and fabrication of curved multimorph transducers that undergo bending and twisting[J]. IEEE/ASME Journal of Microelectromechanical Systems, 2012, 21(5):1241-1251.

PALS, XIE H. A curved multimorph based electrothermal micromirror with large scan range and low drive voltage[J]. Sensors & Actuators:A. Physical, 2012, 170(2):156-163.

JIA K, SAMUELSON S, XIE H. High fill-factor micromirror array with hidden bimorph actuators and tip-tilt-piston capability[J]. IEEE/ASME Journal of Microelectromechanical Systems, 2012, 20(9):573-582.

JIA K M, XIE H K. Low voltage, an electrothermal tip-tilt-piston micromirror based on folded dual s-shaped bimorphs[J]. Journal of Microeleltromechanical Systems, 2009, 18(5):231-233.

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