Experimental research of ELID grinding on SiC ceramics based on grinding wheel wear

LIU Li-fei; ZHANG Fei-hu; RAO Xiao-shuang

doi:10.3788/OPE.20162413.0421

您当前的位置：

首页 >

文章列表页 >

Experimental research of ELID grinding on SiC ceramics based on grinding wheel wear

更新时间：2020-08-13

- Experimental research of ELID grinding on SiC ceramics based on grinding wheel wear
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 421-427(2016)
- 作者机构：
  
  1. 哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
  2. 哈尔滨理工大学机械动力工程学院,黑龙江哈尔滨,150080
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0421
  CLC： TG74;TH161
- Received：10 May 2016，
  
  Revised：17 June 2016，
  
  Published：14 November 2016
- 稿件说明：
移动端阅览
刘立飞, 张飞虎, 饶小双. 基于砂轮磨损的SiC陶瓷ELID磨削实验研究[J]. 光学精密工程, 2016,24(10s): 421-427

LIU Li-fei, ZHANG Fei-hu, RAO Xiao-shuang. Experimental research of ELID grinding on SiC ceramics based on grinding wheel wear[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 421-427
刘立飞, 张飞虎, 饶小双. 基于砂轮磨损的SiC陶瓷ELID磨削实验研究[J]. 光学精密工程, 2016,24(10s): 421-427 DOI： 10.3788/OPE.20162413.0421.

LIU Li-fei, ZHANG Fei-hu, RAO Xiao-shuang. Experimental research of ELID grinding on SiC ceramics based on grinding wheel wear[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 421-427 DOI： 10.3788/OPE.20162413.0421.

摘要

为了改善SiC陶瓷磨削过程中砂轮磨损状态，提高大口径SiC陶瓷光学元件的加工质量和加工效率，本文使用ELID磨削技术进行了SiC陶瓷磨削加工实验。通过和普通磨削过程进行对比分析，研究了ELID磨削技术在SiC陶瓷磨削过程中砂轮磨削表面情况、工件磨削表面粗糙度、磨削力及磨削比方面的优势。实验结果显示：使用ELID磨削技术可以使砂轮表面磨粒在SiC陶瓷长时间大去除量磨削过程中保持足够的锋锐度，磨削过程中磨削力、磨削比均比普通磨削方式下有较大程度的降低，但SiC陶瓷工件磨削表面粗糙度略有增加。表明ELID磨削可以有效缓解砂轮磨损严重导致的磨削力增加、磨削质量下降及使用寿命低的问题，反映了ELID磨削技术在SiC陶瓷长时间大去除量磨削过程中的优势，为大口径SiC陶瓷光学元件的高效高质量加工提供技术支持。

Abstract

Purpose:to improve the grinding wheel wear condition of SiC ceramic during the grinding process

improve the machining quality and machining efficiency of optical elements of large-caliber SiC ceramic

the ELID grinding technology is adopted in the SiC ceramic grinding experiment. Method:based on a contrastive analysis on the common grinding process

a research is conducted on the wheel grinding surface condition

workpiece grinding surface roughness

grinding force and grinding ratio during the SiC ceramic grinding process by adopting the ELID grinding technology. Results:the ELID grinding technology can keep the grinding particles in adequate sharpness after a long-time and wide-removal SiC ceramic grinding process

and compared with common grinding mode

the grinding force and grinding ratio has also been lowered to a much greater extent; but roughness of the SiC ceramic grinding surface increased slightly. Conclusion:it indicates that the ELID grinding technology can effectively alleviate the problems of grinding force increase

grinding quality decrease and short service life caused by severe grinding wheel wear; reflects the advantages of ELID grinding technology in the long-time and wide-removal SiC ceramic grinding process

and such advantages provide technical support for high-efficiency and high-quality machining of large-caliber SiC ceramic optical elements.

关键词

Keywords

references

张学军. 《非球面加工与检测技术》专题文章导读[J]. 光学精密工程, 2006, 14(4):527-527. ZHANG X J. Reading Guidance of the feature article "Processing and testing technology of aspheric surface"[J]. Opt. Precision Eng., 2006, 14(4):527-527. (in Chinese)

PITZEK M, STEIGER R, THALHAMMER G, et al.. Optical mirror trap with a large field of view[J].Optics Express, 2009, 17(22):19414-19423.

韩杰才, 张宇民, 赫晓东. 大尺寸轻型SiC光学反射镜研究进展[J]. 宇航学报, 2001, 22(6):124-131. HAN J C, ZHANG Y M, HE X D.Optical large scale light weight SiC mirrors[J]. Journal of Astronautics, 2001, 22(6):124-131. (in Chinese)

ZAWRAH M F, EL-GAZERY M. Mechanical properties of SiC ceramics by ultrasonic nondestructive technique and its bioactivity[J].Materials Chemistry and Physics, 2007, 106(2):330-337.

LEE H B, SUK J Y, BAE J I. Trade study of all-SiC lightweight primary mirror and metering structures for spaceborne telescopes[C]. SPIE Optical Engineering Applications. International Society for Optics and Photonics, 2015:95740D-12.

张楠. 我国研制成功四米口径碳化硅反射镜坯[EB/OL]. 新华网. (2016-4-27)[2016-5-20]. http://news.xinhuanet.com/politics/2016-04/27/c_128937342.htm ZHANG N. The four meters diameter mirror blank of SiC ceramics has been developed successfully in China[EB/OL].Xinhua Net. (2016-4-27)[2016-5-20]. http://news.xinhuanet.com/politics/2016-04/27/c_128937342.htm (in Chinese)

刘立飞, 张飞虎, 刘民慧. 碳化硅陶瓷的超声振动辅助磨削[J]. 光学精密工程, 2015, 23(8):2229-2235. LIU L F, ZHANG F H, LIU M H.Ultrasonic assisted grinding for silicon carbide[J]. Opt. Precision Eng., 2015, 23(8):2229-2235. (in Chinese)

LIU J H, PEI Z J, FISHER G R. ELID grinding of silicon wafers:a literature review[J].International Journal of Machine Tools and Manufacture, 2007, 47(3):529-536.

NI J, LI B. Phase transformation in high-speed cylindrical grinding of SiC and its effects on residual stresses[J].Materials Letters, 2012, 89:150-152.

KHOSHAIM A B, MARINESCU I D. The influence of wheel grain size on the surface roughness in ELID fine grinding of SiC ceramics[J].International Journal of Abrasive Technology, 2014, 6(4):324-335.

YU X, HUANG S, XU L. ELID grinding characteristics of SiCp/Al composites[J].The International Journal of Advanced Manufacturing Technology, 2016:1-7.

关佳亮, 朱磊, 陈玲,等. SiCp/Al复合材料的ELID精密加工工艺[J]. 北京工业大学学报, 2015, 41(6):823-829. GUAN J, ZHU L, CHEN L, et al.. ELID Precision Processing Technology of SiCp/Al Composites[J]. Journal of Beijing University of Technology, 2015, 41(6):823-829. (in Chinese)

OHMORI H, DAI Y, LIN W M, et al.. Force characteristics and deformation behaviors of sintered SiC during an ELID grinding process[C]. Key Engineering Materials. Trans Tech Publications, 2003, 238:65-70.

ETO H, DAI Y, EBIZUKA N, et al.. ELID grinding of SiC ultra lightweight mirror[C]. 5th International Conference on Space Optics, 2004, 554:707-710.

任敬心, 华定安. 磨削原理[M]. 北京:电子工业出版社. 2011. REN J X, HUA D A. Grinding Principle[M]. Beijing:Publishing House of Electronics Industry, 2011. (in Chinese)

林彬, 张春河, 徐燕申.ELID超精密镜面磨削砂轮磨损规律的研究[J].天津大学学报, 1999, 32(1):74-76. LIN B, ZHANG CH H, XU Y Y. Study on grinding laws of ultra-precision mirror grinding with ELID technology[J]. Chinese Journal of Tianjin University, 1999, 32(1):74-76. (in Chinese)

Views

476

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Modification of nickel slag and application in magnetic compound fluid polishing

Modeling of removal function and optimization of process parameters for robotic polishing M-ZnS

Process development of small size copper-plated InP wafer with 8-inch CMP equipment

Influence of water in magnetic compound fluid on polishing performance

Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon

Related Author

WANG Youliang

YU Puyao

YIN Xincheng

ZHANG Wenjuan

ZANG Yikai

ZHU Beibei

QIN Lin

SHANG Yao

Related Institution

State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals， Lanzhou University of Technology

School of Mechanical and Electronical Engineering， Lanzhou University of Technology

Key Laboratory of Digital Manufacturing Technology and Application， Ministry of Education of China， Lanzhou University of Technology

School of Mechanical Science and Engineering， Huazhong University of Science and Technology

Shanghai Aerospace Control Technology Research Institute

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰