Design of piezoelectric micro displacement actuator

HUANG Wei-qing; LIU Xue-rui; WANG Yin; SUN Meng-xin

doi:10.3788/OPE.20162413.0527

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Design of piezoelectric micro displacement actuator

更新时间：2020-08-13

- Design of piezoelectric micro displacement actuator
- Optics and Precision Engineering Vol. 24, Issue 10s, Pages: 527-534(2016)
- 作者机构：
  
  1. 南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京,210016
  2. 华侨大学机电及自动化学院, 福建厦门 361021
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20162413.0527
  CLC： TN384;TH112.5
- Received：10 May 2016，
  
  Revised：17 June 2016，
  
  Published：14 November 2016
- 稿件说明：
移动端阅览
黄卫清, 刘雪瑞, 王寅等. 菱形压电微位移作动器的设计[J]. 光学精密工程, 2016,24(10s): 527-534

HUANG Wei-qing, LIU Xue-rui, WANG Yin etc. Design of piezoelectric micro displacement actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 527-534
黄卫清, 刘雪瑞, 王寅等. 菱形压电微位移作动器的设计[J]. 光学精密工程, 2016,24(10s): 527-534 DOI： 10.3788/OPE.20162413.0527.

HUANG Wei-qing, LIU Xue-rui, WANG Yin etc. Design of piezoelectric micro displacement actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 527-534 DOI： 10.3788/OPE.20162413.0527.

摘要

为了在提高压电作动器行程的同时，实现双向对称驱动，提出了基于三角位移放大原理的菱形压电微位移作动器。分析了作动器的运动及放大机理，并基于压电方程建立了作动器的理论静力模型。放大机构的关键参数被详细介绍。行程达105

m，驱动器放大倍数与理论值只有5.69%的误差。样机实验刚度大于理论值。制作了实验样机，开环条件下的输出特性实验表明：静力条件下，作动器作动方向的平均刚度约0.62 N/

m、单向自由伸长位移最大达42.2

m（160 V电压下）、最大负载27.4 N（160 V电压下），均小于理论解（误差不超过24.2%），但其位移-力-电压关系符合理论模型的推论：输出位移与控制电压、负载成正比；非静态条件下，输出位移的迟滞效应明显，双向作动性能对称。最大位移达99.1

m（180 V电压下），且位移随频率增加有小幅下降。作动器的启动特性良好，能够实现毫秒级快速响应（5.4 ms左右），并迅速稳定。作动器控制信号为阶梯波信号时，阶梯增量电压为0.2 V时，最小步进量为0.1

m。作动器具有对称的双向作动特性和良好的启动特性，适用于精密定位或需要往复驱动特性对称的场合。

Abstract

To realize bi-directional symmetry drive when piezoelectric actuator journey is improved simultaneously

rhombus piezoelectric micrometric displacement actuator on the basis of triangular displacement amplification theory is put forward. Analyze movement and amplification theory of actuator

and establish theoretical static force model of actuator on the basis of piezoelectric equation. Key parameter of magnifying mechanism is introduced in detail. When journey is 105

error between magnification times of actuator and theoretical value is 5.69%. Experiment rigidity of model machine is greater than theoretical value. Experiment model machine is manufactured. Output characteristic experiment under open loop condition shows that under static force condition

average rigidity of actuator in actuation direction is about 0.62 N/

m and the maximum unidirectional free elongation displacement can be 42.2

m(under 160 V voltage)

and the maximum load is 27.4 N(under 160 V voltage)

and all of them are smaller than theory resolution (error does not exceed 24.2%). But its displacement-force-voltage relationship conforms to deduction of theoretical model:output displacement is in direct proportion to control voltage and load. Under non-static condition

hysteresis effect of output displacement is obvious and bi-directional actuation performance is symmetrical. The maximum displacement can be 99.1

m (under 180 V voltage)

and displacement decreases slowly with increasing of frequency. Starting characteristic of actuator is good

being able to realize millisecond-level quick response (about 5.4 ms)

and it is quick and stable. When control signal of actuator is step wave signal and when step increment voltage is 0.2 V

the minimum step-by-step quantity is 0.1

m. Actuator has symmetrical bi-directional actuation characteristic and good starting characteristic

being applicable to precision positioning or condition where repeated drive characteristic symmetry is required.

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