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1.哈尔滨工业大学 机电工程学院 精密工程研究所, 黑龙江 哈尔滨 150001
2.中国空空导弹研究院, 河南 洛阳 471009
3.哈尔滨工业大学 航天学院 光电子技术研究所, 哈尔滨 黑龙江 150080
Received:05 June 2016,
Accepted:20 July 2016,
Published:25 January 2017
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Bing GUO, Chun-yu ZHANG, Jin-hu WANG, et al. Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 93-99.
Bing GUO, Chun-yu ZHANG, Jin-hu WANG, et al. Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 93-99. DOI: 10.3788/OPE.20172501.0093.
为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工,首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性,进行了其超精密磨削加工工艺性分析,并基于有限元计算方法,完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验,工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度
R
a
值,但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工,磨削后的ALON高陡度薄壁保形非球面的面形精度
PV
值为2
μ
m,表面粗糙度
R
a
值可达8.6 nm。
In order to realize the ultra-precision grinding of high-gradient thin conformal aspheric on ALON infrared ceramic
the material property of ALON and the structured feature of high-gradient thin conformal aspheric was analyzed firstly. The precision jig was design and the main dimensions were optimized by finite element method. Secondly
the ALON grinding experiments were implemented. The results indicated that although the roughness would reduce with the decrease of workpiece spindle speed and wheel abrasive size
the effect of abrasive size on roughness was more significant. Finally
the ultra-precision grinding procedures were established for ALON high-gradient thin conformal aspheric. The form accuracy
PV
value of ground ALON workpiece was 2
μ
m
while the surface roughness was 8.6 nm.
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