Micro-displacement amplifier based on quasi-V-shaped flexure hinge

Min LIU; Xian-min ZHANG

doi:10.3788/OPE.20172504.0999

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Micro-displacement amplifier based on quasi-V-shaped flexure hinge

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Micro-displacement amplifier based on quasi-V-shaped flexure hinge
- Optics and Precision Engineering Vol. 25, Issue 4, Pages: 999-1008(2017)
- 作者机构：
  
  华南理工大学广东省精密装备与制造技术重点实验室, 广东广州 510641
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172504.0999
  CLC： TH132
- Received：10 October 2016，
  
  Accepted：16 January 2017，
  
  Published：25 April 2017
- 稿件说明：
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Min LIU, Xian-min ZHANG. Micro-displacement amplifier based on quasi-V-shaped flexure hinge[J]. Optics and precision engineering, 2017, 25(4): 999-1008.
DOI：

Min LIU, Xian-min ZHANG. Micro-displacement amplifier based on quasi-V-shaped flexure hinge[J]. Optics and precision engineering, 2017, 25(4): 999-1008. DOI： 10.3788/OPE.20172504.0999.

摘要

采用新型高精度类V型柔性铰链设计了柔性微位移放大机构，以减小该类机构的寄生运动并提高其动力学性能。对类V型柔性铰链与最常见的高精度直圆型柔性铰链的性能进行了比较；在考虑柔性铰链转动中心偏移量的基础上，基于弹性力学和材料力学理论推导了基于类V型柔性铰链和基于直圆型柔性铰链的两类二级杠杆式微位移放大机构的放大比。采用ANSYS软件，建立了放大机构的有限元模型，验证了位移放大比的理论推导，并对上述两类放大机构的位移放大比、寄生运动和固有频率进行了仿真和比较。有限元分析结果显示：基于类V型柔性铰链的放大机构有着更小的寄生运动和更高的固有频率，且前2阶固有频率分别是基于直圆型柔性铰链放大机构的1.68倍和1.41倍。最后，采用微视觉测量系统测量了两类放大机构的位移放大比和寄生运动。结果表明：基于类V型和直圆型柔性铰链放大机构的放大比和相对寄生运动比分别为4.387、4.529和0.314 7、0.334 2，显示类V型柔性铰链用于微位移放大机构可有效减小寄生运动并提高动力学性能。

Abstract

A micro-displacement flexure amplifier was designed based on a high accuracy quasi-V-shaped flexure hinge to reduce its parasitic motion and to improve its dynamics performance. The performance of the quasi-V-shaped flexure hinge was compared with that of a common high accuracy right circular flexure hinge. In consideration of the central offset during the rotation of flexure hinge

the amplification ratios of secondary-lever micro-displacement mechanisms based on the quasi-V-shaped flexure hinge and the right circular flexure hinge were derived on the basis of the theories of elastic mechanics and material mechanics. The finite element model was established with ANSYS software to verify the theoretical derivation of amplification ratios of displacement. The amplification ratios of displacement

the parasitic motions and inherent frequencies of the two kinds of amplifiers mentioned above were compared. The finite element results show that the amplifier based on quasi-V-shaped flexure hinge has smaller parasitic motion but higher inherent frequency

and its first two-order inherent frequencies are 1.68 times and 1.41 times of those based on right circular flexure hinge. Finally

the amplification ratios of displacement and the parasitic motions for the two kinds of amplifiers were measured by a micro-vision measurement system. The experiment results show that the amplification ratios and relative parasitic motion ratios of amplifiers based on quasi-V-shaped and right circular flexure hinge are 4.387 and 4.529 as well as 0.3147 and 0.3342 respectively. It concludes that the parasitic motion is effectively reduced and the dynamics performance is improved if the quasi-V-shaped flexure hinge is used in the micro-displacement amplifiers.

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