Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump

Hua LI; Chao-qun GUO; Lin-xiu JIANG; Yong-rong JIANG; Jian-ming ZHU; Wen-xiang XIAO; Wan-ling WEI; Zhen-cheng CHEN

doi:10.3788/OPE.20172506.1567

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Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump
- Optics and Precision Engineering Vol. 25, Issue 6, Pages: 1567-1576(2017)
- 作者机构：
  
  1.桂林电子科技大学生命与环境科学学院, 广西桂林, 541004
  2.广西信息科学实验中心, 广西桂林, 541004
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172506.1567
  CLC： TH83
- Received：24 October 2016，
  
  Accepted：16 January 2017，
  
  Published：25 June 2017
- 稿件说明：
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Hua LI, Chao-qun GUO, Lin-xiu JIANG, et al. Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump[J]. Optics and precision engineering, 2017, 25(6): 1567-1576.
DOI：

Hua LI, Chao-qun GUO, Lin-xiu JIANG, et al. Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump[J]. Optics and precision engineering, 2017, 25(6): 1567-1576. DOI： 10.3788/OPE.20172506.1567.

摘要

采用LIGA（Lithographie，Galvanoformung，Abformung）工艺设计加工了一种微型针-柱放电结构芯片，可实现敞开式离子源和微型气泵的系统集成。此微型放电结构由采用电镀铜加工而成的针电极、上圆柱电极和下圆柱电极组成，针-柱间距有1 mm、2 mm两种规格。在室温、大气压环境、无外界通入气流的条件下，通过在针-柱电极上加载负直流高压，可产生稳定的气体放电。利用风速计testo 405-V1测量芯片气体放电产生的离子风风速，结果表明针-柱间距为2 mm时产生的离子风流速最大，可达0.79m/s。对针-柱间距2mm规格的微型芯片进行乙酸进样电离实验，当针-柱之间产生稳定的电晕放电后，可发现位于芯片出口处已被去离子水润湿的PH试纸变红。此时利用微弱电流检测系统采集电离产生的离子，当放电电压为-3300V时，通过微弱电流采集系统检测到的电流信号可达120pA。采用LTQ XL离子阱质谱仪，对芯片电离丙酮、无水乙醇和乙酸乙酯的离子产物进行检测，所得到的主要物质为质子化单体离子和二聚物离子。放电产生离子风风速以及乙酸的进样和电离实验表明，基于LIGA的微型针-柱结构芯片可实现大气压环境下敞开式离子源和微型气泵的双重功能。

Abstract

The LIGA (Lithographie

Galvanoformung

Abformung) technology was adopted to design and process a micro needle-cylinder discharge structure chip

by doing this

system integration of open-type ion source and micro air pump was realized. The micro discharge structure was composed of pin electrode

upper cylinder electrode and bottom cylinder electrode which were fabricated by copper electroplating. There were two types of needle-cylinder clearances

separately were 1 mm and 2 mm. Under the condition of room temperature

atmospheric pressure environment and no airflow from outside

by loading negative direct current and high voltage on the needle-cylinder electrode

stable gas discharge could be generated. The wind speed of ionic wind caused by chip gas discharge could be measured through testo 405-V1 anemometer. The result shows that if the needle-cylinder clearance is 2 mm

the maximum flow velocity of the ionic wind will reach 0.79 m/s. Acetic acid sample injection ionization experiment of microchip with the needle-cylinder clearance of 2 mm was conducted. We found that when there was stable corona discharge between needle and cylinder

PH test paper located at the chip exit and has been moistened by de-ionized water would be red. At this time

the weak current detection system was used to collect ions generated by ionization

if the discharge voltage was -3 300 V

the current signal detected by weak current collection system reached 120 pA. LTQ XL ion trap mass spectrometer was applied to detect products of ions for chip ionization acetone

absolute ethyl alcohol and ethyl acetate

the main obtained substances were protonation monomer ion and biopolymer ion. Speed of ionic wind generated by discharge and sample injection and ionization of acetic acid experiments show that dual functions of open-type ion source and micro air pump can be realized under atmospheric pressure environment based on LIGA micro needle-cylinder structure chip.

关键词

Keywords

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Ion source with posterior suck sampling and ionization by ionic wind

Discharge properties of integrated system of ambient ion source and micro air pump based on needle-to-cylinder structure

Ion mobility spectrometer using pulse corona discharge ion source

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