Detection of periodic microstructure defect based on optical Fourier transform

Ming-li DONG; Bo LI; Fan ZHANG; Peng SUN

doi:10.3788/OPE.20172507.1727

您当前的位置：

首页 >

文章列表页 >

Detection of periodic microstructure defect based on optical Fourier transform

Modern Applied Optics | 更新时间：2020-07-07

- Detection of periodic microstructure defect based on optical Fourier transform
- Optics and Precision Engineering Vol. 25, Issue 7, Pages: 1727-1737(2017)
- 作者机构：
  
  北京信息科技大学光电测试技术北京市重点实验室, 北京 100192
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172507.1727
  CLC： O438.2;TH741
- Received：22 February 2017，
  
  Accepted：14 April 2017，
  
  Published：25 July 2017
- 稿件说明：
移动端阅览
Ming-li DONG, Bo LI, Fan ZHANG, et al. Detection of periodic microstructure defect based on optical Fourier transform[J]. Optics and precision engineering, 2017, 25(7): 1727-1737.
DOI：

Ming-li DONG, Bo LI, Fan ZHANG, et al. Detection of periodic microstructure defect based on optical Fourier transform[J]. Optics and precision engineering, 2017, 25(7): 1727-1737. DOI： 10.3788/OPE.20172507.1727.

摘要

为了实现大视场周期性微结构缺陷检测，提出了一种基于光学傅里叶变换（FT）的大视场周期性微结构缺陷检测方法，并搭建相关实验系统进行实验验证。首先，对周期性微结构的像进行二维快速傅里叶变换，获取周期性微结构的空间频谱；然后，选取一级衍射斑点中的一个斑点做快速傅里叶逆变换，得到周期性微结构的幅值分布图；最后，根据幅值分布图中的幅值突变位置确定缺陷的位置以及根据幅值突变的剧烈程度来定性地判断缺陷处的点偏离原来位置的位移。实验结果表明：该套系统的测量视场能达到1.5 mm×1.5 mm，测量分辨率能达到0.5 μm以上，在保证分辨率达到要求的前提下，大大地提高了检测视场，能够快速、高效、便捷地在大视场下对周期性微结构进行缺陷检测。

Abstract

In order to achieve defect detection of periodic microstructure in a large field of view

a defect detection method based on optical Fourier transform was proposed and relevant experimental system was established. Firstly

the periodic microstructure imaging was subject to two-dimensional fast Fourier transform for deriving spatial frequency spectrum of periodic microstructure. Then

a spot among first-order diffraction spots was chosen to be processed by fast Fourier transform for obtaining the amplitude histogram. According to the mutation location in the amplitude histogram

defect positions were determined. The deviation of defects was proportional to the intensity of the amplitude mutations. The experimental result shows that the system can provide a measurement field of view of 1.5 mm×1.5 mm and the measurement resolution over 0.5 μm

improving the detection field greatly on the premise of an adequate resolution. The proposed method enables fast

efficient and convenient defect detection of periodic microstructure in a large field of view.

关键词

Keywords

references

NIH B, WANG M, LI L, et al..Photonic-crystal-based optical fiber bundles and their applications[J]. IEEE Photonics Journal, 2013, 5(4):2400213.

YANG S, ZHU J G, HUANG Y L, et al..Fabrication of micro-scale gratings for Moiré method with a femtosecond laser[J]. Theoretical and Applied Mechanics Letters, 2016, 6(4):171-175.

刘杰, 铁生年, 卢辉东.多信道二维光子晶体滤波器[J].光学精密工程, 2016, 24(5):1021-1027.

LIU J, TIE SH N, LU H D. Multi-channel drop filter based on two-dimensional photonic crystal[J].Opt. Precision Eng., 2016, 24(5):1021-1027. (in Chinese)

VUCKOVI J, LONCAR M, MABUCHI H, et al..Design of photonic crystal microcavities for cavity QED[J]. Physical Review E:Statistical, Nonlinear, and Soft Matter Physics, 2001, 65(2):016608.

程轲, 王书杰, 付冬伟, 等.单晶硅表面周期性微结构的减反射特性及光伏特性[J].高等学校化学学报, 2010, 31(8):1647-1650.

CHENG K, WANG SH J, FU D W, et al..Antireflection and photovoltaic properties of microstructures design on the single crystalline silicon surface[J]. Chemical Journal of Chinese Universities, 2010, 31(8):1647-1650. (in Chinese)

ZHANG F, ANDERSON S, ZHENG X, et al..Cell force mapping using a double-sided micropillar array based on the moiré fringe method[J]. Applied Physics Letters, 2014, 105(3):033702.

FEI S, SUN Y F, SHI X Q, et al..Techniques for nano-scale deformation measurement[C]. Proceedings of the 6th Electronics Packaging Technology Conference, IEEE, 2004:729-734.

WANG Y W, FENG C, LIU X L, et al..Correction and extraction of the encoder grating image full-barcode[J]. Advanced Materials Research, 2014, 889-890:1042-1047.

WELLER R, SHEPARD B M. Displacement measurement by mechanical interferometry[J]. Proceedings of the Society for Experimental Stress Analysis, 1948, 6(1):35-38.

朱向冰, 何世平, 付绍军, 等.云纹法检测变线距光栅的线密度[J].光学精密工程, 2002, 10(3):285-289.

ZHU X B, HE SH P, FU SH J, et al..Measurement of the line-density of a varied-line-space grating by Moiré fringe[J]. Opt. Precision Eng., 2002, 10(3):285-289. (in Chinese)

IMAI T, PUTAUX J L, SUGIYAMA J. Geometric phase analysis of lattice images from algal cellulose microfibrils[J]. Polymer, 2003, 44(6):1871-1879.

胡浩, 梁晋, 唐正宗, 等.数字图像相关法测量金属薄板焊接的全场变形[J].光学精密工程, 2012, 20(7):1636-1644.

HU H, LIANG J, TANG ZH ZH, et al..Measurement of full-field deformations in metal sheet welding processes by image correlation method[J].Opt. Precision Eng., 2012, 20(7):1636-1644. (in Chinese)

HŸTCH M J, PUTAUX J L, PÉNISSON J M. Measurement of the displacement field of dislocations to 0.03Å by electron microscopy[J]. Nature, 2003, 423(6937):270-273.

HŸTCH M J, SNOECK E, KILAAS R. Quantitative measurement of displacement and strain fields from HREM micrographs[J]. Ultramicroscopy, 1998, 74(3):131-146.

BI H B, HARTSOUGH C, HAN B.Nano-pattern recognition and correlation technique for Nano-scale deformation measurement[C]. ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference, ASME, 2007:831-838.

张登臣, 郁道银.实用光学设计方法与现代光学系统[M].北京:机械工业出版社, 1995:314-317.

ZHANG D CH, YU D Y. Practical Optical Design Method and Modern Optical System[M]. Beijing:Mechanical Industry Press, 1995:314-317. (in Chinese)

Views

1170

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Deflectometric measurement technology for optical surfaces： principles， challenges， and prospects（invited）

Improved phase correlation and clustering ideas for Micro-LED chip microscopic image stitching

YOLOv8 model-based additive manufacturing micro porosity defect detection and its dimension measurement

Solar cell defect detection network combining multiscale feature and attention

Improving the lightweight VTG-YOLOv7-tiny for steel surface defect detection

Related Author

ZHANG Xiangchao

NIU Xingman

HAO Siyuan

LANG Wei

LI Pingfeng

LIU Ruiyang

ZHANG Zonghua

LIN Jianpu

Related Institution

College of Mechanical Engineering， Hebei University of Technology

School of Information Science and Technology， Fudan University

School of Advanced Manufacturing，Fuzhou University

School of Physics and Information Engineering，Fuzhou University

China Fujian Photoelectric Information Science and Technology Innovation Laboratory

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰