ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation

Qiang FU; Liang YIN; Wei-ping CHEN; Xiao-wei LIU

doi:10.3788/OPE.20172507.1843

您当前的位置：

首页 >

文章列表页 >

ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation
- Optics and Precision Engineering Vol. 25, Issue 7, Pages: 1843-1849(2017)
- 作者机构：
  
  哈尔滨工业大学MEMS中心, 黑龙江哈尔滨 150001
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172507.1843
  CLC： TN40
- Received：08 August 2016，
  
  Accepted：18 October 2016，
  
  Published：25 July 2017
- 稿件说明：
移动端阅览
Qiang FU, Liang YIN, Wei-ping CHEN, et al. ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation[J]. Optics and precision engineering, 2017, 25(7): 1843-1849.
DOI：

Qiang FU, Liang YIN, Wei-ping CHEN, et al. ASIC design of micro-mechanical gyro interface of low temperature drift quartz with temperature compensation[J]. Optics and precision engineering, 2017, 25(7): 1843-1849. DOI： 10.3788/OPE.20172507.1843.

摘要

本文通过分析石英陀螺的工作原理，设计了闭环自激驱动、低噪声相敏解调原理的接口电路，并研究了驱动力耦合对零位输出造成的影响，以提高石英陀螺的环境适应性。通过研究传感器敏感表头的空气阻尼和谐振频率等方面的温度特性，得出温度对驱动力幅值的影响。进而提出通过驱动力幅值进行温度补偿的方法。对接口电路温度特性以及对陀螺零位输出的影响进行了分析，设计了全温区带宽恒定的运算放大器单元，抑制由于检测信号中高次谐波分量比例变化产生的温度漂移，并在高压N阱CMOS工艺下流片，实现低温漂接口ASIC。在-45℃~85℃的温度范围内对石英陀螺整机进行零位温度循环测试，利用驱动力幅值对零位输出进行三阶拟合补偿，补偿后全温零位温度漂移小于20°/hr（1σ），短期稳定性为5°/hr，输出噪声为0.001°/s/√Hz。

Abstract

Through analyzing operating principle of quartz gyro

interface circuit of closed-loop self-excited drive and based on principle of low-noise phase sensitive demodulation was designed

and influence of driving force coupling on zero position output was researched to increase environmental adaptability of quartz gyro. Effect of temperature on amplitude of driving force was obtained through researching temperature feature on aspects of air damping and resonant frequency

etc of sensitive header of sensor. Then method of conducting temperature compensation via amplitude of driving force was proposed. Temperature features of interface circuit and influence to zero position output of gyro were analyzed

and operational amplifier unit of constant bandwidth in the whole temperature area was designed to restrain temperature drift due to change of proportion of high-frequency harmonic component in detection signal. The chip was implemented in high voltage N-well CMOS process and interface ASIC with low-temperature drift was achieved. Cyclic test of zero position temperature was conducted on whole machine of quartz gyro in temperature scope of -45℃~85℃ to conduct three-order fitting compensation on zero position output with amplitude of driving force. Zero position temperature drift of whole temperature after compensation was less than 20°/hr(1σ)with short-term stability and output noise respectively as 5°/hr and 0.001°/s/√Hz.

关键词

Keywords

references

CHEN W P, WANG Q Y, YIN L. A high-performance interface ASIC for quarts vibrating gyroscope. Optielectronics and Microelectronics Technology, 2011:263-266.

齐广峰, 吕军锋. MEMS惯性技术的发展及应用.电子设计工程, 2015(1):87-89+92.

QI G F, LV J F. Development and application of MEMS inertial technology. Electronic Design Engineering, 2015(1):87-89+92.(in Chinese)

WANG Q Y, CHEN W P, YIN L, et al.. A closed-loop self-excited drive circuit for quartz gyroscope. Nanotechnology and Precision Engineering, 2012, 10(6):497-502

施芹, 苏岩, 裘安萍, 等. MEMS陀螺仪器件级真空封装技术.光学精密工程, 2009, 17(8):1987-1992.

SHI Q, SU Y, QIU A P, et al.. MEMS gyroscope device level vacuum packaging technology. Opt. Precision Eng., 2009, 17(8):1987-1992.(in Chinese)

曹慧亮, 李宏生, 王寿荣, 等.硅微机械陀螺仪测控电路的温度补偿.光学精密工程, 2013, 21(12):3118-3125.

CAO H L, LI H SH, WANG SH R, et al.. Temperature compensation of monitoring circuit for silicon MEMS gyroscope. Opt. Precision Eng., 2013, 21(12):3118-3125.(in Chinese)

VEIJOLA T, TUROWSKI M. Compact damping models for laterally moving microstructures with gas-rarefaction effects[J]. Journal of Microelectromechanical Systems, 2001, 10(2):263-273, June 2001.

WANG S W.Modeling and error compensation of MEMS gyroscope dynamic output data within the whole temperature range.Advanced Materials Research, 2011, 311-313:768-771.

赵双, 刘云涛.恒跨导轨对轨CMOS运算放大器的设计.微电子学, 2016, 46(3):302-305+310.

ZHAO SH, LIU Y T. Design of a CMOS rail-to-rail operational amplifier with constant transconductance. Microelectronics, 2016, 46(3):302-305+310.(in Chinese)

ARBET D, KOVÁ M, NAGY G, et al.. High dynamic range and low distortion fully differential difference amplifier in CMOS.201525th International Conference Radio-elektronika IEEE, 2015:114-117.

BELOUSOV E, TIMOSHENKO A, LOMOVSK AYA K. Low noise amplifier for MEMS gyroscope readout circuit. 2016 IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference (EIConRusNW), 2016:495-498.

李世国, 朱振忠, 杨勇, 等.石英音叉陀螺的温度特性及其补偿方法.压电与声光, 2015, 37(3):504-511.

LI SH G, ZHU ZH ZH, YANG Y, et al.. Temperature characteristics and temperature compensation models of quartz tuning fork gyroscope. Piezoelectrics & Acoustooptics, 2015, 37(3):504-511.(in Chinese)

FANG J CH, LI J L.Integrated model and compensation of thermal errors of silicon microelectromechanical gyroscope.IEEE Transactions on Instrumentation and Mearurement, 2009, 58(9):2923-2930.

Views

492

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Temperature insensitive optical fiber dual-cavity salinity sensor

Design and application of miniature multi-parameter water quality sensor chip

EFPI-FBG composite pressure and temperature sensor embedded in epoxy resin

Temperature compensation and noise suppression for magnetostrictive liquid level sensor using double detection coils

High-precision bow-shaped fiber Bragg grating micro-displacement sensors

Related Author

GAO Jiale

WANG Ji

MU Xiaoguang

LI Yitong

YANG Yuqiang

Xin WANG

Yun-bo SHI

Ming-yao LIU

Related Institution

Research Center of Guangdong Smart Oceans Sensor Networks and Equipment Engineering， Guangdong Ocean University

College of Mechanical Engineering， Guangdong Ocean University

Guangdong Provincial Key Laboratory of Intelligent Equipment for South China Sea Marine Ranching， Guangdong Ocean University

Shenzhen Institute of Guangdong Ocean University

School of Mechanical and Electrical Engineering, Soochow University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰