Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage

Ke-qi QI; Yang XIANG; Ya-lin DING; Chao FANG; Zhen-ping ZHOU

doi:10.3788/OPE.20172507.1874

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Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage
- Optics and Precision Engineering Vol. 25, Issue 7, Pages: 1874-1881(2017)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室, 吉林长春 130033
  2.中国科学院长春光学精密机械与物理研究所, 中国科学院航空光学成像与测量重点实验室, 吉林长春 130033
  3.中国科学院大学, 北京 100049
  4.吉林大学机械科学与工程学院, 吉林长春 130022
- 作者简介：
  
  XIANG Yang, E-mail:xiangy@sklao.ac.cn
- 基金信息：
- DOI：10.3788/OPE.20172507.1874
  CLC： TH112.5
- Received：20 January 2016，
  
  Accepted：31 March 2016，
  
  Published：25 July 2017
- 稿件说明：
移动端阅览
Ke-qi QI, Yang XIANG, Ya-lin DING, et al. Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage[J]. Optics and precision engineering, 2017, 25(7): 1874-1881.
DOI：

Ke-qi QI, Yang XIANG, Ya-lin DING, et al. Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage[J]. Optics and precision engineering, 2017, 25(7): 1874-1881. DOI： 10.3788/OPE.20172507.1874.

摘要

针对传统串联式微位移机构具有的结构不紧凑和刚度较低等问题，本文设计了一种结构紧凑、具有高分辨率和高刚度的并联式自解耦二自由度微位移平台。该平台采用了4个对称布置的嵌套式平行导向机构，使得平台具有刚度对称和自解耦等特点。本文还对嵌套式平行导向机构的工作原理进行了分析。通过有限元方法仿真分析了微位移平台在不同受力状态下的变形情况，并对其进行了模态分析。经实验测量，证实了该平台具有自解耦功能，并得出了微位移平台的实际行程，且其输出位移也被证实具有较为良好的线性度。

Abstract

Due to traditional serial-type micro-motion stage has disadvantages of incompact structure and low stiffness

a parallel-type self-decoupling 2-dimension micro-motion stage was designed with the advantage of compact structure

high-resolution and high stiffness. Four symmetrical nested parallel guide mechanisms were adopted in this platform to confer it has the features of symmetrical stiffness and self-decoupling. Operation principle of nested parallel guide mechanism was analyzed in this thesis. Simulation of deformation situation of micro-displacement platform on condition of different stresses was conducted via finite element method

and modal analysis was conducted on it. It is verified that this platform has the function of self decoupling

and the actual travel range of micro-displacement platform obtained through experimental measuring

and it is also verified that its output displacement has good linearity.

关键词

Keywords

references

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