Removal functions of different polishing heads worked in planet motion model

Yong-sheng YAO; Zhen MA; Liang XU; Jiao-teng DING; Yong-jie WANG; Le SHEN; Bo JIANG

doi:10.3788/OPE.20172510.2706

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Removal functions of different polishing heads worked in planet motion model

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Removal functions of different polishing heads worked in planet motion model
- Optics and Precision Engineering Vol. 25, Issue 10, Pages: 2706-2713(2017)
- 作者机构：
  
  1.中国科学院西安光学精密机械研究所, 陕西西安 710119
  2.中国科学院大学, 北京 100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172510.2706
  CLC： TN305.2;TG747
- Received：20 February 2017，
  
  Accepted：16 April 2017，
  
  Published：25 October 2017
- 稿件说明：
移动端阅览
Yong-sheng YAO, Zhen MA, Liang XU, et al. Removal functions of different polishing heads worked in planet motion model[J]. Optics and precision engineering, 2017, 25(10): 2706-2713.
DOI：

Yong-sheng YAO, Zhen MA, Liang XU, et al. Removal functions of different polishing heads worked in planet motion model[J]. Optics and precision engineering, 2017, 25(10): 2706-2713. DOI： 10.3788/OPE.20172510.2706.

摘要

为了在光学元件的加工中获取更加接近高斯型的去除函数，本文基于传统行星运动抛光理论，提出了用自转去除函数公转轨迹积分较方便地求取各种复杂形状磨头去除函数的方法。当转速比大于10时，新方法与传统方法得到的实心圆盘去除函数曲线非常接近，从而验证了提出方法的正确性。采用新方法推导了不同形状磨头的去除函数，并通过计算机进行了仿真实验。实验显示：磨头形状为Ⅱ型花瓣，偏心率为0.4时，可以获得非常接近高斯型的去除函数。针对Ⅱ型花瓣磨头进行了抛光试验，结果表明，当偏心率为0.4、转速比为10时，试验结果与仿真结果非常吻合，且都非常接近高斯型去除函数。实验结果再次验证了新方法的正确性。

Abstract

To obtain Gaussian-like removal function in optical manufacturing process

a convenient method to derive the removal functions of various complicated polishing heads by integrating the rotation removal function along the revolution trajectory was proposed based on the traditional planet polising theory. When the speed ratio was greater than 10

the removal function curve of a solid disk by the proposed method was very close to the result by the traditional method

which verifies the correctness of the proposed method.The proposed method was used to derive polishing removal functions of different polishing heads.By computer simulation

it shows that type Ⅱ petal polishing head gets a better removal function curve when the eccentricity ratio is 0.4.Finally

the type Ⅱ petal polishing head was polished

and the results indicate that when the eccentricity ratio was 0.4 and the speed ratio is 10

the test and simulation results are consistent with each other and they are all close to the Gaussian curve.These test result verifies the correctness of the proposed method again.

关键词

Keywords

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