Design of cymbal shape slotted valve based piezoelectric pump

Jun HUANG; Yi-chao ZHU; Wei-dong SHI; Bo PAN

doi:10.3788/OPE.20172511.2914

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Design of cymbal shape slotted valve based piezoelectric pump

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-07

- Design of cymbal shape slotted valve based piezoelectric pump
- Optics and Precision Engineering Vol. 25, Issue 11, Pages: 2914-2922(2017)
- 作者机构：
  
  1.江苏大学国家水泵及系统工程技术研究中心, 江苏镇江 212013
  2.山东星源矿山设备集团有限公司, 山东济宁 272300
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172511.2914
  CLC： TH38;TN384
- Received：18 May 2017，
  
  Accepted：23 June 2017，
  
  Published：25 November 2017
- 稿件说明：
移动端阅览
Jun HUANG, Yi-chao ZHU, Wei-dong SHI, et al. Design of cymbal shape slotted valve based piezoelectric pump[J]. Optics and precision engineering, 2017, 25(11): 2914-2922.
DOI：

Jun HUANG, Yi-chao ZHU, Wei-dong SHI, et al. Design of cymbal shape slotted valve based piezoelectric pump[J]. Optics and precision engineering, 2017, 25(11): 2914-2922. DOI： 10.3788/OPE.20172511.2914.

摘要

由于有阀压电泵内部阀体所受应力过大易导致阀体失效，本文提出了钹型开槽式截止阀来减小有阀压电泵内部阀体所受应力。基于钹型开槽式截止阀设计了有阀压电泵，分析了钹型开槽式阀压电泵的工作原理。对钹型开槽膜片进行了受力分析，研究了该压电泵的输出性能及耦合作用下的膜片应力。加工制作了钹型开槽式阀压电泵样机，建立了钹型开槽式阀压电泵的有限元模型，数值计算了流固耦合作用下的阀体应力值。计算结果表明：在压电泵正常输出的驱动频率范围内，当驱动频率为418 Hz时，膜片所受应力的计算值也达到最大，为81.74 MPa。最后，进行了压电泵性能试验。试验结果显示：该压电泵的输出流量最大值和振子振幅最大值均出现在低频段；当驱动电压为160 V，驱动频率为5 Hz时，输出流量达到最大，为6.6 g/min；驱动频率为4 Hz时，压电振子振幅达到最大，为165.8

m。文中的研究验证了钹型开槽式阀体压电泵的有效性，并得出当钹型开槽式阀压电泵工作在低频段时，阀门所受应力远小于高频段时阀门的应力值。

Abstract

The valve inside a piezoelectric pump was easy to be failure when it was suffered too much stress concentration. A cymbal-shape slotted check valve was proposed to reduce the stress concentration of the piezoelectric pump. A valve-based piezoelectric pump was designed by using the cymbal-shape slotted check valve

and the working principle of the cymbal-shape slotted check valve based piezoelectric pump was introduced. The stress of the cymbal-shape slotted diaphragm was analyzed

the output performance of the piezoelectric pump was discussed and the stress of diaphragm on fluid-solid coupled interaction was calculated. Then

a prototype for the pump was fabricated. The finite element model of the cymbal-shape slotted check valve based piezoelectric pump was established and the stress of the cymbal-shaped slotted diaphragm on fluid-solid coupled interaction were calculated numerically. The calculation results indicate that the calculated value of the diaphragm is the maximum when the driving frequency is 418 Hz

and it is 81.74 MPa in the normal driving frequency range of the piezoelectric pump. Finally

the performance of the piezoelectric pump was tested

and results show that the maximum output flow of the pump and the maximum amplitude of the oscillator are in the low frequency band. The maximum flow rate is 6.6 g/min driving by 160 V (5 Hz)

and the maximum amplitude of the piezoelectric vibrator is 165.8

m (160 V

4 Hz). The experimental results validate the feasibility of the cymbal-shaped slotted valve based piezoelectric pump. Moreover

it concludes that the stress of the diaphragm working in high frequencies is larger than that working in low frequencies.

关键词

Keywords

references

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