Parylene-enhanced SAW sensor and its temperature response

Jing LI; Hai-xi PAN; Zhen GUO; Chuan-yu LI; Jia YAO

doi:10.3788/OPE.20172512.3048

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Parylene-enhanced SAW sensor and its temperature response

Grating Micro/Nano Fabrication | 更新时间：2020-07-07

- Parylene-enhanced SAW sensor and its temperature response
- Optics and Precision Engineering Vol. 25, Issue 12, Pages: 3048-3055(2017)
- 作者机构：
  
  1.中国科学院苏州生物医学工程技术研究所, 江苏苏州 215163
  2.中国科学院大学材料科学与光电技术学院, 北京 100049
  3.西北工业大学材料科学与工程学院, 陕西西安 710072
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172512.3048
  CLC： TP212.16
- Received：19 May 2017，
  
  Accepted：22 June 2017，
  
  Published：25 December 2017
- 稿件说明：
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Jing LI, Hai-xi PAN, Zhen GUO, et al. Parylene-enhanced SAW sensor and its temperature response[J]. Optics and precision engineering, 2017, 25(12): 3048-3055.
DOI：

Jing LI, Hai-xi PAN, Zhen GUO, et al. Parylene-enhanced SAW sensor and its temperature response[J]. Optics and precision engineering, 2017, 25(12): 3048-3055. DOI： 10.3788/OPE.20172512.3048.

摘要

针对声表面波（SAW）传感器对品质因数、寿命和成本的要求，研制了Parylene增强型SAW传感器。根据金属剥离工艺要求，利用LOR剥离胶和AZ5214光刻胶双层胶旋涂工艺制作了梯形结构；在传统光学光刻条件下制作了2 μm的超细叉指电极。传感器制作过程利用了MEMS工艺，不仅实现了传感器的微型化，还可以批量化生产，得到的以石英为基底的传感器谐振频率达到249.077 953 MHz。最后在传感器的表面镀制Parylene聚合物薄膜以提高基底温度灵敏度。实验对比了未增强型（未镀Parylene）和增强型SAW传感器（镀Parylene）的温度灵敏度。结果显示：未增强型SAW传感器温度灵敏度为2.048 kHz/℃，Parylene增强型SAW传感器温度灵敏度为2.855 kHz/℃，比前者提高了0.807 kHz/℃，且镀Parylene之后谐振频率变化量与温度具有较好的线性度，线性相关系数达到0.996 15。实验证明，Parlene增强型SAW传感器的性能优于未增强的SAW传感器。

Abstract

According to the requirement of Surface Acoustic Wave (SAW) sensors for quality factors

long life and low costs

a Parylene enhanced SAW sensor was developed. In consideration of metal stripping process

the LOR stripping rubber and AZ5214 double-layer spin-coating process were used to produce a trapezoidal structure

and the traditional optical lithography was used to fabricate a 2 μm superfine fork finger electrode. By utilizing MEMS technology

the sensor implements the miniaturization

but also the quantified production. The obtained quartz -based sensor shows its resonant frequency to be 249.077 953 MHz. Finally

a Parylene polymer film was coated on the surface of the sensor to increase the temperature sensitivity of the substrate. The temperature sensitivities of unenhanced SAW sensor (uncoated parylene) and enhanced SAW sensor (coated parylene) were compared experimentally. The results indicate that the temperature sensitivity of the former is 2.048 kHz/℃ and that of the latter is 2.855 kHz/℃

which is higher 0.80 kHz/℃ than that of the former. Moreover

the resonant frequency offset and the temperature of the Parylene-enhanced SAW sensor show an excellent linearity

and the linear correlation coefficient reaches to 0.99615. These experiments demonstrate that performance of Parylene-enhanced SAW sensors is superior to that of the unenhanced SAW sensors.

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