Geometric error measurement and integrated modeling for precision CNC machine tools of optical free-form surface

CHENG Ya-ping; ZHANG En-zhong; QI Yue-ling; LIN Jie-qiong

doi:10.3788/OPE.20172513.0174

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Geometric error measurement and integrated modeling for precision CNC machine tools of optical free-form surface

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- Geometric error measurement and integrated modeling for precision CNC machine tools of optical free-form surface
- Optics and Precision Engineering Vol. 25, Issue 10s, Pages: 174-182(2017)
- 作者机构：
  
  1. 长春工业大学机电学院,吉林长春,130012
  2. 吉林省新闻出版广电局,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20172513.0174
  CLC： TG659;TH161
- Received：28 April 2017，
  
  Revised：05 June 2017，
  
  Published：25 November 2017
- 稿件说明：
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程亚平, 张恩忠, 齐月玲等. 光学自由曲面精密数控机床几何误差测量与综合建模[J]. 光学精密工程, 2017,25(10s): 174-182

CHENG Ya-ping, ZHANG En-zhong, QI Yue-ling etc. Geometric error measurement and integrated modeling for precision CNC machine tools of optical free-form surface[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 174-182
程亚平, 张恩忠, 齐月玲等. 光学自由曲面精密数控机床几何误差测量与综合建模[J]. 光学精密工程, 2017,25(10s): 174-182 DOI： 10.3788/OPE.20172513.0174.

CHENG Ya-ping, ZHANG En-zhong, QI Yue-ling etc. Geometric error measurement and integrated modeling for precision CNC machine tools of optical free-form surface[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 174-182 DOI： 10.3788/OPE.20172513.0174.

摘要

为提高自主研制的光学自由曲面精密数控机床的加工精度，对机床几何误差进行测量与建模。利用激光干涉仪对精密数控机床运动轴的几何误差进行测量，根据切比雪夫多项式建立基本几何误差项模型。通过对比实测曲线与拟合曲线，发现基本几何误差模型逼近程度高。经计算得出

x、y、z

轴移动误差的残差偏差带宽范围为（0.63，2.84）

m，角度误差的残差偏差带宽范围为（0.39，1.19）弧秒，表明建立的模型预测精度高。基于多体系统理论建立精密数控几何误差模型，将基本误差几何误差模型代入该模型，得到两轴联动工况下的综合几何误差模型。建模过程简单且易于程序设计，有效提高了光学自由曲面精密数控加工精度与效率。

Abstract

In order to improve processing precision of independently developed precision CNC machine tools of optical free-form surface

geometrical error of the machine was measured and modeled. Geometric error of motion axis of precision CNC machine tools was measured by laser interferometer and basic geometric error term model was established according to Chebyshev polynomia. It was found that approximation level of basic geometric error model was high by comparing measured curves and matched curve. It is obtained by calculation that residual deviation bandwidth range of moving error of

y and z

axis is (0.63

2.84)

and residual deviation bandwidth range of angle error is (0.39

1.19) arc second

which shows that prediction precision of established model is high. The geometric error model of basic error was substituted into the model based on multi-body system theory to obtain integrated geometric error model under the operating condition of two-axis linkage. The modeling process is simple with easy program design and improves processing precision and efficiency of precision CNC of optical free-form surface.

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references

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