Measurement of residual stresses in pulsed laser deposited thin films

Kai-chen DONG; Shuai LOU; Jie YAO; Jun-qiao WU; Zheng YOU

doi:10.3788/OPE.20182601.0070

您当前的位置：

首页 >

文章列表页 >

Measurement of residual stresses in pulsed laser deposited thin films

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Measurement of residual stresses in pulsed laser deposited thin films
- Optics and Precision Engineering Vol. 26, Issue 1, Pages: 70-76(2018)
- 作者机构：
  
  1.清华大学精密仪器系精密测试技术及仪器国家重点实验室北京市未来芯片技术高精尖创新中心, 北京 100084
  2.美国加州大学伯克利分校材料科学与工程系, 伯克利 94720
  3.美国劳伦斯伯克利国家实验室材料科学部, 伯克利 94720
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182601.0070
  CLC： TH704;TH87
- Received：10 July 2017，
  
  Accepted：31 August 2017，
  
  Published：25 January 2018
- 稿件说明：
移动端阅览
Kai-chen DONG, Shuai LOU, Jie YAO, et al. Measurement of residual stresses in pulsed laser deposited thin films[J]. Optics and precision engineering, 2018, 26(1): 70-76.
DOI：

Kai-chen DONG, Shuai LOU, Jie YAO, et al. Measurement of residual stresses in pulsed laser deposited thin films[J]. Optics and precision engineering, 2018, 26(1): 70-76. DOI： 10.3788/OPE.20182601.0070.

摘要

为了测量脉冲激光沉积法制备的小面积薄膜的残余应力，并解决Stoney公式在特定情况下误差较大的问题，本文提出了一种基于悬臂梁结构和数值计算的薄膜残余应力测量方法。该方法以初始曲率为零的原子力显微镜探针作为衬底梁，在衬底梁上使用脉冲激光沉积方法沉积被测薄膜，并记录衬底梁在薄膜沉积前后的翘曲形貌变化，再结合薄膜厚度、衬底梁几何尺寸、所涉及材料的杨氏模量与泊松比等其他参数，借助数值计算对实验数据进行分析，得出被测薄膜的残余应力。使用该方法测出：基于脉冲激光沉积法在高温环境下制备的二氧化钒薄膜的残余应力为-340 MPa，与文献报道的结果相符。本文提出的基于悬臂梁结构和数值计算的薄膜残余应力测量方法具有适用范围广、准确度好、实验成本低的优点。

Abstract

To measure the residual stresses in thin films with limited area prepared by pulsed laser deposition

as well as to solve the problem of the relatively large error introduced by the Stoney equation under certain circumstances

a measurement method for residual stresses in thin films based on cantilever structures and numerical calculation was proposed in this article. In this method

atomic force microscopy probes with zero initial curvature were used as substrate cantilevers

and thin films were deposited on the substrate cantilevers using pulsed laser deposition. The bending profiles of the substrate cantilevers before and after thin film deposition were recorded and used in numerical calculation

together with other parameters including the thin film thicknesses

the geometries of the substrate cantilevers

and the Young's moduli and the Poisson's ratios of the involved materials

to analyze the experimental data and obtain the residual stresses in the thin films. By using this method

the residual stress in vanadium dioxide thin films

prepared by pulsed laser deposition in a high-temperature environment

is measured to be -340 MPa

corresponding to the value reported in the literature. The measurement method for residual stresses in thin films proposed in this article

which is based on cantilever structures and numerical calculation

has the advantages of wide versatility

good accuracy

and low costs.

关键词

Keywords

references

孔慧, 李传宇, 周连群, 等.薄膜谐振Lamb波传感器测量液体流速矢量的方法[J].光学精密工程, 2017, 25(1):155-162.

KONG H, LI CH Y, ZHOU L Q, et al.. A method for fluid velocity vector measurement using thin film Lamb wave resonator[J]. Opt. Precision Eng., 2017, 25(1):155-162. (in Chinese)

赵健, 施芹, 夏国明, 等.小型化硅微谐振式加速度计的实现与性能测试[J].光学精密工程, 2016, 24(8):1927-1933.

ZHAO J, SHI Q, XIA G M, et al.. Implementation and measurement of a miniaturized silicon resonant accelerometer[J]. Opt. Precision Eng., 2016, 24(8):1927-1933. (in Chinese)

虞益挺, 苑伟政, 乔大勇.曲率测量技术在微机电系统薄膜残余应力测量中的应用[J].机械工程学报, 2007, 43(3):78-81.

YU Y T, YUAN W ZH, QIAO D Y. Application of curvature measurement technique for measuring residual stresses in MEMS thin films[J]. Chinese Journal of Mechanical Engineering, 2007, 43(3):78-81. (in Chinese)

周剑, 吴学忠, 肖定邦, 等.柔性声表面波器件的波模式分析[J].光学精密工程, 2016, 24(6):1328-1334.

ZHOU J, WU X ZH, XIAO D B, et al.. Analysis on wave mode of flexible surface acoustic wave devices[J]. Opt. Precision Eng., 2016, 24(6):1328-1334. (in Chinese)

WON S S, LEE J, VENUGOPAL V, et al.. Lead-free Mn-doped (K 0.5 , Na 0.5 )NbO 3 piezoelectric thin films for MEMS-based vibrational energy harvester applications[J]. Applied Physics Letters, 2016, 108(23):232908.

LIU K, CHENG CH, CHENG ZH T, et al.. Giant-amplitude, high-work density microactuators with phase transition activated nanolayer bimorphs[J]. Nano Letters, 2012, 12(12):6302-6308.

MA H, HOU J W, WANG X W, et al.. Flexible, all-inorganic actuators based on vanadium dioxide and carbon nanotube bimorphs[J]. Nano Letters, 2017, 17(1):421-428.

KLEIN C A. How accurate are Stoney's equation and recent modifications[J]. Journal of Applied Physics, 2000, 88(9):5487-5489.

VISWANATH B, KO C, RAMANATHAN S. Thermoelastic switching with controlled actuation in VO 2 thin films[J]. Scripta Materialia, 2011, 64(6):490-493.

PUREZA J M, LACERDA M M, DE OLIVEIRA A L, et al.. Enhancing accuracy to Stoney equation[J]. Applied Surface Science, 2009, 255(12):6426-6428.

LOWNDES D H, GEOHEGAN D B, PURETZKY A A, et al.. Synthesis of novel thin-film materials by pulsed laser deposition[J]. Science, 1996, 273(5277):898-903.

TORRES D, WANG T Y, ZHANG J, et al.. VO 2 -based MEMS mirrors[J]. Journal of Microelectromechanical Systems, 2016, 25(4):780-787.

TORRES D, ZHANG J, DOOLEY S, et al.. Modeling of MEMS mirrors actuated by phase-change mechanism[J]. Micromachines, 2017, 8(5):138.

WANG T Y, TORRES D, FERNÁNDEZ F E, et al.. Maximizing the performance of photothermal actuators by combining smart materials with supplementary advantages[J]. Science Advances, 2017, 3(4):e1602697.

CABRERA R, MERCED E, SEPÚLVEDA N. Performance of electro-thermally driven VO 2 -based MEMS actuators[J]. Journal of Microelectromechanical Systems, 2014, 23(1):243-251.

Views

588

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Low stress laser welding technology for corrugated diaphragm of pressure sensor

Optimization of process parameters and surface characteristics in laser-assisted ultra-precision cutting of monocrystalline silicon

Impedance matching of MEMS double-channel microwave power sensor

Ritchey-Common interferometry using unit-excitation influence matrix's numerical calculation method

Testing and analysis of residual stresses in quenched 7075 aluminum alloy thick plate

Related Author

XU Jiahao

ZHU Minjie

LIU Shuai

CHEN Fanhong

DU Xiaohui

XU Jianfeng

ZHANG Jianguo

SHE Zhongdi

Related Institution

Nanchang University of Aeronautics

Instrumentation Technology and Economy Institute

National Innovation Institute of Digital Design and Manufacturing

School of Mechanical Science and Engineering， Huazhong University of Science and Technology

School of Mechanical Engineering， Hubei University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰