Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure

Xiang-qiang ZHONG; Wei-qing HUANG; Xuan ZHANG; Meng-xin SUN; Qian LU

doi:10.3788/OPE.20182601.0086

您当前的位置：

首页 >

文章列表页 >

Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure
- Optics and Precision Engineering Vol. 26, Issue 1, Pages: 86-94(2018)
- 作者机构：
  
  1.南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016
  2.安徽工程大学机械与汽车工程学院, 安徽芜湖 241000
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182601.0086
  CLC： TM359.4;TH112.5;TN384
- Received：09 May 2017，
  
  Accepted：08 July 2017，
  
  Published：25 January 2018
- 稿件说明：
移动端阅览
Xiang-qiang ZHONG, Wei-qing HUANG, Xuan ZHANG, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure[J]. Optics and precision engineering, 2018, 26(1): 86-94.
DOI：

Xiang-qiang ZHONG, Wei-qing HUANG, Xuan ZHANG, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure[J]. Optics and precision engineering, 2018, 26(1): 86-94. DOI： 10.3788/OPE.20182601.0086.

摘要

为实现精密机械装置的快速定位，增加压电直线电机中位移放大结构对压电叠堆输出位移的放大能力，提出了一种基于二级杠杆和柔性铰链复合结构的新型双足压电直线电机。首先，对电机的作动原理进行分析，推导了驱动足轨迹方程。为提高其输出性能，对直圆型柔性铰链的参数进行了优化，得到最佳铰链参数为厚度

=0.2 mm、切割半径

=1 mm和宽度

=10 mm。最后，制作了该电机样机并进行了振幅、速度和负载性能测试，基于正交试验方法对电机速度进行了分析，得出电压对电机速度的影响更灵敏。实验结果表明，驱动足Ⅰ、Ⅱ的位移振幅分别在75 μm和63 μm附近波动，差值约为12 μm；在120 V、110 Hz的信号激励下速度达16.163 mm/s，最大负载能力为1.7 N。与现有的压电直线电机相比较，该电机结构简单，易于安装调试，具有响应快、大振幅、速度大且运行稳定的特点。

Abstract

In order to improve the rapid positioning of precision mechanical devices and the amplification ability of displacement amplification structures for the output displacement of piezoelectric stacks in piezoelectric linear motors

a new kind of double-foot driving piezoelectric linear motor with secondary lever and flexible hinge was proposed. First

the operating principle of the motor was analyzed and the trajectory equation of the driving feet was formulated. Next

the parameters of the straight circular flexure hinge were optimized in order to improve the output performance; the optimal hinge parameters obtained were thickness

=0.2 mm

cutting radius

=1 mm

and width

=10 mm. Finally

the prototype motor was designed

and the amplitude

speed

and load performance were tested. The motor speed was analyzed based on the orthogonal test method; our analysis revealed the sensitivity of the motor speed on the voltage. Our experimental results revealed displacement amplitudes of the driving feet Ⅰ and Ⅱ in the range of 75 μm and 63 μm

respectively

i.e.

the difference is about 12 μm. Furthermore

the speed was observed to reach 16.163 mm/s under a voltage of 120 V and a signal excitation of frequency 110 Hz

and a maximum load capacity of 1.7 N was obtained. Compared with existing piezoelectric linear motors

our motor possesses the advantages of a simple structure

easy installation and debugging

fast response

large amplitude

high speed

and stable operation.

关键词

Keywords

references

于月民.压电式微动机构动力学与仿真分析[M].哈尔滨:哈尔滨工业大学出版社, 2015:30-45.

YU Y M. Dynamics and Simulation Analysis of Micro Displacement Mechanism Based on Piezoelectric Actuator[M]. Harbin:Harbin Institute of Technology Press, 2015:30-45. (in Chinese)

ROP I, HUBBEL P I. Nonlinear micro-dynamic behavior of a ball-screw driven precision slide system[J]. Precision Engineering, 1992, 14(4):229-236.

STEINMETZC R. Sub-micron position measurement and control on precision machine tools with laser interferometry[J]. Precision Engineering, 1990, 12(1):12-24.

TAKAFUJIK, NAKASHIMA K. Stiffness of a ball screw with consideration of deformation of the screw, nut and screw thread:preloaded double nut[J]. JSME International Journal, 1990, 33(4):620-626.

OTSUKAJ, ⅡDA N, KAWASE Y, et al.. Ultra-precision positioning using lead screw drive (3rd Report):nanometer accuracy positioning and settling time reduction[J]. Precision Engineering, 1993, 59(10):1655-1661.

李海林, 王寅, 黄卫清, 等.一种双足驱动压电直线电机[J].中国机械工程, 2014, 25(20):2719-2723.

LI H L, WANG Y, HUANG W Q, et al.. A double-foot driving linear piezoelectric motor[J]. China Mechanical Engineering, 2014, 25(20):2719-2723. (in Chinese)

苏钊, 黄卫清, 王寅, 等.三相驱动交替步进压电直线电机[J].中国电机工程学报, 2016, 36(9):2538-2544.

SU ZH, HUANG W Q, WANG Y, et al.. A three-phase driving alternate stepping piezoelectric linear motor[J]. Proceedings of the CSEE, 2016, 36(9):2538-2544. (in Chinese)

黄卫清, 孟益民.一种新型非共振压电直线电机的设计[J].中国机械工程, 2009, 20(14):1717-1721.

HUANG W Q, MENG Y M. Design of a new type of piezoelectric linear motor based on non-resonant vibration[J]. China Mechanical Engineering, 2009, 20(14):1717-1721. (in Chinese)

王寅, 潘松, 黄卫清, 等.三角位移转换式压电直线电机[J].光学精密工程, 2016, 24(8):1973-1979.

WANG Y, PAN S, HUANG W Q, et al.. Linear piezoelectric motor with triangular displacement transformer[J]. Opt. Precision Eng., 2016, 24(8):1973-1979. (in Chinese)

李艳林, 黄卫清.一种低频大行程直线型压电电机的研究[J].压电与声光, 2009, 31(4):507-509.

LI Y L, HUANG W Q. Research on a linear piezoelectric motor working in low frequency with unlimit travel range[J]. Piezoelectrics & Acoustooptics, 2009, 31(4):507-509. (in Chinese)

黄卫清, 陶杰, 孙梦馨, 等.非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验[J].光学精密工程, 2016, 24(11):2712-2720.

HUANG W Q, TAO J, SUN M X, et al.. Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor[J]. Opt. Precision Eng., 2016, 24(11):2712-2720. (in Chinese)

张建瓴, 陈万银, 可欣荣, 等.一种微位移放大机构的设计与仿真[J].机械设计, 2009, 26(12):9-12.

ZHANG J L, CHEN W Y, KE X R, et al.. Design and simulation of a kind of micro-displacement amplification mechanism[J]. Journal of Machine Design, 2009, 26(12):9-12. (in Chinese)

徐晶晶, 陈西府, 王寅, 等.基于复合放大机构的压电直线电机[J].压电与声光, 2013, 35(2):234-236, 249.

XU J J, CHEN X F, WANG Y, et al.. A piezoelectric linear motor based on combined amplification structure[J]. Piezoelectrics & Acoustooptics, 2013, 35(2):234-236, 249. (in Chinese)

于靖军, 毕树生, 宗光华.全柔性微位移放大机构的设计技术研究[J].航空学报, 2004, 25(1):74-78.

YU J J, BI SH SH, ZONG G H. Study on the design of fully compliant motion amplification mechanisms in actuation systems for micromanipulators[J]. Acta Aeronautica et Astronautica Sinica, 2004, 25(1):74-78. (in Chinese)

赵宏哲, 毕树生, 于靖军.三角形柔性铰链的建模与分析[J].机械工程学报, 2009, 45(8):1-5.

ZHAO H ZH, BI SH SH, YU J J. Modeling and analysis of triangle flexible hinge[J]. Journal of Mechanical Engineering, 2009, 45(8):1-5. (in Chinese)

卢倩, 黄卫清, 孙梦馨.基于柔度比优化设计杠杆式柔性铰链放大机构[J].光学精密工程, 2016, 24(1):102-111.

LU Q, HUANG W Q, SUN M X. Optimization design of amplification mechanism for level flexure hinge based on compliance ratio[J]. Opt. Precision Eng., 2016, 24(11):102-111. (in Chinese)

卢倩, 黄卫清, 王寅, 等.深切口椭圆柔性铰链优化设计[J].光学精密工程, 2015, 23(1):206-215.

LU Q, HUANU W Q, WAND Y, et al.. Optimization design of deep-notch elliptical flexure hinges[J]. Opt. Precision Eng., 2015, 23(1):206-215. (in Chinese)

左亚军. 基于正交试验法的注塑机合模机构的优化设计研究[D]. 广州: 广东工业大学, 2012.

ZUO Y J. Research on Optimal Design of Clamping Mechanism for an Injection Machine Using Orthogonal Design Method [D]. Guangzhou: Guangdong University of Technology, 2012. (in Chinese)

Views

263

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Novel sophisticated stepping linear piezoelectric actuator

Low stress laser welding technology for corrugated diaphragm of pressure sensor

Design of flexure micro-gripper precision-driven by piezoceramics

Large-thrust piezoelectric linear actuator under tension and pressure load

Small precision motion platform based on stick-slip driving principle

Related Author

YANG Zhi-gang

CHENG Guang-ming

ZENG Ping

ZHAO Hong-wei

LIU Guo-song

XU Jiahao

ZHU Minjie

LIU Shuai

Related Institution

College of Mechanical Science and Engineering, Jilin University, Changchun 130025,China

Nanchang University of Aeronautics

Instrumentation Technology and Economy Institute

School of Energy and Mechanical Engineering, Jiangxi University of Science and Technology

State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics & Astronautics

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰