Small precision motion platform based on stick-slip driving principle

Yun-lai SHI; Cheng-shu LOU; Jun ZHANG; Ding-ji CHENG

doi:10.3788/OPE.20182605.1124

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Small precision motion platform based on stick-slip driving principle

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Small precision motion platform based on stick-slip driving principle
- Optics and Precision Engineering Vol. 26, Issue 5, Pages: 1124-1132(2018)
- 作者机构：
  
  南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182605.1124
  CLC： TP242
- Received：23 November 2017，
  
  Accepted：02 January 2018，
  
  Published：25 May 2018
- 稿件说明：
移动端阅览
Yun-lai SHI, Cheng-shu LOU, Jun ZHANG, et al. Small precision motion platform based on stick-slip driving principle[J]. Optics and precision engineering, 2018, 26(5): 1124-1132.
DOI：

Yun-lai SHI, Cheng-shu LOU, Jun ZHANG, et al. Small precision motion platform based on stick-slip driving principle[J]. Optics and precision engineering, 2018, 26(5): 1124-1132. DOI： 10.3788/OPE.20182605.1124.

摘要

为满足微纳操作系统对精密驱动技术的需求，本文提出了一种基于黏滑原理的小型精密运动平台。该平台将柔性铰链、惯性质量块以及弹性元件结合为独立的定子基座，并与压电叠堆、陶瓷球固连为定子，安装在平台基座底部，通过螺钉调节弹性元件端部垂直方向的位置，就可以改变定子与移动台间的预压力，进而获得最佳的驱动力。为研究黏滑驱动的运动机理，分析各参数对平台运动的影响，进行了力学建模；而摩擦力作为黏滑驱动的关键因素，为了能准确地表达黏滑驱动的摩擦机理，在力学建模中引入了LuGre摩擦模型，并利用Matlab/Simulink软件进行了仿真分析。设计加工的黏滑驱动平台的整体尺寸为40 mm×40 mm×18 mm，质量为32 g。试验表明：该平台最小可实现10 nm的运动步长，速度最高可达2.5 mm/s，行程为22 mm。

Abstract

To realize precise actuation of micro/nano-manipulation systems

a type of nano-motion platform based on the stick-slip principle was designed. Flexure hinges

a mass block

and an elastic component were integrated as an independent stator base. The stator consisted of a stator base

a piezoelectric stack

and a ceramic ball installed in the base bottom. The vertical position of the end of the elastic component can be adjusted by rotating an adjustment screw to change the pre-pressure between the stator and moving platform. Thus

the optimal driving force can be obtained. Because of the motion mechanisms of stick-slip driving and the influence of various parameters on the platform motion

mechanical modeling was carried out. Friction force was of key significance for stick-slip driving. In order to accurately express the friction mechanism of stick-slip driving

the LuGre friction model was introduced into the mechanical modeling. The simulation analysis was performed using MATLAB/Simulink software. The overall size of the stick-slip driving platform is 40 mm×40 mm×18 mm

and its mass is 32 g. Experiments show that the platform can achieve a minimum step size of 10 nm

its highest speed is 2.5 mm/s

and its stroke is 22 mm.

关键词

Keywords

references

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Related Institution

State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics

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