Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation

Shuang WANG; Xiao LI; Zhi-bin WANG; Ning JING; You-hua CHEN; Yuan-yuan CHEN

doi:10.3788/OPE.20182606.1314

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Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation

Modern Applied Optics | 更新时间：2020-07-05

- Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation
- Optics and Precision Engineering Vol. 26, Issue 6, Pages: 1314-1321(2018)
- 作者机构：
  
  1.中北大学大数据学院, 山西太原 030051
  2.山西省光电信息与仪器工程技术研究中心, 山西太原 030051
  3.中北大学电气与控制工程学院, 山西太原 030051
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182606.1314
  CLC： O436.3;TH744.2
- Received：13 November 2017，
  
  Accepted：08 January 2018，
  
  Published：25 June 2018
- 稿件说明：
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Shuang WANG, Xiao LI, Zhi-bin WANG, et al. Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation[J]. Optics and precision engineering, 2018, 26(6): 1314-1321.
DOI：

Shuang WANG, Xiao LI, Zhi-bin WANG, et al. Digital phase-locked data processing for ellipsometric parameter measurements based on photoelastic modulation[J]. Optics and precision engineering, 2018, 26(6): 1314-1321. DOI： 10.3788/OPE.20182606.1314.

摘要

为了实现椭偏参量

和Δ的高速、高灵敏测量，建立了一种测量成本低、重复性好和便于工业化集成的椭偏测量方案。本文对弹光调制型椭偏参量测量系统进行了原理分析，针对弹光调制器的工作模式及调制光信号特点，设计了基于现场可编程门阵列的数字锁相数据处理方案。现场可编程门阵列提供弹光调制器工作的信号源，并控制AD采样；同时产生正弦和余弦参考序列，并完成直流项、一倍频项和二倍频项的同相分量和正交分量的提取，进而求解出椭偏参量。利用搭建的试验系统对SiO

薄膜厚度为3.753 nm的硅片样品进行了实验分析。实验结果表明，采样时间为20 ms时，椭偏参量

和Δ的平均值分别为9.622°和168.692°，标准偏差分别为0.005°和0.008°；采样时间设置为200 ms时，椭偏参量测量平均值与20 ms的非常接近，标准偏差减小，并且都在0.001°量级，揭示了本系统具有较高的灵敏度和较好的重复性。

Abstract

A system based on photoelastic modulation was analyzed in principle to realize high-speed

high-sensitivity measurements of ellipsometric parameters (

and Δ)

thereby establishing a low-cost ellipsometric measurement scheme characterized by good repeatability and easy integration. On the basis of the Photoelastic Modulator (PEM) working mode and characteristics of modulated optical signals

a digital phase-locked data-processing scheme

based on Field-programmable Gate Array (FPGA) was designed. FPGA provides a signal source to drive PEM and controls Analog to Digital (AD) sampling. Meanwhile

sine and cosine reference sequences were generated

and the DC term as well as in-phase and quadrature components of the first and second harmonics were extracted. Subsequently

values of ellipsometric parameters are solved. The proposed system was used to analyze an SiO

film sample measuring 3.753 nm thick placed on a silicon wafer. Experimental results yielded average values of the ellipsometric parameters

and Δ to be 9.622 and 168.692

respectively

with corresponding standard deviations of 0.005° and 0.008°

respectively. The sampling time is set to 20 ms. When the sampling time is increased to 200 ms

corresponding average values of ellipsometric parameters did not demonstrate much change from those observed in the 20 ms case; corresponding standard deviations were observed to be much smaller assuming values of the order of 0.001° for both parameters. These results confirmed high sensitivity and good repeatability of the proposed system.

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Keywords

references

RODENHAUSEN K B J, SCHMIDT D, KASPUTIS T, et al.. Generalized ellipsometry in-situ quantification of organic adsorbate attachment within slanted columnar thin films[J]. Optics Express, 2012, 20(5):5419.

BATTIE Y, BROCH L, NACIRI A E, et al.. Diameter dependence of the optoelectronic properties of single walled carbon nanotubes determined by ellipsometry[J]. Carbon, 2015, 83:32-39.

WEI P K, MOIRANGTHEM R S, CHANG Y C. Ellipsometry study on gold-nanoparticle-coated gold thin film for biosensing application[J]. Biomedical Optics Express, 2011, 2(9):2569-2576.

MAZIEWSKI A, PISTORA J, POSTAVA K, et al.. Null ellipsometer with phase modulation[J]. Optics Express, 2004, 12(24):6040-5.

李芳, 王杰, 王丹阳, 等.利用调制式椭偏仪测量薄膜电光系数[J].红外与毫米波学报, 2005(1):31-33.

LI F, WANG J, WANG D Y, et al.. Measurement of the electric-optic index of thin films by using modulated ellipsometry[J]. J. Infrared Millim. Waves, 2005(1):31-33.(in Chinese)

廖延彪.偏振光学[M].北京:科学出版社, 2003.

LIAO Y B. Polarization Optics[M]. Beijing:Science Press, 2003.(in Chinese)

TOMPKINS H, IRENE E A. Handbook of Ellipsometry[M]. William Andrew, 2005.

FUJIWARA H. Spectroscopic Ellipsometry:Principles and Applications[M]. John Wiley & Sons, 2007.

GARCIACAUREL E, DE M A, GASTON J P, et al.. Application of spectroscopic ellipsometry and Mueller ellipsometry to optical characterization[J]. Applied Spectroscopy, 2013, 67(1):1-21.

王志斌, 李克武, 张瑞, 等.基于铌酸锂制作光弹调制器用压电驱动器[J].光学精密工程, 2015, 23(1):63-69.

WANG ZH B, LI K W, ZHANG R, et al.. Fabrication of piezoelectric actuator for photoelastic modulator based on lithium niobate[J]. Opt. Precision Eng., 2015, 23(1):63-69(in Chinese)

李克武, 王黎明, 王志斌, 等.弹光和电光级联的组合相位调制型椭偏测量术[J].光学精密工程, 2016, 24(4):690-697.

LI K W, WANG L M, WANG ZH B, et al.. Phase-modulated ellipsometric technology combined photo-elastic modulation with electro-optic modulation[J]. Opt. Precision Eng., 2016, 24(4):1227-1232.(in Chinese)

王爽, 王志斌, 李晓, 等.弹光调制高灵敏测量晶体电光系数[J].光学学报, 2017, 37(3):327-332.

WANG SH, WANG ZH B, LI X, et al.. High sensitive measurement of the crystal electro-optic coefficient based on the photo-elastic modulation[J]. Acta Optica Sinica, 2017, 37(3):327-332.(in Chinese)

SATOZONO H. Elimination of artifacts derived from the residual birefringence of a phase modulator for circular dichroism by retardation domain analysis.[J]. Optics Letters, 2015, 40(7):1161.

李克武, 王志斌, 陈友华, 等.基于弹光调制的高灵敏度旋光测量[J].物理学报, 2015, 64(18):289-294.

LI K W, WANG ZH B, CHEN Y H, et al.. High sensitive measurement of optical rotation based on photo-elastic modualtion[J]. Acta Phys. Sin., 2015, 64(18):289-294.(in Chinese)

JELLISON G E, MODINE F A. Two-modulator generalized ellipsometry:experiment and calibration[J]. Applied Optics, 1997, 36(31):8184.

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