Electrochemical discharge cutting of glass microstructures with rotating electrodes

Yong LIU; Zhi-yuan WEI; Song-song LI

doi:10.3788/OPE.20182606.1407

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Electrochemical discharge cutting of glass microstructures with rotating electrodes

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-05

- Electrochemical discharge cutting of glass microstructures with rotating electrodes
- Optics and Precision Engineering Vol. 26, Issue 6, Pages: 1407-1414(2018)
- 作者机构：
  
  山东大学力学与机电装备联合工程技术研究中心, 山东威海 264209
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182606.1407
  CLC： TH703
- Received：16 October 2017，
  
  Accepted：14 December 2017，
  
  Published：25 June 2018
- 稿件说明：
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Yong LIU, Zhi-yuan WEI, Song-song LI. Electrochemical discharge cutting of glass microstructures with rotating electrodes[J]. Optics and precision engineering, 2018, 26(6): 1407-1414.
DOI：

Yong LIU, Zhi-yuan WEI, Song-song LI. Electrochemical discharge cutting of glass microstructures with rotating electrodes[J]. Optics and precision engineering, 2018, 26(6): 1407-1414. DOI： 10.3788/OPE.20182606.1407.

摘要

针对高深宽比非导电硬脆材料（如石英玻璃和陶瓷）微结构的加工需求，对微细电解电火花切割加工方法进行了深入研究。首先，提出了使用旋转螺旋微工具电极的电化学放电切割方法，并对切割缝宽模型进行了讨论；其次，对旋转螺旋电极电解电火花切割加工工艺进行了深入的试验研究，试验研究了加工电压、脉冲频率、占空比和主轴转速这些关键工艺参数对切割加工精度的影响。实验结果表明，缝宽随着施加电压和占空比的增加而增加，随着频率、主轴转速和进给速率的增加而减小。最后，通过优化后的参数成功加工出缝宽为135

m的微缝阵列、复杂的封闭微结构以及深宽比达6：1的微图形结构。由此表明该方法是一种可有效加工高深宽比绝缘硬脆材料微结构的新工艺。

Abstract

An in-depth study of the method of wire electrochemical discharge machining was carried out for fabricating microstructures on non-conductive brittle materials such as quartz glass and ceramics. First

the method of wire electrochemical discharge machining with a rotating spiral tool was proposed and the slit width model was established. Next

the experimental process was studied

and the influence of many key machining parameters such as the voltage

pulse frequency

duty ratio

and spindle speed on the machining accuracy was discussed in detail. The experimental results indicate that the slit width increases with an increase in the applied voltage and duty ratio and decreases with an increase in the frequency

spindle speed

and feed rate. A micro-slit array with a slit width of 135

m and complex closed microstructures and micrographic structures with an aspect ratio of 6:1 were successfully machined by optimizing the parameters for quartz glass. Therefore

this method may prove to be an effective new technology for machining high-aspect-ratio microstructures on non-conductive

hard

and brittle materials.

关键词

Keywords

references

ZHENG Z P, CHENG W H, HUANG F Y, et al.. 3D microstructuring of Pyrex glass using the electrochemical discharge machining process[J]. Journal of Micromechanics and Microengineering, 2007, 17(5):960.

张博, 韩雪峰, 齐蓉, 等.复合滑模控制在精密PMLSM激光切割运动平台的应用[J].光学精密工程, 2017, 25(1):84-92.

ZAHNG B, HAN X F, QI R, et al.. Application of composite sliding mode control on motion platform of PMLSM precision laser cutting[J]. Opt. Precision Eng., 2017, 25(1):84-92. (in Chinese)

沈剑云, 陈剑彬, 鲁浪, 等.径向超声振动辅助锯切光学玻璃[J].光学精密工程, 2016, 24(7):1615-1622.

SHEN J Y, CHEN J B, LU L, et al.. Sawing of optical Mass assisted with ultrasonic vibration[J]. Opt. Precision Eng., 2016, 24(7):1615-1622. (in Chinese)

刘永红, 王致良.非导电材料的电加工[J].电加工, 1994(5):2-7.

LIU Y H, WANG ZH L. Electromagnetic processing of nonconductive materials[J]. Electrical Processing, 1994(5):2-7. (in Chinese)

王建业, 罗干英.电解电火花复合加工的发展[J].电加工, 1997(5):15-19.

WANG J Y, LUO G Y. Development of electrochemical discharge machining[J]. Electrical Processing, 1997(5):15-19. (in Chinese)

郭永丰, 黄荣和.非导电材料的电化学电火花复合加工工艺研究[J].电加工, 1998(6):23-25.

GUO Y F, HUANG R H. Study on electrochemical discharge machining processing technology of non-conductive materials[J]. Electrical Processing, 1998(6):23-25. (in Chinese)

CAO X D, KIM B H, CHU C N. Micro-structuring of glass with features less than 100μm by electrochemical discharge machining[J]. Precis. Eng., 2009, 33(4):459-465.

HAN M S, MIN B K, LEE S J. Micro-electrochemical discharge cutting of glass using a surface-textured tool[J]. CIRP J. Manuf. Sci. Technol., 2011, 4(4):362-369.

KUO K Y, WU K L, YANG C K, et al.. Wire electrochemical discharge machining (WECDM) of quartz glass with titrated electrolyte flow[J]. Int. J. Mach. Tools Manuf., 2013, 72:50-57.

KUO K Y, WU K L, YANG C K, et al.. Effect of adding SiC powder on surface quality of quartz glass microkerf machined by WECDM[J]. Int. J. Adv. Manuf. Technol., 2015, 78(1-4):73-83.

BHUYAN B K, YADAVA V. Experimental modeling and multi-objective optimization of traveling wire electrochemical spark machining (TW-ECSM) process[J]. J. Mech. Sci. Technol., 2013, 27(8):2467-2476.

BHUYAN B K, YADAVA V. Experimental study of traveling wire electrochemical spark machining of borosilicate glass[J]. Mater. Manuf. Process, 2014, 29(3):298-304.

MALIK A, MANNA A. An experimental investigation on developed WECSM during micro slicing of e-glass fibre epoxy composite[J]. Int. J. Adv. Manuf. Technol., 2016, 85(9):2097-2106.

RATTAN N, MULIK R S. Improvement in material removal rate (MRR) using magnetic field in TW-ECSM process[J]. Mater. Manuf. Process, 2017, 32(1):101-107.

蒋毅, 李其, 孔令蕾, 等.电化学放电线切割加工方法实验研究[J].现代制造工程, 2015(11):88-92.

JIANG Y, LI Q, KONG L L, et al.. Experimental study on cutting method of wire electrochemical discharge[J]. Modern Manufacturing Engineering, 2015(11):88-92. (in Chinese)

李其, 蒋毅, 孔令蕾, 等.电化学放电线切割电压-电流特性研究[J].电加工与模具, 2015(6):15-19.

LI Q, JIANG Y, KONG L L, et al.. Study on voltage-current characteristics of WEDM[J]. Electric Processing and Mold, 2015(6):15-19. (in Chinese)

李其, 蒋毅, 赵万生, 等.基于润湿供液的电化学放电线切割实验研究[J].电加工与模具, 2016(3):16-19, 26.

LI Q, JIANG Y, ZHAO W SH, et al.. Experimental study on wire electrochemical discharge machining based on wetting liquid supply[J]. Electric Processing and Mold, 2016(3):16-19, 26. (in Chinese)

HUANG S F, LIU Y, LI J, et al.. Electrochemical discharge machining micro-hole in stainless steel with tool electrode high-speed rotating[J]. Mater. Manuf. Process, 2014, 29(5):634-637.

HAN M S, MIN B K, LEE S J. Geometric improvement of electrochemical discharge micro-drilling using an ultrasonic-vibrated electrolyte[J]. J Micromechanics Microengineering, 2009, 19(6):65004.

XIAO L F, PENG F Z, YONG B Z, et al.. Enhancement of performance of wire electrochemical micromachining using a rotary helical electrode[J]. J. Mater. Process Technol., 2016, 227:129-137.

JAIN V K, DIXIT P M, PANDEY P M. On the analysis of the electrochemical spark machining process[J]. Int. J. Mach. Tools Manuf., 1999, 39(1):165-186.

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