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Optimized design of a micro-motion stage with zero stiffness
Micro/Nano Technology and Fine Mechanics | 更新时间:2020-07-05
    • Optimized design of a micro-motion stage with zero stiffness

    • Optics and Precision Engineering   Vol. 26, Issue 6, Pages: 1430-1440(2018)
    • DOI:10.3788/OPE.20182606.1430    

      CLC: TH703;TP274
    • Received:10 October 2017

      Accepted:14 November 2017

      Published:25 June 2018

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  • Jun-feng HU, Xing-xing CHEN. Optimized design of a micro-motion stage with zero stiffness[J]. Optics and precision engineering, 2018, 26(6): 1430-1440. DOI: 10.3788/OPE.20182606.1430.

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