High-precision straightness interferometer for linear moving stage

Tao JIN; Jing-lin LIU; Wei YANG; Yan-fen LE; Wen-mei HOU

doi:10.3788/OPE.20182607.1570

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High-precision straightness interferometer for linear moving stage

Modern Applied Optics | 更新时间：2020-08-13

- High-precision straightness interferometer for linear moving stage
- Optics and Precision Engineering Vol. 26, Issue 7, Pages: 1570-1577(2018)
- 作者机构：
  
  1.上海理工大学光电信息与计算机工程学院, 上海 200093
  2.普爱纳米位移技术(上海)有限公司, 上海 201203
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182607.1570
  CLC： TN247;TH744.3
- Received：06 March 2018，
  
  Accepted：02 April 2018，
  
  Published：25 July 2018
- 稿件说明：
移动端阅览
Tao JIN, Jing-lin LIU, Wei YANG, et al. High-precision straightness interferometer for linear moving stage[J]. Optics and precision engineering, 2018, 26(7): 1570-1577.
DOI：

Tao JIN, Jing-lin LIU, Wei YANG, et al. High-precision straightness interferometer for linear moving stage[J]. Optics and precision engineering, 2018, 26(7): 1570-1577. DOI： 10.3788/OPE.20182607.1570.

摘要

直线度测量中往往存在有限的测量范围、精度低和阿贝误差等问题。本文提出了一种高精密直线度外差干涉测量装置，该装置由Koester棱镜、角锥棱镜、1/4波片、楔面棱镜和楔面反射镜构成。楔面棱镜为直线度传感元件，角隅棱镜和楔面反射镜是测量信号的回光元件。双频激光信号进入直线度干涉仪后组成几何空间对称四光路测量信号。四路测量光走过几乎完全相同的路径有效地提高了干涉仪的稳定性，并且使空程误差最小化。使用楔角为1°的楔角棱镜和2π/512细分的相位计，直线度测量分辨力为17.71 nm。该方法不需要与行程同长的大反射参考镜，但同样能实现高分辨率，理论和实验证明空间对称测量结构避免了由俯仰，偏转和滚转角引起的阿贝误差的串扰，而且光学元件少，结构简单，方便易用，结果可以直接溯源到米的定义。

Abstract

An interferometer is proposed for high precision straightness measurement. This instrument consists of a Koester prism

corner cube

quarter-wave plate

wedge prism

and wedge reflector. The wedge prism acts as the straightness sensor while the corner cube and wedge reflector are used to reflect the measurement signal. During operation

the two frequency interferometer signal is decomposed into four beams with a spacially symmetrical measurement structure. The beams have common paths

which result in an improved stability of the interferometer and the minimization of dead path. A measurement resolution of 17.71 nm was determined with a phasemeter which has a resolution of 2π/512 and a wedge prism with one wedge angle. The setup does not require a mirror

which typically has a size that is comparable to that of the stroke of a linear moving stage. However

it can be used to measure straightness with very high resolution. The theoretical and experimental results demonstrate that the crosstalk of the Abbe error caused by pitch

yaw

and roll angle is avoided due to the spacially symmetrical measurement structure. The proposed interferometer has several advantages such as fewer optical components

a simple structure

ease of use

and repeatability of measurement results.

关键词

Keywords

references

CHEN B, XU B, YAN L, et al .. Laser straightness interferometer system with rotational error compensation and simultaneous measurement of six degrees of freedom error parameters[J]. Optics Express , 2015, 23(7):9052-9073.

崔存星. 直线导轨激光六自由度几何运动误差同时测量方法与系统的研究[D]. 北京: 北京交通大学, 2016.

CUI C X. Study on Simultaneous Measurement Method and System of Geometric Motion Error of Six Degrees of Freedom of Linear Guide Laser [D]. Beijing: Beijing Jiaotong University, 2016. (in Chinese)

由凤玲, 冯其波, 张斌.基于共路光线漂移补偿的直线度测量[J].光学精密工程, 2011, 19(3):515-519.

YOU F L, FENG Q B, ZHANG B. Measurement of straightness based on compensation for common path ray drift[J]. Opt. Precision Eng ., 2011, 19(3):515-519. (in Chinese)

RO S K, PARK J K, KIM B S, et al . . Actively compensated stage having 5-DOF motion error compensation and motion error compensating method: WO/2012/165872[P]. 2012.

徐斌. 激光外差干涉直线度测量的阿贝误差分析及补偿研究[D]. 杭州: 浙江理工大学, 2015.

XU B. Abbe Error Analysis and Compensation Study of Laser Heterodyne Interferometric Straightness Measurement [D]. Hangzhou: Zhejiang Sci -Tech University, 2015. (in Chinese)

张贤根, 赵海伦, 庄卫星.基于高精度设备制造的导轨直线度研究[J].科技展望, 2015(27):127-128.

ZHANG X G, ZHAO H L, ZHUANG W X. Based on high precision equipment made of guide straightness research[J]. Technology Outlook , 2015(27):127-128. (in Chinese)

闵永智, 党建武, 张振海.图像式无砟轨道表面沉降在线监测系统[J].光学精密工程, 2013, 21(6):1621-1627.

MIN Y ZH, DANG J W, ZHANG ZH H. Image based ballastless track surface settlement online monitoring system[J]. Opt. Precision Eng ., 2013, 21(6):1621-1627. (in Chinese)

FENG Q, ZHANG B, KUANG C. A straightness measurement system using a single-mode fiber-coupled laser module[J]. Optics & Laser Technology , 2004, 36(4):279-283.

匡萃方, 冯其波, 陈士谦, 等.基于激光准直直线度测量方法的研究[J].光学技术, 2003, 29(6):699-701.

KUANG C F, FENG Q B, CHEN SH Q, et al .. Study on straightness measurement method based on laser collimation[J]. Optical Technique , 2003, 29(6):699-701. (in Chinese)

陈洪芳, 钟志, 丁雪梅.激光外差干涉的非线性误差补偿[J].光学精密工程, 2010, 18(5):1043-1047.

CHEN H F, ZHONG ZH, DING X M. Nonlinear error compensation of laser heterodyne interference[J]. Opt. Precision Eng ., 2010, 18(5):1043-1047. (in Chinese)

陈科位, 于宏柱, 张善文, 等.大型衍射光栅刻划机刀架系统的设计[J].光学精密工程, 2013, 21(11):2900-2905.

CHEN K W, YU H ZH, ZHANG SH W, et al .. Design of large diffraction grating machine tool system[J]. Opt. Precision Eng ., 2013, 21(11):2900-2905. (in Chinese)

HRABINA J, ŠARBORT M, ACEF O, et al . . Optical frequency references for laser interferometry[C]. Optics and Measurement Conference , 2015: 94420F-94420F-6.

夏豪杰, 胡梦雯, 张欣.单频激光干涉仪正交信号的高精度处理[J].光学精密工程, 2017, 25(9):2309-2316.

XIA H J, HU M W, ZHANG X. High precision processing of quadrature signal of single frequency laser interferometer.[J]. Opt. Precision Eng ., 2017, 25(9):2309-2316. (in Chinese)

RZEPKA J, BUDZYN G, FRACZEK W, et al .. Zeeman laser for straightness measurements[J]. SPIE , 2005, 5856:625-629.

LIN S T. A laser interferometer for measuring straightness[J]. Optics & Laser Technology , 2001, 33(33):195-199.

SHYH-TSONG L, SHENG-LIH Y, CHI-SHANG C, et al .. A calibrator based on the use of low-coherent light source straightness interferometer and compensation method[J]. Optics Express , 2011, 19(22):21929-37.

SOMMARGREN G E, YOUNG P S. Straightness of travel interferometer: U. S. patent 4787747[P]. 1988.

于毅. Zygo干涉仪及其应用的研究[D]. 天津: 天津大学, 2005.

YU Y. Zygo Interferometer and Its Application Research [D]. Tianjin: Tianjin University, 2005. (in Chinese)

钟朝阳, 句爱松, 乐燕芬, 等.一种新型差分平面镜干涉仪[J].光学学报, 2014, 34(11):171-175.

ZHONG ZH Y, JU A S, LE Y F, et al .. A new type of differential plane mirror interferometer[J]. Acta Optica Sinica , 2014, 34(11):171-175. (in Chinese)

乐燕芬, 句爱松.外差激光干涉仪非线性误差分析及测量[J].激光与光电子学进展, 2016(5):203-212.

LE Y F, JU A S. Nonlinear error analysis and measurement of heterodyne laser interferometer[J]. Progress in Laser and Optoelectronics , 2016(5):203-212. (in Chinese)

侯文玫, 钟朝阳, 乐燕芬, 等.高精密滚转角测量干涉仪[J].机械工程学报, 2014, 50(22):22-27.

HOU W M, ZHONG ZH Y, LE Y F, et al .. High precision roll angle measurement interferometer[J]. Journal of Mechanical Engineering , 2014, 50(22):22-27. (in Chinese)

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