Tunable grating for stress measurement

Jiang-tao YANG; Jun TANG; Yu-bo WANG; Hao GUO

doi:10.3788/OPE.20182607.1596

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Tunable grating for stress measurement

Modern Applied Optics | 更新时间：2020-08-13

- Tunable grating for stress measurement
- Optics and Precision Engineering Vol. 26, Issue 7, Pages: 1596-1603(2018)
- 作者机构：
  
  中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室, 山西太原 030051
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182607.1596
  CLC： TH74;O433.1
- Received：22 December 2017，
  
  Accepted：10 February 2018，
  
  Published：25 July 2018
- 稿件说明：
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Jiang-tao YANG, Jun TANG, Yu-bo WANG, et al. Tunable grating for stress measurement[J]. Optics and precision engineering, 2018, 26(7): 1596-1603.
DOI：

Jiang-tao YANG, Jun TANG, Yu-bo WANG, et al. Tunable grating for stress measurement[J]. Optics and precision engineering, 2018, 26(7): 1596-1603. DOI： 10.3788/OPE.20182607.1596.

摘要

为了更简单地制备出可用于应力测量的光栅褶皱结构，采用基于刚性薄膜/柔性衬底的自组装工艺制备了可调谐光栅。首先在聚乙烯对苯二酸脂（PET）薄膜上旋涂一层聚二甲基硅氧烷（PDMS）薄膜，将双层薄膜弯曲并用氧气等离子体处理，在其表面生成一层刚性氧化层，借助柔性PET对刚性层施加均匀应力，当应力超过临界值时，在PDMS基底上自组装形成光栅褶皱结构。然后根据光栅分光原理，将这种可调谐的光栅结构应用于应力测试。实验结果表明：当光栅的曲率半径为1.4 mm时，制备的可调谐光栅褶皱在0%~10%的应变范围得到的波长变化为452~507 nm；当光栅的曲率半径为5.6 mm时，制备的可调谐光栅褶皱在0%~15%的应变范围得到的波长变化为498~572 nm。本文提出的可调谐光栅制备方法是一种成本低、工艺简单、可批量化生产的工艺方法，也是一种制备变间距光栅的潜在方法，未来有望应用于光谱仪、光通讯等领域。

Abstract

In order to prepare well-ordered micron and submicron grating fold structures for simpler stress measurement

tunable grating was prepared by a self-assembly process based on a rigid film/flexible substrate. A polydimethylsiloxane (PDMS) substrate was prepared on polyethylene (PET) by the spin-coating method; then

the curved PDMS-PET substrates were processed in oxygen plasma. After appropriate surface treatment time in plasma

the curved substrates were flattened

and well-ordered wrinkling shape gratings were obtained due to mechanical buckling instability. Then

according to the principle of grating spectral

proper stress measurement can be achieved when a tunable grating structure was used for stress testing. The experimental results show that:When the curvature radius of the grating is 1.4 mm

the wavelength of the tunable grating folds prepared from 0 to 10% of the strain ranges from 452 to 507 nm; when the radius of curvature of the grating is 5.6 mm

the wavelength of the tunable grating folds prepared from 0 to 15% of the strain ranges from 498 to 572 nm. The proposed method of tunable grating fabrication is a low cost

simple process and enables mass production technology. It is a potential method to prepare variable spacing grating. Its expected applications in future include spectrometry

optical communication

and other related fields.

关键词

Keywords

references

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