Design of micro-displacement measurement system for large aperture adaptive mirror

Heng ZUO; Zhi-min LIU

doi:10.3788/OPE.20182607.1612

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Design of micro-displacement measurement system for large aperture adaptive mirror

Modern Applied Optics | 更新时间：2020-08-13

- Design of micro-displacement measurement system for large aperture adaptive mirror
- Optics and Precision Engineering Vol. 26, Issue 7, Pages: 1612-1620(2018)
- 作者机构：
  
  1.中国科学院国家天文台南京天文光学技术研究所, 江苏南京 210042
  2.中国科学院天文光学技术重点实验室, 江苏南京 210042
  3.中国科学院大学, 北京 100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182607.1612
  CLC： TH743;TP212
- Received：15 December 2017，
  
  Accepted：10 February 2018，
  
  Published：25 July 2018
- 稿件说明：
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Heng ZUO, Zhi-min LIU. Design of micro-displacement measurement system for large aperture adaptive mirror[J]. Optics and precision engineering, 2018, 26(7): 1612-1620.
DOI：

Heng ZUO, Zhi-min LIU. Design of micro-displacement measurement system for large aperture adaptive mirror[J]. Optics and precision engineering, 2018, 26(7): 1612-1620. DOI： 10.3788/OPE.20182607.1612.

摘要

针对大口径自适应副镜镜面变形量小、变化频率高、微变形难以精确测量的难题，设计一种基于电容检测芯片Pcap01-AD和STM32F103的镜面变形检测系统。首先，根据音圈电机驱动的变形镜的特点提出基于电容位移传感的变形镜微变形测量方案。然后，进行该测量系统的硬件和软件设计，其中硬件部分由电容检测芯片Pcap01接口电路、单片机STM31F103最小系统和供电部分构成，软件部分包括实现电容数字信号采集的C程序设计、Pcap01-AD与单片机的通讯程序和数据处理程序。最后，设计实验平台进行多次试验。试验测试结果表明，在变形镜±50

m的位移区间内，测量灵敏度为200 pF/3

m，10 nm的位移量对应的电容变化为0.067 pF。该系统测量精度高、误差小、检测效率高，能够用于自适应镜面的变形检测，同时也适用于其他微小位移的检测。

Abstract

A mirror deformation detection system based on STM32 and using the capacitance detection chip Pcap01-AD was designed to solve the problems of small deformation

high change frequency

and difficulty of accurately measuring the microdeformation that were associated with a large aperture adaptive sub-mirror. First

according to the characteristics of the deformable mirror

which was driven by the voice coil motor

a system scheme for measuring the microdeformation of the mirror using the capacitance displacement sensor was proposed. Then

the hardware and software are designed for the measurement system. The hardware was constructed with the microcapacitance detection chip Pcap01

STM32F103 microcontroller (MCU) system

and power supply circuit. The software part included programming the lower computer in C language to realize digital signal acquisition of the capacitance

communication between the Pcap01-AD and MCU

data conversion of the upper computer and data processing

real-time display

and data storage. According to the structural characteristics of the large aperture telescope sub-mirror system

the experimental platform was designed to enable the conduction of several tests. The test results show that in the range of 50

the measurement sensitivity is 200 pF/3

and the system has high accuracy

small error

and high detection efficiency. Thus

this system can be used in adaptive mirror surface deformation detection and other small-displacement measurements.

关键词

Keywords

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