Electrochemical discharge machining of glass micro-holes with high-quality

Yong LIU; Zhi-yuan WEI; Shi-hui DENG; Song-song LI

doi:10.3788/OPE.20182607.1653

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Electrochemical discharge machining of glass micro-holes with high-quality

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Electrochemical discharge machining of glass micro-holes with high-quality
- Optics and Precision Engineering Vol. 26, Issue 7, Pages: 1653-1660(2018)
- 作者机构：
  
  山东大学力学与机电装备联合工程技术研究中心, 山东威海 264209
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182607.1653
  CLC： V261.5;TG661
- Received：23 November 2017，
  
  Accepted：20 January 2018，
  
  Published：25 July 2018
- 稿件说明：
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Yong LIU, Zhi-yuan WEI, Shi-hui DENG, et al. Electrochemical discharge machining of glass micro-holes with high-quality[J]. Optics and precision engineering, 2018, 26(7): 1653-1660.
DOI：

Yong LIU, Zhi-yuan WEI, Shi-hui DENG, et al. Electrochemical discharge machining of glass micro-holes with high-quality[J]. Optics and precision engineering, 2018, 26(7): 1653-1660. DOI： 10.3788/OPE.20182607.1653.

摘要

超白玻璃是一种超透明低铁玻璃，因其具有优越的物理、光学性能，而广泛应用于精密电子、高档汽车及太阳能光伏发电领域。由于其本身的硬脆特性，玻璃微孔的出口极易破损，为提高玻璃微孔的加工定域性，降低微孔出口破损的可能性，对微细电化学放电钻削加工工艺进行了研究与优化。首先，根据电化学放电原理，探讨了气膜的形成和材料去除机理，分析了放电能量对玻璃微孔加工工艺的影响，建立了单位时间电化学放电加工能量控制模型；其次，试验分析了电压幅值、占空比、脉冲频率、进给速度等主要参数对微孔入口直径和出口质量的影响；最后，通过优化后的加工参数在厚度为300

m的超白玻璃试件上，成功加工得到入口直径为172

m、出口直径为167

m的3×3微孔阵列结构，出口无破损现象。实验结果表明，基于脉冲能量控制的微细电化学放电钻削工艺在玻璃微孔加工方面很有潜力。

Abstract

Ultra-white glass is a kind of transparent low-iron glass. Owing to its excellent physical and optical properties

it is widely used in many fields such as precision electronics

luxury automobiles

and solar photovoltaic power generation. Because of its hard and brittle characteristics

the outlets of glass micro-holes are easily damaged. In order to improve the machining localization of glass micro-holes and reduce the possibility of micro-hole outlet damage

the micro electrochemical discharge drilling process was studied and optimized. Firstly

according to the principle of electrochemical discharge

the film forming mechanism and the material removal mechanism were discussed

the influence of discharge energy on the micro-holes machining technology of glass was analyzed

and an energy control model of electrochemical discharge was established. Secondly

according to the experiment

the influence of pulse voltage

frequency

and feed rate on the inlet diameter and outlet quality of the micro-holes was analyzed. Finally

the optimized parameters were chosen to fabricate a 3×3 high quality glass micro holes array with an inlet diameter of 172

m and an outlet diameter of 167

m on an ultra-white glass workpiece with a thickness of 300

m; the outlets exhibited no signs of damage. The experimental results show that under the control of the discharge energy

micro electrochemical discharge drilling technology has great potential in glass micro-hole machining.

关键词

Keywords

references

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