Design and process of ultra-precision drum roll lathe

Zheng QIAO; Yu-tao LIU; Yan-gong WU; Peng ZHANG

doi:10.3788/OPE.20182607.1661

您当前的位置：

首页 >

文章列表页 >

Design and process of ultra-precision drum roll lathe

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Design and process of ultra-precision drum roll lathe
- Optics and Precision Engineering Vol. 26, Issue 7, Pages: 1661-1671(2018)
- 作者机构：
  
  哈尔滨工业大学机电工程学院, 黑龙江哈尔滨 150001
- 作者简介：
  
  ZHANG Peng, E-mail:zp@hit.edu.cn
- 基金信息：
- DOI：10.3788/OPE.20182607.1661
  CLC： TG502
- Received：18 January 2018，
  
  Accepted：10 February 2018，
  
  Published：25 July 2018
- 稿件说明：
移动端阅览
Zheng QIAO, Yu-tao LIU, Yan-gong WU, et al. Design and process of ultra-precision drum roll lathe[J]. Optics and precision engineering, 2018, 26(7): 1661-1671.
DOI：

Zheng QIAO, Yu-tao LIU, Yan-gong WU, et al. Design and process of ultra-precision drum roll lathe[J]. Optics and precision engineering, 2018, 26(7): 1661-1671. DOI： 10.3788/OPE.20182607.1661.

摘要

为了提高国内大尺寸光学微结构薄膜的光学级模具制造水平，打破国外在辊筒模具超精密加工装备的垄断，完成了国内首台套大尺寸光学微结构辊筒模具超精密机床的设计、集成以及典型微结构工艺的研究工作。首先，根据辊筒模具表面微结构加工工艺的特点，分析了辊筒模具超精密机床的关键技术并完成了机床结构与运动控制系统设计。在机床系统集成后，完成了运动控制系统的调试。直线轴执行阶梯运动完成了直线轴运动分辨率的测试。其次，通过准直仪和激光干涉仪完成了机床关键轴系的直线度及定位精度的测试和补偿。最后，采用多步切削法切削实验，以降低毛刺高度为目标，完成了V槽阵列的加工工艺参数优化。经测试，该超精密加工机床的直线运动分辨可达到5 nm，直线轴的双向定位精度均优于1

m/1 100 mm；采用多步切削法加工V槽阵列，最后一次切削深度建议在1~2

m，可以获得合格的V槽阵列。

Abstract

In order to improve the domestic roll-to-roll manufacturing level of optical microstructure films and change the fact that the manufacture of nearly all ultra-precision roll machining equipment is monopolized by foreign companies

the first domestic ultra-precision roll lathe is designed and integrated successfully with process experiments for typical microstructures. First

according to the characteristics of optical microstructures for roller mold processing

the key technologies of machine tools were analyzed. From this analysis

the machine's structure and motion control system are designed. After integration of the machine tool system

debugging of the motion control system and linear axis motion resolution tests are carried out. Second

the straightness and positioning accuracy of each axis are measured and compensated using a collimator and laser interferometer. Finally

parameter optimization tests for reducing the burr height when manufacturing V-groove arrays are performed through a cutting experiment by using a multi-step cutting method. Experimental results indicate that the linear motion resolution of the ultra-precision machining lathe can reach 5 nm

full-stroke bi-directional positioning accuracy of the linear axis is better than 1

and the V-groove micro-structure array processed with a final cutting depth of 1-2

m has excellent surface quality.

关键词

Keywords

references

孟繁斐, 步敬.集成成像系统中高填充率微透镜阵列的设计与加工[J].光学精密工程, 2017, 25(8):2130-2138.

MENG F F, BU J. Design and fabrication for micro-lens array with high fill factor in integral imaging system[J]. Opt. Precision Eng ., 2017, 25(8):2130-2138. (in Chinese)

董晓彬, 周天丰, 庞思勤, 等.玻璃模压成形用微沟槽磷化镍模具的超精密切削加工[J].光学精密工程, 2017, 25(12):2986-2993.

DONG X B, ZHOU T F, PANG S Q, et al. . Ultraprecision microgroove machining of nickel phosphorous plating mold for glass molding[J]. Opt. Precision Eng ., 2017, 25(12):2986-2993. (in Chinese)

WANG Y J, OUYANG S H, CHAO W C, et al .. High directional backlight using an integrated light guide plate[J]. Optics Express , 2015, 23(2):1567-1575.

LANGUY F, HABRAKEN S. Performance comparison of four kinds of flat nonimaging Fresnel lenses made of polycarbonates and polymethyl methacrylate for concentrated photovoltaics[J]. Optics Letters , 2011, 36(14):2743-2745.

KUMAR V, SHRIVASTAVA R L, UNTAWALE S P. Fresnel lens:A promising alternative of reflectors in concentrated solar power[J]. Renewable and Sustainable Energy Reviews , 2015, 44:376-390.

AHN S, CHOI M, BAE H, et al .. Design and fabrication of micro optical film by ultraviolet roll imprinting[J]. Japanese Journal of Applied Physics , 2007, 46(8S):5478.

CHANG C Y, TSAI M H. Development of a continuous roll-to-roll processing system for mass production of plastic optical film[J]. Journal of Micromechanics and Microengineering , 2015, 25(12):125014.

JASINEVICIUS R, DUDUCH J, CIRINO G, et al .. Diamond turning of small Fresnel lens array in single crystal InSb[J] . Journal of Micromechanics and Microengineering , 2013, 23(5):055025.

LI L. Fabrication of diffractive optics by use of slow tool servo diamond turning process[J]. Optical Engineering , 2006, 45(11):113401.

WANG M W, TSENG C C. Analysis and fabrication of a prism film with roll-to-roll fabrication process[J]. Optics Express , 2009, 17(6):4718-4725.

OH J S, SONG C K, HWANG J, et al .. An ultra-precision lathe for large-area micro-structured roll molds[J]. Journal of the Korean Society for Precision Engineering , 2013, 30(12):1303-1312.

Nanotech HDL2000/HDL2000-HD Specification Overview[R]. Swanzey: Moore Nanotechnology Systems, 2010.

DENKENA B, DE LEON L, KÄSTNER J. Burr Formation in Microstructuring Processes [M].Heidelberg:Springer Berlin, 2010:55-62.

陈玉龙. 飞刀切削加工中毛刺的形成过程仿真与实验研究[D]. 哈尔滨: 哈尔滨工业大学, 2014: 11-27. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=D593018

CHEN Y L. Modeling and Experimental Study on Burr Formation Process in Fly-cutting [D]. Harbin: Harbin Institute of Technology, 2014: 11-27. (in Chinese)

Views

438

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Formation mechanism of Poisson's burr in micro-grooved diamond cutting of nickel-phosphorus alloy

Design of optical film for ultra-thin MiniLED backlight modules

Design of micro-structure film for improving viewing brightness of vehicle head-up display

Design of optical brightness enhancement film for direct-lit backlight in automobile head-up display

Investigation on microstructures and interfaces of NiC/Ti neutron multilayers

Related Author

WANG Sujuan

SUN Zhanwen

YU Liangbao

LI Xiaopeng

Guo-qiang LÜ

Biao ZHU

Ling YANG

Hui-li XIAO

Related Institution

State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment， Guangdong University of Technology

AVIC Hua Dong Photoelectric Co. Ltd.

School of Instrumentation and Opto-Electronics Engineering，Hefei University of Technology

School of Electronic Science &Applied Physics， Hefei University of Technology

Special Display and Imaging Technology Innovation Center of Anhui Province National Engineering Laboratory of Special Display Technology， Academy of Photoelectric Technology， Hefei University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰