Tolerance assurance of interferometer for optical HCB process

Dong YAO; Yu-peng LI; Ya ZHAO; Zhi WANG; Wei SHA; Yong-xian WANG

doi:10.3788/OPE.20182608.1945

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Tolerance assurance of interferometer for optical HCB process

Modern Applied Optics | 更新时间：2020-08-13

- Tolerance assurance of interferometer for optical HCB process
- Optics and Precision Engineering Vol. 26, Issue 8, Pages: 1945-1953(2018)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.中国科学院大学研究生院, 北京 100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182608.1945
  CLC： TP394.1;TH691.9
- Received：18 June 2018，
  
  Accepted：23 July 2018，
  
  Published：25 August 2018
- 稿件说明：
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Dong YAO, Yu-peng LI, Ya ZHAO, et al. Tolerance assurance of interferometer for optical HCB process[J]. Optics and precision engineering, 2018, 26(8): 1945-1953.
DOI：

Dong YAO, Yu-peng LI, Ya ZHAO, et al. Tolerance assurance of interferometer for optical HCB process[J]. Optics and precision engineering, 2018, 26(8): 1945-1953. DOI： 10.3788/OPE.20182608.1945.

摘要

空间干涉测量系统是空间引力波探测的重要组成部分。本文介绍了一种全玻璃材料的差频激光干涉仪的组成结构和工作原理，对差频干涉仪中双相干光束的匹配对准难题，介绍了一种适用于光黏装配工艺的角度公差和位置公差保证方法。这种方法采用了监测系统和微量调整机构相结合的方式，首先，监控系统可以实现光线相对位置的实时测量，给出被调整光线的调整方向和调整量；然后，微量调整机构可以在平面移动和轴向转动3个自由度上，对目标器件实现微米量级的微量调整；监控过程和调整过程反复迭代，可实现对光学元器件的高精度位置控制和角度控制。实验结果表明，在调整方向上角度公差优于80

rad，位置公差优于85

m。本方案基本满足差频激光干涉仪的装配精度需求，为后续更高精度的装配奠定基础。

Abstract

Space interference measurement system is an important part of gravitational wave detection in space. This paper introduces the composition and working principle of a differential frequency interferometer made of only glass. To address the problem of matching and aligning double coherent beams in differential frequency interferometers

we introduce a method that can guarantee the angular and position tolerance of double frequency laser interferometers; this method is suitable for the hydroxide catalysis bonding assembly process. In the proposed method

an observation system is combined with a microadjustment mechanism. First

the monitoring system measures the relative position of light rays in real time. Next

the microadjustment mechanism adjusts the target device to micron-order resolution along three degrees of freedom

including two-dimensional planar movement and one-dimensional axial rotation. The monitoring and adjustment processes are iterated to achieve high-precision position and angular control of the optical components. Manual adjustments can ensure an angular tolerance and a position tolerance greater than 80

rad and 85

respectively. This scheme can meet the accuracy requirements of differential frequency laser interferometers and lay the foundation for achieving higher accuracy in the future.

关键词

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references

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