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On force and deformation of cantilever Y adjustment mechanism of target alignment sensor
Micro/Nano Technology and Fine Mechanics | 更新时间:2020-08-13
    • On force and deformation of cantilever Y adjustment mechanism of target alignment sensor

    • Optics and Precision Engineering   Vol. 26, Issue 8, Pages: 2030-2038(2018)
    • DOI:10.3788/OPE.20182608.2030    

      CLC: TH703;TH115
    • Received:23 November 2017

      Accepted:12 January 2018

      Published:25 August 2018

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  • Ya-nan ZHANG, Ling-ling JING, Han-yu ZHU, et al. On force and deformation of cantilever Y adjustment mechanism of target alignment sensor[J]. Optics and precision engineering, 2018, 26(8): 2030-2038. DOI: 10.3788/OPE.20182608.2030.

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