Film structureenergy conversion components for MEMS initiators

Wei REN; Yu-long ZHAO; En-yi CHU; Bin ZHANG; Hui LI

doi:10.3788/OPE.20182609.2319

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Film structureenergy conversion components for MEMS initiators

更新时间：2020-08-13

- Film structureenergy conversion components for MEMS initiators
- Optics and Precision Engineering Vol. 26, Issue 9, Pages: 2319-2325(2018)
- 作者机构：
  
  1.西安交通大学机械制造系统工程国家重点实验室, 陕西西安 710054
  2.陕西应用物理化学研究所应用物理化学国家级重点实验室, 陕西西安 710061
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182609.2319
  CLC： TB853.29
- Received：10 January 2018，
  
  Accepted：10 February 2018，
  
  Published：25 September 2018
- 稿件说明：
移动端阅览
Wei REN, Yu-long ZHAO, En-yi CHU, et al. Film structureenergy conversion components for MEMS initiators[J]. Optics and precision engineering, 2018, 26(9): 2319-2325.
DOI：

Wei REN, Yu-long ZHAO, En-yi CHU, et al. Film structureenergy conversion components for MEMS initiators[J]. Optics and precision engineering, 2018, 26(9): 2319-2325. DOI： 10.3788/OPE.20182609.2319.

摘要

为了满足MEMS火工品的小型化、集成化和低能发火等要求，本文基于MEMS技术，设计了一种平面"蛇"形结构的薄膜换能元，采用磁控溅射等MEMS薄膜制作技术，完成了不同薄膜桥区电阻和基底材料薄膜换能元样品的制备，采用扫描电镜（SEM）、原子力显微镜（AFM），低电阻测试仪、红外热像仪等设备，完成了不同换能元样品结构（薄膜桥区线宽、长度及厚度等）及性能（电阻、电热响应等）参数的测试与表征。通过分析研究，获得了薄膜桥区电阻材料、基底材料、薄膜厚度以及桥区结构形状对换能元性能的影响规律，优选确定以金属Pt和7740玻璃作为换能元电阻及基底材料，发火性能达5 V/33

F，满足MEMS火工品的低能化要求。

Abstract

In order to meet the requirements of miniaturization

integration

and low energy of MEMS initiators

based on MEMS technology

a planar film structure energy conversion component with a "snake-shape" was designed. Using magnetic sputtering and other MEMS production technologies

we prepared energy conversion components with different resistive and base materials. Then

using scanning electron microscopy (SEM)

atomic force microscopy (AFM)

a low resistance tester

an infrared thermal imager

and other equipment

we obtained the characterization parameters and the performance of different element samples (such as the width

length

and thickness of the film bridge area and the resistance

electro-thermal response

etc.). Through analysis and study

the influences of the resistive material

base material

thickness of the film

and bridge shape with the performance of the energy conversion component were obtained; metal Pt and 7740 glass was preferred

which ignite at 5 V/33

and meet the low-energy requirements of MEMS initiators.

关键词

Keywords

references

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Related Institution

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