Water-jet assisted laser precision processing of Si<sub>3</sub>N<sub>4</sub> ceramics

Yan-sheng YAO; Qing-bo CHEN; Jun WANG; Xue-hui CHEN; Gen-fu YUAN

doi:10.3788/OPE.20182611.2723

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Water-jet assisted laser precision processing of Si₃N₄ ceramics

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-07-05

- Water-jet assisted laser precision processing of Si₃N₄ ceramics
- Optics and Precision Engineering Vol. 26, Issue 11, Pages: 2723-2731(2018)
- 作者机构：
  
  1.安徽建筑大学机械与电气工程学院, 安徽合肥 230022
  2.江南大学机械工程学院, 江苏无锡 214122
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20182611.2723
  CLC： TG665
- Received：09 May 2018，
  
  Accepted：11 June 2018，
  
  Published：25 November 2018
- 稿件说明：
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Yan-sheng YAO, Qing-bo CHEN, Jun WANG, et al. Water-jet assisted laser precision processing of Si₃N₄ ceramics[J]. Optics and precision engineering, 2018, 26(11): 2723-2731.
DOI：

Yan-sheng YAO, Qing-bo CHEN, Jun WANG, et al. Water-jet assisted laser precision processing of Si₃N₄ ceramics[J]. Optics and precision engineering, 2018, 26(11): 2723-2731. DOI： 10.3788/OPE.20182611.2723.

摘要

为解决工程陶瓷在激光加工中的表面质量问题提出了溶液辅助激光加工方法，首先在综合国内外有关研究的基础上，分析了激光穿越水层的能量传输、激光作用水下固体物质的热传导和静水及水射流辅助激光加工的作用机理；搭建了旁轴射流与超声振动辅助激光复合加工系统，开展了不同加工条件下氮化硅陶瓷刻槽对比试验。借助扫描电子显微镜检测分析激光刻蚀槽体形貌，运用激光共聚焦显微镜观测了槽体截面轮廓。研究表明，水射流辅助激光加工氮化硅陶瓷，因激光穿越水层、水的对流冷却等作用减少了激光烧蚀材料的有效能量，刻蚀深度有所降低；同时由于水层的存在改变了加工区域能量分布，使得槽口变宽。当激光电流200 A、频率50 Hz、脉宽0.6 ms时刻槽深度相对减小30%，宽度增大21%。水与氮化硅在激光作用下的会发生水解等效应，且水蒸汽、材料蒸汽、熔融粒子、气泡等沿水流动方向被带走，有利于表面质量的提高，综合效果良好。

Abstract

Solution-assisted laser processing was proposed to solve the problem of surface quality in engineering ceramics during laser processing. First

the energy transfer of the laser through a water layer

heat transfer of the laser acting on an underwater solid matter

and action mechanism of the auxiliary laser processing of the hydrostatic water and water jet were analyzed after referring to relevant research at home and abroad. A complex beam-processing system of the parabola jet and ultrasonic-vibration-assisted laser was constructed

and silicon nitride ceramics were tested under different processing conditions. Scanning electron microscopy was used to detect the morphology of the grooves

and the contour of the cut section was observed using a laser-scanning confocal microscope. Our research shows that the absorption and convection of water reduce the effective energy of the laser ablation materials and the etching rate during the water-jet-assisted laser processing of silicon nitride ceramic materials. Simultaneously

owing to the existence of a water layer

the energy distribution in the processing area changes

which results in widening of the notch. The groove depth decreases by 30% and the width increases by 21% when the laser current is 200 A

frequency is 50 Hz

and pulse width is 0.6 ms. Because the water and silicon nitride are hydrolyzed by the laser action

water vapor

material steam

molten particles

bubbles

and others are washed away in the water-flow direction

which is beneficial for the improvement in the processing efficiency and surface quality.

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references

唐修检, 刘谦, 田欣利, 等.切向载荷作用下氮化硅陶瓷崩碎损伤规律与机理[J].光学精密工程, 2015, 23(7):2023-2030.

TANG X J, LIU Q, TIAN X L, et al .. Regulation and mechanism of edge chipping for Si 3 N 4 ceramics worked by sliding loads regulation and mechanism of edge chipping for Si 3 N 4 ceramics worked by sliding loads[J]. Opt. Precision Eng. , 2015, 23(7):2023-2030.(in Chinese)

饶小双, 张飞虎, 刘立飞, 等.电火花机械复合磨削反应烧结SiC陶瓷的表面特征[J].光学精密工程, 2016, 24(9):2192-2199.

RAO X SH, ZHANG F H, LIU L F, et al .. Surface characteristics for RB-SiC ceramics by electrical discharge diamond grinding[J]. Opt. Precision Eng. , 2016, 24(9):2192-2199.(in Chinese)

MURRAY A J, TYRER J R. Nd:YAG laser drilling of 8.3 mm thick partially stabilized tetragonal zirconia-control of recast layer microcracking using localized heating techniques[J]. Journal of Laser Applications, 1999, 11(4):179-184.

DUBEY A K, YADAVA V. Laser beam machining-A review[J]. International Journal of Machine Tools & Manufacture , 2008, 48(6):609-628.

MORUTA N, ISHIDA S, FUJIMORI Y, et al .. Pulsed laser processing of ceramics in water[J]. Applied Physics Letters, 1988, 52(23):1965-1966.

BEHERA R R, SANKAR M R. State of the art on under liquid laser beam machining[J]. Materials Today Proceedings, 2015, 2(4-5):1731-1740.

KRUUSING A. Underwater and water-assisted laser processing:Part 1-general features, steam cleaning and shock processing[J]. Optics & Lasers in Engineering, 2004, 41(2):307-327.

FENG S, HUANG C, WWANG J, et al .. Investigation and modelling of hybrid laser-waterjet micromachining of single crystal SiC wafers using response surface methodology[J]. Materials Science in Semiconductor Processing, 2017, 68:199-212.

KRSTULOVICC N, SHANNON S, STEFANUIK R, et al .. Underwater-laser drilling of aluminum[J]. International Journal of Advanced Manufacturing Technology, 2013, 69(5-8):1765-1773.

陈笑.高功率激光与水下物质相互作用过程与机理研究[D].南京: 南京理工大学, 2004.

CHEN X. Studies on Mechanisms of the Interaction Between High-Power Laser and Matter in Water [D]. Nanjing: Nanjing University of Science and Technology, 2004.(in Chinese)

MULLICK S, MADHUKAR Y K, ROY S, et al .. An investigation of energy loss mechanisms in water-jet assisted underwater laser cutting process using an analytical model[J]. International Journal of Machine Tools & Manufacture , 2015, 91:62-75.

GARCIAGIRON A, SOLA D, PENA J I. Liquid-assisted laser ablation of advanced ceramics and glass-ceramic materials[J]. Applied Surface Science , 2016, 363:548-554.

李灵, 杨立军, 王扬, 等.水导激光微细加工中激光与水束光纤耦合技术[J].光学精密工程, 2008, 16(9):1614-1621.

LI L, YANG L J, WANG Y, et al .. Laser and water-j et fi ber coupling technology for water-jet guided laser micromachining[J]. Opt. Precision Eng. , 2008, 16(9):1614-1621.(in Chinese)

陈雪辉, 袁根福, 郑伟.水射流辅助激光刻蚀Al2O3陶瓷的试验研究[J].中国机械工程, 2013, 24(12):278-284

CHEN X H, YUAN G F, ZHENG W. Experimental investigation of water jet-assisted laser etching on Al 2 O 3 ceramics[J]. China Mechanical Engineering , 2013, 24(12):278-284.(in Chinese)

朱波, 齐立涛, 王扬.水辅助激光加工技术的实验研究[J].现代制造工程, 2003(12):73-74.

ZHU B, QI L T, WANG Y. The experimental study of water-assisted laser machining[J]. Modern Manufacturing Engineering , 2003(12):73-74.(in Chinese)

李田泽.激光的水下传输特性及其在测量中的应用[J].应用光学, 1998(1):17-21.

LI T Z. Laser tansmission property in water and its application in measurement[J]. Journal of Applied Optics, 1998(1):17-21.(in Chinese)

虞钢, 虞和济.激光制造工艺力学[M].北京:国防工业出版社, 2012.

YU G, YU H J. Laser Manufacturing Technology [M]. Beijing:National Defense Industry Press, 2012.(in Chinese)

印四华, 郭钟宁, 陈铁牛, 等.水下激光加工的爆发沸腾实验研究[J].电加工与模具, 2016(3):36-41.

YIN S H, GUO ZH N, CHEN T N, et al .. The explosive boiling experiment study on underwater laser processing[J]. Electromachining & Mould , 2016(3):36-41.(in Chinese)

曹州权, 谢小柱, 陈蔚芳, 等.液体辅助激光加工过程中压力检测及应用研究进展[J].光电工程, 2017, 44(4):381-392.

CAO ZH Q, XIE X ZH, CHEN W F, et al .. Research progress of pressure detection and applications in liquid-assisted laser machining[J]. Opto-Electronic Engineering, 2017, 44(4):381-392.(in Chinese)

王晓宇, 王江安, 宗思光, 等.水下光击穿的能量分布研究[J].中国激光, 2013, 40(10):33-37.

WANG X Y, WANG J A, ZONG S G, et al .. Research on energy distribution after laser-induced optical breakdown underwater[J]. Chinese J of Lasers , 2013, 40(10):33-37.(in Chinese)

OSTROVSKAYA G V. Efficiency of optical-to-acoustic energy conversion upon the interaction of a pulsed laser radiation with a liquid:Ⅰ. Calculation of the efficiency upon acoustooptic interaction[J]. Technical Physics , 2002, 47(10):1299-1305.

YAN Y, LI L, Sezer K, et al .. CO 2 laser underwater machining of deep cavities in alumina[J]. Journal of the European Ceramic Society, 2011, 31(15):2793-2807.

YAO Y S, YUAN G F, CHEN X H, et al .. Study on ultrasonic assisted laser under liquid processing platform[J]. Advanced Materials Research , 2013, 765-767:3090-3093.

YAO Y S, WANG Y Y, LI X Y, et al .. Study on ultrasonic-assisted laser machining of Si 3 N 4 [J]. Key Engineering Materials , 2016, 693:914-921.

姚燕生, 袁珠珠, 王园园, 等.氮化硅陶瓷水下激光与超声复合加工方法及其机理研究[J].机械工程学报, 2017, 53(7):207-216.

YAO Y SH, YUAN ZH ZH, WANG Y Y, et al .. Research on ultrasonic-laser machining underwater and its mechanism for silicon nitride ceramics[J]. Chinese Journal of Mechanical Engineering , 2017, 53(7):207-216.(in Chinese)

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Water-jet assisted laser precision processing of Si3N4 ceramics

DOI：10.3788/OPE.20182611.2723

摘要

Abstract

关键词

Keywords

references

Water-jet assisted laser precision processing of Si₃N₄ ceramics