Fabrication of micro-lens array in large-size drum roller by slow tool servo diamond forming turning

Zheng QIAO; Yan-gong WU; Yu-tao LIU; Peng ZHANG

doi:10.3788/OPE.20192701.0146

您当前的位置：

首页 >

文章列表页 >

Fabrication of micro-lens array in large-size drum roller by slow tool servo diamond forming turning

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Fabrication of micro-lens array in large-size drum roller by slow tool servo diamond forming turning
- Optics and Precision Engineering Vol. 27, Issue 1, Pages: 146-155(2019)
- 作者机构：
  
  哈尔滨工业大学机电工程学院，黑龙江哈尔滨 150001
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192701.0146
  CLC： TG502
- Received：24 May 2018，
  
  Accepted：06 July 2018，
  
  Published：15 January 2019
- 稿件说明：
移动端阅览
Zheng QIAO, Yan-gong WU, Yu-tao LIU, et al. Fabrication of micro-lens array in large-size drum roller by slow tool servo diamond forming turning[J]. Optics and precision engineering, 2019, 27(1): 146-155.
DOI：

Zheng QIAO, Yan-gong WU, Yu-tao LIU, et al. Fabrication of micro-lens array in large-size drum roller by slow tool servo diamond forming turning[J]. Optics and precision engineering, 2019, 27(1): 146-155. DOI： 10.3788/OPE.20192701.0146.

摘要

为实现辊筒模具大面积微透镜阵列的高效率与高精度加工，对微透镜阵列成形法的加工轨迹优化和进给轴伺服参数的优化方法进行了理论分析与实验研究。首先，通过分析微透镜阵列的特征轮廓，确定微透镜表面振纹的主要诱因为过渡台阶的突变; 其次，为使加工轨迹的二阶导数具有连续性，提出采用三次样条插值与傅里叶级数拟合对加工轨迹进行分段优化设计；最后，在优化加工轨迹的基础上，通过调整伺服系统的前馈参数，改善了进给轴的响应能力，减小了因驱动质量和阻尼而产生的跟踪误差。口径为800 μm、深度为26.7 μm的微透镜阵列的加工实验表明：采用优化的刀具轨迹和伺服参数，微透镜加工效率可以达到8 Hz，进给轴跟踪误差小于300 nm，并消除了微透镜阵列的表面振纹。微透镜单元口径尺寸精度为设计值的1.075%，随机检测50组，口径尺寸变化范围控制在2 μm内，表明微透镜具有良好的尺寸一致性。实验结果表明，加工轨迹的分段设计方法和伺服参数优化可有效抑制进给轴的振动，改善了微透镜阵列表面质量。

Abstract

In order to realize the high-efficiency and high-precision fabrication of micro-lens array in a large-sized drum lathe

a study on tool path fitting and servo parameter optimization for micro-lens machining with slow tool servo was presented theoretically and experimentally in this paper. The original trajectory characteristics of the micro-lens array were analyzed first

and the chatter marks on the micro-lens surface were caused by sharp points at the original machining trajectory. Secondly

a method was proposed to fit the machining trajectory of the transition section using cubic spline interpolation and Fourier series fitting in order to ensure the trajectory's continuity of the second derivative. Finally

the capability of dynamic response was improved by adjusting the servo parameters

so that the follow error (FE) of the feed axis caused by the inertia and damping effect was reduced with the optimization of machining trajectory. Machining experiments on micro-lens with diameter of 800 μm and depth of 26.7 μm were carried out. The results show that the homemade ultra-precision machine can fabricate eight micro-lenses per second with 300 nm FE

and the chatter marks of the micro-lens surface caused by sharp points are eliminated. The diameter error of micro-lens is 1.075% of the designed value. The fitting method has a good effect on the surface quality of micro-lens array.

关键词

Keywords

references

孟繁斐, 步敬.集成成像系统中高填充率微透镜阵列的设计与加工[J].光学精密工程, 2017, 25(8): 2130-2138.

MENG F F, BU J. Design and fabrication for micro-lens array with high fill factor in integral imaging system [J] . Opt. Precision Eng , 2017, 25(8): 2130-2138. (in Chinese)

朱晓阳, 侯丽雅, 郑悦, 等.微流体数字化技术制备聚合物微透镜阵列[J].光学精密工程, 2014, 22(2): 360-368.

ZHU X Y, HOU L Y, ZH Y, et al .. Fabrication of polymer micro-lens array by micro-fluid digitalization [J]. Opt. Precision Eng , 2014, 22(2): 360-368. (in Chinese)

邓欢, 李述利, 吴非, 等.增大3D观看视角的会聚式集成成像[J].光学精密工程, 2014, 22(1): 1-6.

DENG H, LI SH L, WU F, et al .. Toed-in integral imaging with enhanced 3D viewing angle[J]. Opt. Precision Eng , 2014, 22(1): 1-6. (in Chinese)

朱咸昌, 伍凡, 曹学东, 等.基于Hartmann-Shack波前检测原理的微透镜阵列焦距测量[J].光学精密工程, 2013, 21(5): 1122-1128.

ZHU X CH, WU F, CAO X D, et al .. Focal length measurement of microlens-array based on wavefront testing[J]. Opt. Precision Eng , 2013, 21(5): 1122-1128. (in Chinese)

LIU X, ZHANG X, FANG F, et al .. Influence of machining errors on form errors of microlens arrays in ultra-precision turning[J]. International Journal of Machine Tools and Manufacture , 2015, 96(9): 80-93.

ZHANG X, FANG F, Yu L H, et al .. Slow slide servo turning of compound eye lens[J]. Optical Engineering , 2013, 52(2): 023401.

张效栋, 王志诚, 曾臻, 等.微透镜阵列超精密切削正弦过渡路径优化设计[J].纳米技术与精密工程, 2017, 15(4): 239-245.

ZHAGN X D, WANG ZH CH, ZENG Z, et al .. Optimized design of sine-transition cutting path for microlens array in ultra-precision cutting[J]. Nanotechnology and Precision Engineering , 2017, 15(4): 239-245. (in Chinese)

ZHANG X, LIU K, SUNAPPAN V, et al .. Diamond micro engraving of gravure roller mould for roll-to-roll printing of fine line electronics[J]. Journal of Materials Processing Technology , 2015, 225(11): 337-346.

WANG M W, TSENG C C. Analysis and fabrication of a prism film with roll-to-roll fabrication process [J]. Optics Express , 2009, 17(6): 4718-4725.

OH J S, SONG C K, HWANG J, et al .. An ultra-precision lathe for large-area micro-structured roll molds [J]. Journal of the Korean Society for Precision Engineering , 2013, 30(12): 1303-1312.

ZHU Z, To S, ZHANG S. Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining[J]. Optics express , 2015, 23(16): 20593-20604.

YI A Y, LI L. Design and fabrication of a microlens array by use of a slow tool servo[J]. Optics letters , 2005, 30(13): 1707-1709.

GONG H, WANG Y, SONG L, et al .. Spiral tool path generation for diamond turning optical freeform surfaces of quasi-revolution[J]. Computer-Aided Design , 2015, 59(2): 15-22.

WANG X, FU X, LI C, et al .. Tool path generation for slow tool servo turning of complex optical surfaces[J]. The International Journal of Advanced Manufacturing Technology , 2015, 79(1): 437-448.

Views

342

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray

Trajectory optimization of self-driven AACMM

Processing method of large off-axis aspheric mirror

Formation mechanism of exit chipping in drilling hard-brittle material

Micro-texture law of ceramic artificial hip ball ultra-precision grinding

Related Author

WANG Yifan

XIA Jingjing

SHENG Pengfeng

JIAO Hongfei

SHEN Zhenxiang

ZHANG Zhong

HUANG Qiushi

WANG Zhanshan

Related Institution

Institute of Precision Optical Engineering， MOE Key Laboratory of Advanced Micro-Structured Materials， Shanghai Frontiers Science Center of Digital Optics， Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications， School of Physics Science and Engineering， Tongji University

School of Instrument Science and Opto-electronics Engineering， Hefei University of Technology

School of Mechanical Engineering， Anhui University of Science and Technology

Graduate Practice Station in Soochow Mason Optics Co.， Ltd.

School of Physical Science and Technology， Suzhou University of Science and Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰