Surface polishing of CVD diamond coating by femtosecond laser

Yu-ping MA; Yao ZHANG; Chao WEI; Xiang LI

doi:10.3788/OPE.20192701.0164

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Surface polishing of CVD diamond coating by femtosecond laser

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Surface polishing of CVD diamond coating by femtosecond laser
- Optics and Precision Engineering Vol. 27, Issue 1, Pages: 164-171(2019)
- 作者机构：
  
  安徽建筑大学机械与电气工程学院，安徽合肥 230601
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192701.0164
  CLC： TN249
- Received：02 May 2018，
  
  Accepted：29 July 2018，
  
  Published：15 January 2019
- 稿件说明：
移动端阅览
Yu-ping MA, Yao ZHANG, Chao WEI, et al. Surface polishing of CVD diamond coating by femtosecond laser[J]. Optics and precision engineering, 2019, 27(1): 164-171.
DOI：

Yu-ping MA, Yao ZHANG, Chao WEI, et al. Surface polishing of CVD diamond coating by femtosecond laser[J]. Optics and precision engineering, 2019, 27(1): 164-171. DOI： 10.3788/OPE.20192701.0164.

摘要

为了实现降低金刚石涂层粗糙度的目的，本文研究了飞秒激光功率，重复频率以及扫描速度对金刚石涂层表面粗糙度的影响，试验之后利用白光干涉仪检测抛光区域形貌以及粗糙度。试验结果表明：粗糙度随着功率的降低而减小，当功率降至100 mw以下时抛光后的粗糙度会随着功率的降低而略微的提高；重复频率对抛光后的粗糙度无显著影响；粗糙度随扫描速度的增大而减小，当扫描速度增加到1.6 mm/s之后，粗糙度会出现略微的升高。在功率100 mw，重复频率1 KHz，扫描速度1.6 mm/s的条件下，得到的粗糙度最低，约为0.14 μm，局部区域粗糙度可降至100 nm以下，并且抛光的区域相对于未抛光区域更具有致密性，基本上满足金刚石涂层低摩擦表面的要求。

Abstract

In this study

the effects of femtosecond laser power

repetitive frequency

and scanning speed on diamond roughness were examined for the purpose of diamond coating surface Ra improvements. The morphology and roughness of fs-laser polished regions were analyzed with white-light interferometry. The experimental results showed that the diamond coating roughness decreased if the laser power decreased

and when the laser power was less than 100 mW

the roughness increased slightly with the reduced power. The laser repetitive frequency did not exhibit deteriorative effects on the roughness. The roughness decreased with decreasing scanning speed; however

a slight increase in the surface roughness was observed when the scanning velocity increased to 1.6 mm/s. Finally

under the conditions of 100 mW laser power

1 KHz repetition rate

and 1.6 mm/s scanning speed

a minimum surface roughness of approximately 0.14 μm was obtained

reaching as low as 100 nm in certain local areas. Furthermore

the polished region had a higher compactness compared to the unpolished areas

and it met the requirements for low friction diamond coatings.

关键词

Keywords

references

马玉平, 王金龙. W 18 Cr 4 v高速钢衬底CVD金刚石涂层沉积技术研究[J].人工晶体学报, 2015, 44(4);1041-1045.

MA Y P, WANG J L. Research on deposition technology of CVD diamond coating on W 18 Cr 4 V high-speed steel substrate[J]. Journal of Synthetic Crystals , 2015, 44(4): 1041-1045. (in Chinese)

卢文壮, 杨斌, 冯伟, 等.应用CVD金刚石涂层工具研磨单晶蓝宝石[J].光学精密工程, 2016, 24(3):540-546.

LU W ZH, YANG B, FENG W, et al .. Lapping of sapphire wafers by CVD diamond coated tools[J]. Opt. Precision Eng ., 2016, 24 (3) :540-546. (in Chinese)

HU J, CHOU Y K, THOMPSON, et al .. Characterizations of nano-crystalline diamond coating cutting tools[J]. Surface and Coatings Technology , 2007, 202/4-7;1113-1117.

曹国风.激光技工[M].北京:化学工业出版社, 2015.

CAO G F. Laser mechanic [M]. Beijing: Chemical Industry Press, 2015.(in Chinese)

SANGUK PARK, YUNSEOK KIM, JOONHO YOU, et.al .. Damage-free cutting of chemically strengthened glass by creation of sub-surface cracks using femtosecond laser pulses[J]. Manufacturing Technology , 2017, 66(1): 535-538.

张成云, 刘海英, 满文庆, 等.飞秒激光正交线扫描诱导表面微纳结构[J].光学精密工程, 2017, 25(12):3063-3069.

ZHANG CH Y, LIU H Y, MAN W Q, et al .. Femtosecond laser induced surface micro-and nano-structures by orthogonal scanning processing[J]. Opt. Precision Eng ., 2017, 25(12): 3063-3069. (in Chinese)

杨成娟, 梅雪松, 王文君, 等.皮秒激光功率变化对激光诱导晶体硅变化的影响[J].红外与激光工程, 2016, 45(1):106006-0106006.

YANG CH J, MEI X S, WANG W J, et al .. Influence of laser power variation on laser-induced changes of crystalline silicon[J]. Infrared and laser engineering , 2016, 45 (1) :106006-0106006. (in Chinese)

张峰烈, 傅星, 刘春阳.纳秒脉冲激光对316L不锈钢微抛光效果的影响[J].纳米技术与精密工程, 2011, 9(4): 370-376.

ZHANG F L, FU X, LIU C Y. Influences of nanosecond pulsed laser on parameters in micro-polishing of stainless steel316L[J]. Nanotechnology and precision Engineering , 2011, 9(4): 370-376. (in Chinese)

WANG H P, GUAN Y C, ZHENG H Y. Smooth polishing of femtosecond laser induced craters on cemented carbide by ultrasonic vibration method[J]. Applied Surface Science , 2017, 426(7): 399-405.

YOSHINORI OGAWA, MICHIHARU OTA, KAZUO NAKAMOTO, et.al .. A study on machining of binder-less polycrystalline diamond by femtosecond pulsed laser for fabrication of micro milling tools[J]. Manufacturing Technology , 2016, 65(1): 245-248.

NAOKI YASUMARU, KENZO MIYAZAKI, JUNSUKE KIUCHI. Control of tribological properties of diamond-like carbon films with femtosecond-laser-induced nanostructuring [J]. Applied Surface Science , 2008, 254(8): 2364-2368.

LI R, NIE W J, LU Q M, et.al .. Femtosecond-laser-written superficial cladding waveguides in Nd:CaF 2 crystal [J] .Optics & Laser Technology , 2017, 92: 163-167.

虞刚, 虞和济.激光制造工艺学[M].北京:国防工业出版社, 2012.

YU G, YU H J. Laser Manufacturing technology [M]. Beijing: National Defense Industry Press, 2012. (in Chinese)

姚燕生, 袁珠珠, 王园园, 等.氮化硅陶瓷水下激光与超声复合加工方法及其机理研究[J].机械工程学报, 2017, 53(7): 207-216.

YAO Y S, YUAN Z Z, WANG Y Y, et al .. Research on ultrasonic-laser machining underwater and its mechanism for silicon nitride Ceramics[J]. Journal of Mechanical Engineering , 2017, 53(7): 207-216. (in Chinese)

马维刚, 王海东, 张兴, 等.飞秒脉冲激光加热金属薄膜的理论和实验研究[J].物理学报, 2011, 60(6): 421-427.

MA W G, WANG H D, ZHANG X, et al .. Theoretical and experimental study of femtosecond pulse laser heating on thin metal film[J]. Journal of Physics , 2011, 60(6): 421-427. (in Chinese)

吴东江, 姚龙元, 马广义, 等.偏振态飞秒激光加工石英玻璃表面质量的影响[J].强激光与粒子束, 2014, 26(2): 31-37.

WU D J, YAO L Y, MA G Y, et al .. Influence of polarization state on the surface quality of femtosecond laser ablation quartz glass[J]. Strong laser and particle beam , 2014, 26(2): 31-37. (in Chinese)

石玉龙.薄膜技术与薄膜材料[M].北京:化学工业出版社, 2015.

SHI Y L. Thin film technology and film materials [M]. Beijing: Chemical Industry Press, 2015. (in Chinese)

赵清亮, 姜涛, 董志伟, 等.飞秒激光加工SiC的烧蚀阈值及材料去除机理[J].机械工程学报, 2010, 46(21): 172-177.

ZHAO Q L, JIANG T, DONG ZH W, et.al .. Ablation threshold and material removal mechanisms of SiC processed by femtosecond laser[J]. Journal of Mechanical Engineering , 2010, 46(21): 172-177. (in Chinese)

ROY S, BALLA VK, MALLIK AK, et al .. A comprehensive study of mechanical and chemo-mechanical polishing of CVD diamond[J]. Science Direct , 2018, 5(3): 9846-9854.

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