Design and test of electrostatic driving MOEMS arming device

Jia-kai LIU

doi:10.3788/OPE.20192702.0334

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Design and test of electrostatic driving MOEMS arming device

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Design and test of electrostatic driving MOEMS arming device
- Optics and Precision Engineering Vol. 27, Issue 2, Pages: 334-340(2019)
- 作者机构：
  
  1.西安交通大学机械工程学院，陕西西安 710049
  2.武警工程大学装备管理与保障学院，陕西西安 710086
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192702.0334
  CLC： TJ430.2;TN253
- Received：12 September 2018，
  
  Accepted：23 October 2018，
  
  Published：15 February 2019
- 稿件说明：
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Jia-kai LIU. Design and test of electrostatic driving MOEMS arming device[J]. Optics and precision engineering, 2019, 27(2): 334-340.
DOI：

Jia-kai LIU. Design and test of electrostatic driving MOEMS arming device[J]. Optics and precision engineering, 2019, 27(2): 334-340. DOI： 10.3788/OPE.20192702.0334.

摘要

为了提高引信状态控制的安全性，增强其抵抗引信内、外强电磁干扰的能力，提出了一种应用于微小型引信安全系统的硅基微光机电保险机构。该机构采用光纤作为过程能量传输的载体，通过静电驱动方式实现对光纤光路错位与对准的控制，达到引信安全与解除保险的目的。设计了MOEMS保险机构的总体结构和耦合光路，并对它进行SOI+DRIE工艺设计和加工。通过开展静电微驱动器性能测试试验和光路性能测试试验得出，静电微驱动器能够实现130 μm的大位移输出，MOEMS保险机构的解除保险时间和恢复保险时间分别为13 ms和5 ms，光能传输效率为46.1%。所设计的MOEMS保险机构能够满足功能要求，具备天然的抗电磁干扰能力，有效提高了引信的本征安全性。

Abstract

To improve the state control safety of a fuze and enhance its ability to resist electromagnetic interference

this paper proposes a silicon-based Micro-Opto-Electro-Mechanical Systems (MOEMS) arming device used in the miniature safety and arming system of a fuze. The device adopts two optical fibers as the carriers of energy transmission

and their misalignment and alignment are controlled through an electrostatic driving mechanism

which determines the safety and arming state of the fuze. The overall structure and coupled optical path of the MOEMS arming device are designed

and subsequently

it is manufactured through a silicon-on-insulator deep reactive-ion etching process. Through experiments evaluating the performances of the electrostatic driving mechanism and optical path

it is concluded that the displacement output of the electrostatic driving mechanism can reach 130 μm

the arming time and restore safety time are 13 ms and 5 ms

respectively

and the light energy transfer efficiency is 46.1%. The MOEMS arming device can satisfy the functional requirements of a fuze and it can have natural resistance to electromagnetic interference

which improves the intrinsic safety of the fuze.

关键词

Keywords

references

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