Development of mosaic technology for large-size reflective gratings

Guo-jun YANG; Hai-li YU; Xiao-tian LI; Shan-wen ZHANG; Xiao-tao MI; Hong-zhu YU

doi:10.3788/OPE.20192703.0542

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Development of mosaic technology for large-size reflective gratings

Modern Applied Optics | 更新时间：2020-08-13

- Development of mosaic technology for large-size reflective gratings
- Optics and Precision Engineering Vol. 27, Issue 3, Pages: 542-551(2019)
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  2.中国科学院大学，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192703.0542
  CLC： TN256; O436.1
- Received：13 September 2018，
  
  Accepted：09 November 2018，
  
  Published：15 March 2019
- 稿件说明：
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Guo-jun YANG, Hai-li YU, Xiao-tian LI, et al. Development of mosaic technology for large-size reflective gratings[J]. Optics and precision engineering, 2019, 27(3): 542-551.
DOI：

Guo-jun YANG, Hai-li YU, Xiao-tian LI, et al. Development of mosaic technology for large-size reflective gratings[J]. Optics and precision engineering, 2019, 27(3): 542-551. DOI： 10.3788/OPE.20192703.0542.

摘要

大尺寸反射式光栅是提高天文光谱仪分辨率和啁啾脉冲放大系统输出能量的核心元件。随着天文和激光核聚变技术的发展，大尺寸反射式光栅的研制已成为国内外学者研究的热点。相较于单块大尺寸反射式光栅的研制，拼接法以其难度系数低、制作成本低和待拼接的小光栅易制作、质量高等优点成为了制作大尺寸反射式光栅的主要方法。本文介绍了大尺寸反射式光栅拼接技术的基本原理，详细综述了光栅拼接技术的研究进展，包括光栅拼接误差检测理论、光栅拼接误差分离、拼接光栅波前相位校正、光栅拼接误差维数的削减和光栅拼接装置，最后总结了光栅拼接技术的优缺点并指出了其未来的发展方向。

Abstract

Large-size reflective grating is the core element for improving both the resolution of astronomical spectrometers and the output energy of chirp-pulse amplification systems. With the development of astronomy and laser fusion

the fabrication of large-size reflective gratings has become a hot topic for scholars both domestically and internationally. Compared to the fabrication of a single large-size reflective grating

the mosaic method has become the primary method of fabricating large-size reflective gratings

as it has the advantages of a low difficulty coefficient

low production cost

easy fabrication

and high quality of small gratings to be mosaicked. In this study

the basic principles of large-size reflective grating mosaic technology are introduced

and the research progress of grating mosaic technology is summarized in detail. More specifically

this study considers the theory of grating mosaic error detection

the separation of grating mosaic error

the phase correction of the wavefront of mosaic grating

the reduction of the dimension of grating mosaic error

and the grating mosaic device. Finally

the advantages and disadvantages of grating mosaic technology and directions for future development are summarized.

关键词

Keywords

references

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