Development of capacitive MEMS vibrating ring gyroscope
Micro/Nano Technology and Fine Mechanics|更新时间:2020-08-13
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Development of capacitive MEMS vibrating ring gyroscope
“News report: In the field of microelectromechanical systems, researchers have successfully proposed a new type of capacitive ring microelectromechanical vibration gyroscope. This gyroscope has the characteristics of structural symmetry, identical modal characteristic parameters, and strong anti-interference ability. The research team designed a silicon-based sensitive structure and established an electrical parameter and angular velocity sensitive model. The experimental results show that the resonant frequency of the gyroscope is stable and the quality factor is high, providing a feasible solution for the development of high-performance silicon-based microelectromechanical gyroscopes.”
Optics and Precision EngineeringVol. 27, Issue 4, Pages: 842-848(2019)
Zhi-wei KOU, Hui-liang CAO, Yun-bo SHI, et al. Development of capacitive MEMS vibrating ring gyroscope[J]. Optics and precision engineering, 2019, 27(4): 842-848.
DOI:
Zhi-wei KOU, Hui-liang CAO, Yun-bo SHI, et al. Development of capacitive MEMS vibrating ring gyroscope[J]. Optics and precision engineering, 2019, 27(4): 842-848. DOI: 10.3788/OPE.20192704.0842.
Development of capacitive MEMS vibrating ring gyroscope