“In the field of displacement systems for metrological scanning electron microscopes, experts have conducted in-depth research on the vibration parameters of mechanical displacement tables through simulation analysis. The structural vibration characteristics of the mechanical displacement table were obtained through static and modal analysis; Further harmonic response analysis revealed the relationship between external load frequency and displacement table stress, strain, deformation, and acceleration. The research results show that there are dangerous vibrations in the mechanical displacement table at specific frequencies, which need to be avoided and compensated for in subsequent improvements.”