Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks

Ling-yun WANG; Xiang HUANG; Si-ying LIN; Xiao-long LIN; Zhi-hong LIN

doi:10.3788/OPE.20192705.1128

您当前的位置：

首页 >

文章列表页 >

Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks

Micro/Nano Technology and Fine Mechanics | 更新时间：2020-08-13

- Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks
- Optics and Precision Engineering Vol. 27, Issue 5, Pages: 1128-1137(2019)
- 作者机构：
  
  1.厦门大学深圳研究院，广东深圳 518057
  2.厦门大学机电工程系，福建厦门 361102
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20192705.1128
  CLC： TM282;TN384
- Received：25 October 2018，
  
  Accepted：17 December 2018，
  
  Published：15 May 2019
- 稿件说明：
移动端阅览
Ling-yun WANG, Xiang HUANG, Si-ying LIN, et al. Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks[J]. Optics and precision engineering, 2019, 27(5): 1128-1137.
DOI：

Ling-yun WANG, Xiang HUANG, Si-ying LIN, et al. Design and experiment of high frequency jetting dispenser driven by double piezoelectric stacks[J]. Optics and precision engineering, 2019, 27(5): 1128-1137. DOI： 10.3788/OPE.20192705.1128.

摘要

为了满足电子封装产业对胶体高速、微量分配的需求，设计了一种基于圆弧柔性铰链放大机构的双压电陶瓷驱动喷射点胶阀。首先，利用有限元分析软件对放大机构输出位移和模态进行了计算与分析。针对其高频需求，讨论了结构参数对其影响因素。基于微元法并结合喷嘴内胶体动力学分析，建立了喷嘴内胶体喷射的流体力学模型。结合阀杆与阀座配合的仿真模型，利用FLOW-3D的流固耦合仿真，揭示了喷射点胶时胶点的成型过程。在此基础上探究了胶体喷射时喷嘴处压力的变化与流速的关系，为点胶阀参数的控制和优化奠定了基础。最后，搭建了喷射系统实验平台，选用黏度为180 cps的胶体进行点胶性能测试，得出了供料压力和驱动方波频率对胶点尺寸的影响规律。实验结果显示，在供料压力为6 bar，驱动方波幅值频率360 Hz等参数下，获得胶点最小直径为52 5 μm。同时，在380~400 Hz的频率区间内进行高频喷射实验，能够获得均匀微小的圆形胶点。实验结果验证了该圆弧柔性铰链放大机构的双压电驱动点胶阀的高频、微量喷射性能，为压电高频喷射点胶的应用和研究提供了参考。

Abstract

To meet the requirements of high-frequency and micro-scale distribution of glue

a novel jetting dispenser with a corner-filleted flexure hinge driven by double piezoelectric stacks was developed. First

the output displacement and modal of the amplifier were calculated using finite element analysis software. The influencing factors of the structural parameters were discussed with regard to the requirement of high frequency operation. Based on the microelement method and analysis of the glue dynamics in the nozzle

a hydrodynamic model of the glue jetting in the nozzle was established. Combined with the simulation model of stem and seat assemblies

a FLOW-3D fluid-structure interaction simulation was conducted to reveal the formation process of droplets during dispensing. On this basis

the change of pressure in the nozzle and its relationship with the flow rate were studied

thus preparing a foundation for the control and optimization of the parameters of the dispenser. Finally

a jetting system platform was established

glue with a viscosity of 180 cps was used to test the dispensing property

and the relations between the feeding pressure

square-wave frequency

and droplet size were determined. Experimental results indicate that a minimum droplet diameter of 525 μm is obtained when a 6-bar feed pressure and a 360-Hz square-wave frequency are used. Simultaneously

high-frequency dispensing experiments between 380 and 400 Hz yield uniform micro-droplets. These results verify the high-frequency and micro-jetting performance of the double piezoelectric jetting dispenser with a corner-filleted flexure hinge

thus providing a good reference for the application and research of piezoelectric high-frequency dispensing.

关键词

Keywords

references

孙道恒, 高俊川, 杜江, 等.微电子封装点胶技术的研究进展[J].中国机械工程, 2011, 22(20):2513-2519.

SUN D H, GAO D CH, DU J, et al .. Advances in fluid dispensing technology for micro-electronics packaging[J]. China Mechanical Engineering , 2011, 22(20): 2513-2519. (in Chinese)

周晓阳.先进封装技术综述[J].集成电路应用, 2018, 297(6): 8-14.

ZHOU X Y. Overview of advanced IC packaging technology[J]. Applications of IC , 2018, 297(6): 8-14. (in Chinese)

张勤, 徐策, 徐晨影, 等.超微量点胶方法与实验[J].光学精密工程, 2013, 21(8):2071-2078.

ZHANG Q, XU C, XU CH Y, et al .. Approach and experiment of Ultra-micro dispensing[J]. Opt. Precision Eng. , 2013, 21(8):2071-2078. (in Chinese)

史亚莉, 张正涛, 徐德.跨尺度微管微球三维半自动装配点胶系统[J].光学精密工程, 2015, 23(11):3121-3128.

SHI Y L, ZHANG ZH T, XU D. 3D semi-automatic assembly and dispensing system for trans-scale parts of micro-tube and micro-sphere[J]. Opt. Precision Eng. , 2015, 23(11): 3121-3128. (in Chinese)

刘益芳, 陈丹儿, 戴婷婷.无源MEMS压力开关的设计与制备[J].光学精密工程, 2018, 26(5): 1133-1139.

LIU Y F, CHEN D E, DAI T T. Design and fabrication of passive MEMS pressure switch[J]. Opt. Precision Eng. , 2018, 26(5): 1133-1139. (in Chinese)

JEON J C, NGUYEN Q H, CHOI S B.The design and modeling of jetting dispenser actuated by dual piezostack actuator[J]. Applied Mechanics & Materials , 2013, 433-435:72-75.

JEON J, HONG S M, CHOI M, et al .. Design and performance evaluation of a new jetting dispenser system using two piezostack actuators[J]. Smart Materials & Structures , 2015, 24(1): 015020.

赵钧, 陈硕, 尚智.热气泡式微喷技术研究[J].中国机械工程, 2005, 16(z1):377-379.

ZHAO J, CHEN SH, SHANG ZH, et al .. Thermal bubble micro-iniection technology China mechanical engineering[J]. China Mechanical Engineering , 2005, 16(z1):377-379.(in Chinese)

李渭松, 单修洋, 魏新明.气动式喷射阀泄压过程数值模拟与分析[J].现代制造工程, 2017(1):1-6, 18.

LI W S, SHAN X Y, WEI X M. Numerical simulation and analysis of pressure relief process of pneumatic jetting valve[J] . Modern Manufacturing Engineering , 2017, 436(1): 1-6, 18. (in Chinese)

ZHOU C, LI J H, DUAN J A, et al .. The principle and physical models of novel jetting dispenser with giant magnetostrictive and a magnifier[J]. Scientific Reports , 2016, 5:18294.

WANG L Y, Du X H, LI Y P, et al .. Simulation and experiment study on adhesive ejection behavior in jetting dispenser[J]. Journal of Adhesion Science & Technology , 2014, 28(1):53-64.

黄大任, 袁松梅, 褚祥诚, 等.压电非接触式点胶阀的设计与实验[J].压电与声光, 2016, 38(1):11-15.

HUANG D R, YUAN S M, CHU X CH, et al .. Design and experiment of a piezoelectric driven noncontact dispenser[J]. Piezoelectrics and Acoustooptics , 2016, 38(1):11-15. (in Chinese)

ZHOU C, LI J, DUAN J A, et al .. Direct-acting piezoelectric jet dispenser with rhombic mechanical amplifier[J]. IEEE Transactions on Components Packaging & Manufacturing Technology, 2018, 8(5): 910-913.

DENG G L, WANG N, ZHOU C, et al .. A simplified analysis method for the piezo jet dispenser with a diamond amplifier[J]. Sensors, 2018, 18(7): 2115.

焦晓阳, 刘建芳, 丁宁宁, 等.压电气体混合驱动式喷射点胶阀的设计与实验[J].哈尔滨工程大学学报, 2013, 34(11):1445-1449.

JIAO X Y, LIU J F, DING N N, et al .. Design and experiment for the piezoelectric-gas hybrid driven jet dispensing valve[J]. Journal of Harbin Engineering University , 2013, 34(11):1445-1449. (in Chinese)

李耀, 吴洪涛, 杨小龙, 等.圆弧柔性铰链的优化设计[J].光学精密工程, 2018, 26(6): 1370-1379.

LI Y, WU H T, YANG X L, et al .. Optimization design of circular flexure hinges[J]. Opt. Precision Eng. , 2018, 26(6): 1370-1379. (in Chinese)

张伟, 杨立保, 李清雅, 等.直圆抛物线复合铰链柔度研究[J].红外与激光工程, 2018, 47(11): 250-256.

ZHANG W, YANG L B, LI Q Y, et al .. Research on compliance of compound circular-parabolic hinges[J]. Infrared and Laser Engineering , 2018, 47(11): 250-256. (in Chinese)

ZHANG J S, JIA H L, ZHANG J H. A fluid dynamic analysis in the chamber and nozzle for a jetting dispenser design[C]. International Conference on Electronic Packaging Technology & High Density Packaging, Xi'an, P.R. China: IEEE , 2010: 879-883.

Views

175

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Piezoelectric driven hydraulic amplification jetting system

Influences of balanced stiffness of clamping body on performance of inverse piezoelectric inchworm motor

Design and experiment of piezoelectric resonance high frequency fatigue testing machine

Related Author

GU Shou-dong

YANG Zhi-gang

JIANG Hai

LIU Jian-fang

LU Song

LIU Qin

GUO Wen-feng

QU Jian-jun

Related Institution

College of Mechanical Science and Engineering, Jilin University

School of Mechatronics Engineering, Harbin Institute of Technology

College of Mechanical and Electrical Engineering, Jilin Institute of Chemical Technology

School of Mechanical Engineering, Northeast Dianli University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰